JPS61237951A - Air curtain device - Google Patents

Abstract

PURPOSE:To provide an air curtain device capable of obviating troublesome operations for opening and closing a double door when being applied to an air-conditioned dustproof chamber and capable of using a smaller capacity fan, by providing air blow-off ports for blowing off air in opposite directions. CONSTITUTION:The air curtain device comprises the air blow-off ports 7a, 7b provided on the corridor 1 side of the door 2. The ports 7a, 7b are so constructed as to blow off air in opposite directions, and the angle of junction of airflows generated in the two directions is set to be not more than 180 deg. on the side of the corridor 1. The ports 7a, 7b are operated in conjunction with opening and closing of the door 2. In addition, by the function of the air curtain device, a single door can be employed, whereby troublesome operation in opening and closing a double door can be obviated, and articles can be efficiently carried in and out.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to an air curtain device, and is particularly suitable for air-conditioned dust-proof rooms, clean benches, etc. installed in semiconductor manufacturing factories, drug manufacturing factories, food manufacturing factories, hospitals, etc. The present invention relates to an air curtain device.

[Background of the invention]

FIG. 4 shows a conventional technology of an air-conditioned dust-proof room in a semiconductor manufacturing factory or the like in which an air curtain device is installed.

In this air-conditioned dust-proof room, the person working in the clean room 6 opens and closes the door 2.5 from the hallway 1, passes through the front room 4,
Next, dust is removed using Air Java 5, and the room is entered into a clean room 6.

In the prior art, the reason why the door 2.5 is a double sin is that the front chamber 4 also requires a certain degree of cleanliness. Generally, the front chamber 4 is made to the specifications of a semi-clean room, and in the prior art, in order to maintain the front chamber 4 at a certain level of cleanliness, it was necessary to use double doors.

However, in the conventional air-conditioned dust-proof room, it is necessary to open and close the doors 2 and 3 twice, which is a very troublesome problem, especially for workers who transport goods.

In addition, if an air curtain device is simply made of a single door, wind will be drawn in, making it difficult to maintain the required cleanliness inside the room.If the doorway is wide, the wind speed and wind cover may Since it is necessary to increase the fan capacity, the fan capacity must be increased. As a result, if the noise becomes significantly louder and exceeds 7 odB, a problem arises in that it interferes with delicate work performed within the clean room 6.

Next, FIG. 5 shows a conventional horizontal lamina flow type clean bench.

In this horizontal lamina flow type clean bench 9,
Clean air 11 is blown out horizontally from a clean air outlet 10.

However, the conventional clean bench of this type is
No consideration is given to disturbances caused by wind flowing in different directions from outside.

Therefore, when the wind flows in a direction different from the flow of clean air 11, there is a problem that turbulence occurs in the airflow, the characteristics of the horizontal laminar flow deteriorate, and the cleanliness level also decreases.

Next, FIG. 6 shows a conventional vertical lamina flow type clean bench.

In this vertical lamina flow type clean bench 14, clean air 16 is directed vertically from the clean air outlet 15.
I try to blurt out.

However, conventionally, even in this type of clean bench, consideration has not been given to disturbances, so when wind flows in a direction different from the outside to the flow of clean air 16, the airflow is disturbed and the vertical lamina flow is There was a problem that the characteristics deteriorated and the cleanliness also decreased.

[Purpose of the invention]

An object of the present invention is to solve the problems of the prior art, to maintain the required cleanliness of an air-conditioned dust-proof room and a clean bench, and to apply it to the air-conditioned dust-proof room to avoid the trouble of opening and closing the door due to double sin. To provide an air curtain device which can solve the problems and use a small capacity fan.

[Summary of the invention]

The present invention is characterized in that it is provided with an air outlet that blows out air from two opposing directions.With this configuration, a decrease in cleanliness due to the intrusion of air from the outside is eliminated, and as a result, the air conditioning dust-proof room and It is possible to maintain a clean bench at the required level of cleanliness, and when applied to an air-conditioned dust-proof room, it can be treated as a serious crime. By using two units to blow out air, noise can be kept to a minimum.

[Embodiments of the invention]

Hereinafter, embodiments of the present invention will be explained with reference to the drawings. Fig. 1 shows the embodiment of the present invention applied to an air-conditioned dust-proof room.

The air-conditioned dust-proof room shown in this embodiment has a hallway 1, a door 2,
It is equipped with an anteroom 4, an air jaw 5, and a clean room 6, and is configured as a heavy-duty machine.

On the other hand, the air curtain device of the embodiment has air blowing lowers a and 17b installed on the hallway 1 side of the door 2. The air blowing lowers a and 7b are configured to blow out air in directions opposite to each other, and are provided so that the intersection angle of the air blown out from the two directions is 180 degrees or less toward the hallway 1 side. ing. Further, the air blowers 07a and 7b operate in conjunction with the opening and closing of the door 2.

In the air curtain device of the embodiment shown in FIG. 1, when the door 2 is opened, the air blowing lowers a, yb are
As a result, air is blown out from two directions toward the bottom 1 side at an intersection angle of 180 degrees or less - this air flow 8 can prevent dust from entering from the outside. therefore,
The inside of the clean room 6 can be maintained at a required level of cleanliness.

Furthermore, the function of the air curtain device allows it to be configured as a -felony, which eliminates the hassle of opening and closing a double offense, allowing for efficient loading and unloading of articles.

Furthermore, since the air is blown out from the two air blowing lowers a and 7b, it is also possible to use two small-capacity fans to blow the air, thus eliminating problems caused by fan noise. It becomes possible. - Figure 2 below shows an embodiment in which the present invention is applied to a horizontal laminar flow type glue lean bench.

The clean bench 9 shown in FIG. 2 has a clean air outlet 10 and is configured to blow clean air 11 horizontally from the clean air outlet 10.

The air curtain device is provided on the left and right sides of the airflow outlet side of the clean air 11 in the clean bench 9.
It is configured with two air blowing ports 12a and 12b. Further, this air curtain device blows air from the air blowing ports 12a and 12b toward the flow direction of the clean air 11 at an intersection angle of 180 degrees or less to form an air flow 15.

In the air curtain device of the embodiment shown in FIG. 2, air is blown from two directions through the air outlets 12a and 12b, and this air flow 15 can prevent air from entering the clean air 11 in different directions. Therefore, clean air 11 due to the wind flow in different directions coming in from the outside.
turbulence in the airflow can be prevented, and deterioration of the horizontal laminar flow characteristics and cleanliness can be prevented, so the inside of the clean bench 9 can be maintained at the required cleanliness.

Next, FIG. 5 shows an embodiment in which the present invention is applied to a vertical lamina flow type clean bench.

The clean bench 14 shown in FIG. 3 includes a clean air outlet 15 and is configured to blow out clean air 16 in a vertical direction from the clean air outlet 15.

Further, the air curtain device has two air curtain devices installed above and below the outlet side of the flow of clean air 16 in the clean bench 14.
It is configured to have two air blowing ports 17a and 17b. This air curtain device includes the air outlet 1
1 in the flow direction of the clean air 16 from 7a and t7b.
Blow out air at an intersection angle of 80 degrees or less, air flow 1
B.

In the air curtain device of the embodiment shown in FIG. 3, air is blown out in two directions through the air outlets 17a and 17b, and this air flow 1B prevents lice from entering in different directions with respect to the flow of clean air 16. be able to. As a result, it is possible to prevent the airflow of the clean air 16 from being disturbed due to the intrusion of wind from the outside, and to prevent the deterioration of the vertical laminar flow characteristics and the cleanliness level, so that the interior of the clean bench 14 can be kept clean as needed. Can be maintained at the same time.

[Effects of the Invention] According to the present invention described above, since an air outlet is provided to blow out air from two opposing directions, when applied to an air-conditioned dust-proof room and a clean bench, it is possible to prevent air from entering from outside. This has the effect of preventing a decrease in cleanliness and therefore maintaining the air-conditioned dust-proof room and clean bench at a required level of cleanliness.

In addition, especially when the present invention is applied to an air-conditioned dust-proof room, it can be a serious crime, thus eliminating the hassle of opening and closing doors and bringing in goods in general.

This has the effect of efficiently carrying out transport, and since two small capacity fans can be used to blow out the air, there is also the effect of suppressing fan noise.

[Brief explanation of the drawing]

Fig. 1 is a plan view showing an embodiment of the present invention applied to an air-conditioned dust-proof room, Fig. 2 is a perspective view of an embodiment of the invention applied to a clean bench with horizontal laminar flow, and Fig. 3 is a plan view showing an embodiment of the present invention applied to a clean bench with horizontal laminar flow. FIG. 4 is a side view of an embodiment of the present invention applied to a clean bench, FIG. 4 is a plan view showing the prior art of an air-conditioned dust-proof room, FIG. 5 is a perspective view of the prior art of a clean bench with horizontal laminar flow, and FIG. 1 is a side view of a prior art vertical laminar flow clean bench; FIG. 1... Corridor of the air-conditioned dust-proof room, 2... Same door, 4. Knock on the same front room, 5.
...Same Air Java, 6. Clean room, 7a, 7b... Air outlets that make up the air curtain device, 8... Air blown out from the air outlets. the flow of air. 9...Horizontal Rami differential 0- clean bench, 1
0...Clean bench clean air outlet,
12a, 12b... Air outlets forming the air curtain device, 15... Flow of air blown out from the air outlets, 14... Clean vertical lamina flow. bench,
15...Clean air outlet of the clean bench, 17a, 17b...; Air outlet forming the air curtain device, 1B...Blowing from the air outlet Exposed air flow.

Claims (1)

[Scope of Claims] 1. An air curtain device characterized by being provided with an air outlet that blows out air from two opposing directions. 2. The air curtain device according to claim 1, characterized in that the intersection angle of the air blown from two opposing directions is 180 degrees or less.