JP2695931B2 - Elevator equipment for clean room - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a pneumatic pressure of a clean room arranged on a multi-story floor and capable of carrying people and goods to each other, and a pneumatic pressure of a hoistway provided adjacent thereto. The present invention relates to a clean room elevator system for maintaining a clean room in an ultra-clean space by controlling the differential pressure of the clean room.

[Conventional technology]

In recent years, as the degree of integration of semiconductor chips has increased,
It is also required to increase the cleanliness of a clean room in a semiconductor manufacturing plant. If a clean room is laid out on a multi-story floor in a factory, an elevator for carrying people and goods between the clean rooms on the multi-story floor will be installed, but when the clean room and the elevator are connected, dust will enter the clean room from the hoistway. It is necessary to prevent intrusion and maintain a high degree of cleanliness in the clean room.

FIG. 2 shows an example of a clean room elevator system installed between such clean rooms.

In the figure, reference numeral 1 denotes a hoistway, and the hoistway 1 is configured in a sealed structure, and its wall surface 1A is coated with dustproof paint.
An elevator machine room 2 is provided near the ceiling in the hoistway 1, and an elevator means including a hoisting machine 3 is disposed in the elevator machine room 2. The hoisting machine 3 is rotated / reversely rotated by an electric motor 3A. I do. A cage 5 is suspended from one end of the wire 4 fed from the hoisting machine 3, and the cage 5 can be moved up and down by the hoisting machine 3 or the like. The elevator machine room 2 is provided with an air outlet formed by a differential pressure damper 6.

Above the ceiling 5A of the above-mentioned cage 5, a blower 7 and an ultra-high-performance film 8 are disposed, and the blower 7 and the ultra-high-performance film 8 are connected to a duct 9 from the vicinity of the floor 5B of the cage 5 to the ceiling 5A. The air in the cage 5 is on the floor 5B
Is sucked into the duct 9 from the vicinity, filtered by the ultra-high-performance filter 8, and then blown from the ceiling 5A into the internal space in the cage 5, and the air circulates as indicated by the arrow.
Therefore, the inside of the cage 5 is maintained in an ultra-clean space.

10 is a clean room installed on the first floor of the building, 11 is a clean room installed on the second floor, 12 is a clean room installed on the third floor, and doors 10A and 11A are located on the left side of each of the clean rooms 10, 11, and 12, respectively. , 12A attached, door 10
A, 11A, and 12A face the hoistway 1, respectively. Circulating air conditioners are located on the right side of each of the clean rooms 10, 11, and 12.
13, 14, 15 are provided, ultrahigh-performance filters 16, 17, 18 made of HEPA filters are provided on the ceiling, and floors 10B, 11B, 12B having a porous structure are provided on the bottom.

Air in each of the clean rooms 10, 11, 12 is circulated by air conditioners 13,1
From 4,15 through ultra high performance filters 16,17,18,
Again, circulation is performed so as to return to the inside of each of the clean rooms 10, 11, and 12. This circulating air allows each clean room 1
The inside of 0,11,12 is maintained in an ultra-clean space in a sealed state.

Outside air conditioners 19, 20, and 21 are connected to the circulation air conditioners 13, 14, 15, respectively.
Outside air is taken into each of the clean rooms 10, 11, and 12 through 13, 14, and 15. At that time, dehumidification, heating and cooling of the outside air and dust removal are performed by the external conditioners 19, 20, and 21.

Then, the clean room 10,1 from each external controller 19,20,21
Send fresh air into each of the clean rooms 10, 11, 12
The air pressure in the hoistway 1 is made higher than the air pressure in the hoistway 1, and the air pressure from each of the clean rooms 10, 11, 12 flows into the hoistway 1 using this differential pressure. Then, the air in the hoistway 1 is discharged into the atmosphere through the differential pressure damper 6, and the clean room 1
It is trying to prevent backflow to 0,11,12 and always keep the inside of clean rooms 10,11,12 in an ultra-clean space.

[Problems to be solved by the invention]

In the conventional clean room elevator equipment, the air pressure of each clean room 10, 11, 12 and the air pressure of the hoistway 1 are set to prevent backflow from the hoistway 1 with low cleanliness to the clean rooms 10, 11, 12 with high cleanliness. It is necessary to set a large pressure difference between the air conditioner 19,20,21 and take in a large amount of outside air into the clean rooms 10,11,12,
Had been discharged.

Then, through the gaps between the doors 10A, 11A, and 12A of the clean rooms 10, 11, and 12 or when these doors are opened, the clean room 1
Highly clean air in 0,11,12 flows through the hoistway 1 at high speed, which induces turbulence in the clean rooms 10,11,12 and contaminates the air in the clean rooms 10,11,12. And it is difficult to maintain an ultra-clean space. further,
When the doors 10A, 11A, 12A of the clean rooms 10, 11, 12 are opened, a lateral flow phenomenon of the air flow occurs in the clean rooms 10, 11, 12,
There is a possibility that semiconductor products in the clean rooms 10, 11, and 12 may be contaminated.

Here, if the air in the hoistway 1 is kept clean,
Therefore, even if air flows back into the clean rooms 10, 11, 12, it is possible to reduce the contamination of the air in the clean rooms 10, 11, 12, but conventionally, for example, in JP-A-63-8184, the Although it is stated that the air in the hoistway is cleaned by flowing air into the hoistway using the differential pressure, simply flowing air from the clean room into the hoistway It is insufficient to improve air cleanliness. In addition, the amount of exhaust from the clean room to the hoistway was large because the necessity of increasing the cleanliness in the hoistway was required.

In FIG. 2, from the hoistway 1 to the clean room
In order to prevent the backflow of air to 10, 11, and 12, an elevator front room is arranged between the hoistway 1 and each of the clean rooms 10, 11, and 12, and the door of the cage 5 and the door of the elevator front room are opened and closed. By interlocking the vehicle and driving people and things through the front room of the elevator,
It is possible to prevent direct communication between the hoistway 12 and the hoistway 1, but in such a case, an elevator front room must be provided, and the cage 5 and the door and the door opening and closing interface are not allowed. I have to take a lock,
A control device and the like are also required, which is not preferable.

Then, the air pressure in the clean rooms 10, 11, and 12 is increased by the hoistway 1.
In order to make the air pressure higher than the inside air pressure, the outside air replenishment amount taken into the clean rooms 10, 11, 12 by the outside air conditioners 19, 20, 21 is large.
In order to make the temperature and humidity conditions the same as in 12, external controllers 19, 20, 21
Then, dehumidification, heating / cooling, and dust removal of the outside air are performed, and the amount of heat energy used reaches more than half of the heat energy used in the clean rooms 10, 11, and 12, and a large amount of heat energy is wasted.

The present invention has been made to solve the above-described problems, and its purpose is to reduce contamination of air in a clean room that is an ultra-clean space even if air in the hoistway flows backward into the clean room, It is another object of the present invention to provide a clean room elevator system in which the amount of outside air supplied to the clean room is reduced and the amount of waste of a large amount of heat energy is reduced.

[Means for solving the problem]

In order to achieve the above object, the present invention provides a cage maintained in an ultra-clean space, which is arranged in a hoistway so as to be able to ascend and descend by a hoisting means provided in an elevator machine room of the hoistway, and through the elevating cage. The air pressure in the clean room arranged on the multi-story floor is made higher than the air pressure in the hoistway by supplying outside air from the air conditioner to the clean room, and the differential pressure is used to flow air from the clean room into the hoistway. In the clean room elevator equipment that maintains the inside of the clean room as an ultra-clean space, a duct having a suction port and an air outlet opened in the hoistway is disposed in the hoistway. In the part of
It is provided with a blower and an ultra-high performance filter.

(Operation)

In the present invention, in the hoistway, air containing dust is sucked into the duct from the suction port of the duct, and this air is guided to the ultra-high-performance filter by the blower and is filtered, thereby increasing the cleanliness. Air with high cleanliness is blown out from the outlet of the duct into the hoistway, and the cleanliness of the air in the hoistway increases.

For this reason, it is not necessary to increase the cleanliness in the hoistway by the highly clean air from the clean room, and the amount of exhaust from the clean room to the hoistway can be reduced.

〔Example〕

 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows a clean room elevator system according to an embodiment of the present invention. This clean room elevator system differs from the conventional clean room elevator system in the structure in the hoistway as described below. In the present embodiment, the description of the same parts as the conventional example will be omitted, and only the parts different from the conventional example will be described. The same components as those of the conventional example are denoted by the same reference numerals as those of the conventional example.

In the figure, a duct 31 is provided in a hoistway 1 along a vertical portion of a wall surface 1A thereof, and this duct 31 passes through the elevator machine room 2. The suction port 32 of this duct 31 opens near the bottom 1B in the hoistway 1, and the outlet 33 of the duct 31
Is opened near the lower part of the elevator machine room 2 in the hoistway 1.

A blower 34 and an ultra-high-performance filter 35 are provided in a portion of the duct 31 inside the elevator machine room 2.

Thus, in the present embodiment, similarly to the conventional example, the air pressure in the clean rooms 10, 11, 12 by sending outside air from the external conditioners 19, 20, 21 to the clean rooms 10, 11, 12, respectively,
The air pressure in the hoistway 1 is made higher than the air pressure in the hoistway 1, and the air is flowed into the hoistway 1 from each of the clean rooms 10, 11, and 12 using this differential pressure.
Further, the air pressure in the hoistway 1 is made higher than the atmospheric pressure, and the air in the hoistway 1 is discharged to the atmosphere via the differential pressure damper 6.

On the other hand, in the hoistway 1, air containing dust is sucked into the duct 31 from the suction port 32 of the duct 31, and this air is guided to the ultra-high-performance filter 35 by the blower 34 and is filtered, so that the cleanliness is high. This high-purity air is blown out from the outlet 33 of the duct 31 into the hoistway 1 to increase the cleanliness of the air in the hoistway 1.

For this reason, it is not necessary to increase the cleanliness in the hoistway 1 due to the high cleanness air from the cleanrooms 10, 11, 12 and the amount of outflow from the cleanrooms 10, 11, 12 to the hoistway 1 can be reduced. .

According to the above configuration, in the hoistway 1, air is sucked into the duct 31 from the suction port 32, and the
After being cleaned by 35, the air is discharged from the outlet 33 into the hoistway 1 and circulated, and the air in the hoistway 1 is entirely cleaned. Therefore, even if the air in the hoistway 1 flows back into the clean rooms 10, 11, 12 which are super-clean spaces, the degree of contamination of the air in the clean rooms 10, 11, 12 can be reduced.

In addition, when the doors 10A, 11A, 12A of the clean rooms 10, 11, 12 are opened or when these doors are opened, the clean rooms 10, 1
The highly clean air in the cleanrooms 10 and 12 flows into the hoistway 1. At this time, the amount of outflow from the cleanrooms 10, 11, and 12 is reduced, and the flow of the air is slowed down.
Turbulence is less likely to be induced in 1,12 and clean room 10,1
The air in the clean rooms 10, 11, and 12 is not contaminated, and the clean rooms 10, 11, and 12 can be maintained in an ultra-clean space.

In addition, as described above, the clean room
In order to prevent the backflow of air to 10, 11, and 12, it is not necessary to provide the elevator front room described in the conventional example, and the interlock for opening and closing the door of the cage 5 and the door of the elevator front room can be eliminated. it can.

Since the air in the hoistway 1 is circulated and purified as described above, the amount of exhaust that escapes from the inside of the hoistway 1 to the atmosphere via the differential pressure damper 6 can be reduced. The amount of outflow from 10, 11, 12 to the hoistway 1 can be reduced, and as a result, the clean rooms 10, 11, 12
Thus, the amount of external air to be supplied for pressurizing the air can be reduced, and the consumption of heat energy can be reduced.

In the present embodiment, the suction port 32 of the duct 31 is provided only in the vicinity of the bottom 1B in the hoistway 1, but the installation location of the suction port 32 is not limited to such a place. , Can be provided at a plurality of locations of the duct 31.

Further, in this embodiment, the clean rooms are installed on each floor from the first floor to the third floor. However, the present invention is not limited to such an example where the clean room is installed, and it is sufficient if there are at least two floors. It can be installed only on the third and third floors. The present invention can also be applied to a clean room of a building on the fourth floor or higher.

Furthermore, in the present embodiment, the hoisting machine 3 is described as an example of the lifting / lowering means, but the lifting / lowering means is not limited to this, and for example, another hydraulic cylinder can be used. .

〔The invention's effect〕

As described above, according to the elevator equipment for a clean room according to the present invention, in the hoistway, air is sucked into the duct from the suction port, and after being cleaned by the ultra-high performance filter, the air rises and falls from the outlet. It is discharged into the road and circulated,
The air in the hoistway is cleaned throughout. Therefore,
Even if the air in the hoistway flows back into the clean room, which is an ultra-clean space, the degree of contamination of the air in the clean room can be reduced, and the clean room can be maintained in the ultra-clean space.

Further, the turbulence in the clean room is reduced, the degree of contamination of the air in the clean room is reduced, and the clean room can be maintained in an ultra-clean space.

Further, as described above, in order to prevent the backflow of air from the inside of the hoistway to the clean room, it is not necessary to provide the elevator front chamber described in the conventional example, and the interlock for opening and closing the door of the cage and the door of the elevator front chamber is not required. It can be unnecessary.

As described above, the amount of exhaust gas that escapes from the inside of the hoistway to the atmosphere is reduced, so that the amount of outflow from the clean room to the hoistway can be reduced, and thus the supply of outside air for pressurizing air in the clean room. Reduce the amount,
This has the effect of reducing heat energy consumption.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a clean room elevator facility according to an embodiment of the present invention. FIG. 2 is a configuration diagram of a conventional clean room elevator equipment. [Explanation of Signs of Main Parts] 1 ... Hoistway 2 ... Elevator Machine Room 3 ... Hoisting Machine 5 ... Cage 10,11,12 ... Clean Room 19,20,21 ... External Controller 31 ... … Duct 32… Suction port 33… Outlet 34… Blower 35… Ultra-high performance filter.

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Yoshihiro Hirayama 5-33-1, Shiba, Minato-ku, Tokyo NEC Corporation (72) Inventor Mitsuo Seta 1-4-1, Yurakucho, Chiyoda-ku, Tokyo Sanki Within Industrial Co., Ltd. (72) Inventor Shinji Kobayashi 5-27-10 Shiba, Minato-ku, Tokyo Nidec Engineering Center Co., Ltd. (56) References JP-A-51-93037 (JP, A) JP-A-2-89787 (JP, A) JP-A-63-8184 (JP, A) JP-A-62-96271 (JP, A) JP-A-62-41785 (JP, U)

Claims (1)

(57) [Claims] 1. A cage maintained in an ultra-clean space is arranged in a hoistway so as to be able to move up and down by an elevating means provided in an elevator machine room of the hoistway, and is arranged on a multi-story floor via the elevating cage. The air pressure in the clean room is made higher than the air pressure in the hoistway by replenishing the outside air into the clean room from the external controller, and the differential pressure is used to flow air from the clean room into the hoistway to make the clean room ultra-clean. In the elevator equipment for a clean room maintained in a space, a duct having an inlet and an outlet opened in the hoistway is disposed in the hoistway, and a blower and a super Elevator equipment for a clean room characterized by providing a high-performance filter.