JPS61235163A - Manufacture of high-density wiring block - Google Patents

Manufacture of high-density wiring block

Info

Publication number
JPS61235163A
JPS61235163A JP7765885A JP7765885A JPS61235163A JP S61235163 A JPS61235163 A JP S61235163A JP 7765885 A JP7765885 A JP 7765885A JP 7765885 A JP7765885 A JP 7765885A JP S61235163 A JPS61235163 A JP S61235163A
Authority
JP
Japan
Prior art keywords
strip
density wiring
laser beam
electric wire
melting point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7765885A
Other languages
Japanese (ja)
Inventor
Masashi Makino
牧野 正志
Toshiharu Okada
俊治 岡田
Yasutomo Funakoshi
康友 船越
Kunio Nakada
中田 邦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7765885A priority Critical patent/JPS61235163A/en
Publication of JPS61235163A publication Critical patent/JPS61235163A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/385Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material
    • B41J2/39Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material using multi-stylus heads
    • B41J2/395Structure of multi-stylus heads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/027Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles

Abstract

PURPOSE:To obtain a high-density wiring block by transmitting a laser beam to a pair of plates coated with a metallic electroconductive layer on an insulative substrate and eliminating the metallic electroconductive layer in the form of strip at a prearranged pitch. CONSTITUTION:A plate 22 is processed by the transmission of a laser beam. A metallic electroconductive layer 21 is removed in the form of strip at a prearranged pitch by transmitting a laser beam 23, leaving plural recording electrode wires 24 formed in an unremoved part. These pairs of plates 22 are arranged opposed to each other at a position where the medium line of one electric wire part 24 meets that of the other strip-formed removed part 25. Further, a low-melting point glass 26 is provided between these two and bonded together under heating conditions. Thus the low-melting point glass 26a is filled between respective electric wire parts, and consequently, a high-density wiring block 31 consisting of two insulative substrates 20 bonded together with the low- melting point glass 26a is made available.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はファクシミリなどの情報記録機器の静電多針記
録ヘッドに用いられる記録電極ユニットを製造する方法
として開発されたものである0本発明は前記記録電極の
ユニットの外、これと同様に多数本の電線を高密度に配
する必要のある他の高密度配線体の製造方法として利用
することも可能である。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention was developed as a method for manufacturing a recording electrode unit used in an electrostatic multi-needle recording head of an information recording device such as a facsimile. In addition to recording electrode units, the present invention can also be used as a method for manufacturing other high-density wiring bodies that require a large number of electric wires to be arranged at high density.

従来の技術 先ず静電多針記録ヘッドの一般的な構造を第8図に基き
説明する。マルチスタイラス固体走査方式による静電多
針記録ヘッドは第8図に示す回路構成を有し、多数本の
記録電極10をグループ化してマトリックス結合すると
共に、所定率の記録電極10に対応して制御電極1)を
配した構成となっている。そして制御電極グループAは
Mビットのシフトレジスタに接続されると共に2つの記
録電極グループB、Cも夫々mビットのシフトレジスタ
に接続され、これらシフトレジスタを含むドライバー回
路によって、選択された電極10.1)間において静電
潜像記録が順次行われるように構成されている。
Prior Art First, the general structure of an electrostatic multi-needle recording head will be explained with reference to FIG. The electrostatic multi-needle recording head using the multi-stylus solid-state scanning method has the circuit configuration shown in FIG. The structure includes electrodes 1). The control electrode group A is connected to an M-bit shift register, and the two recording electrode groups B and C are also respectively connected to an m-bit shift register, and a driver circuit including these shift registers selects the selected electrode 10. 1) Electrostatic latent image recording is performed sequentially between the two.

前記記録電極群は例えば2048本の記録電極10を1
龍当り8本の密度で平行に規則正しく配列することによ
って構成されている。そしてその製造法としては、特公
昭54−4263号公報や特公昭56−25390号公
報に示されるように、多数本の極細被覆銅線を整列させ
た状態で合成樹脂接着剤で互いに固着し、次いでこれを
上下1対の絶縁性基板間に固定する方法が従来より採用
されている。
The recording electrode group includes, for example, 2048 recording electrodes 10.
It is constructed by regularly arranging eight dragons in parallel at a density of eight dragons per dragon. As shown in Japanese Patent Publication No. 54-4263 and Japanese Patent Publication No. 56-25390, the manufacturing method involves aligning a large number of ultra-fine coated copper wires and fixing them to each other with a synthetic resin adhesive. Conventionally, this is then fixed between a pair of upper and lower insulating substrates.

発明が解決しようとする問題点 ところが上記従来法には次のような問題点がある。The problem that the invention seeks to solve However, the above conventional method has the following problems.

■ 前記極細被覆銅線の線径の極小化には限度があり、
記録電極群のピッチを0.125 m (8本/1fi
)とするのが限度である。従ってファクシミリなどにお
ける画像を鮮明にするため、記録電極群のピッチを16
本/1鶴、24本/ 1 mなどにして、より高密度の
記録電極群を得ることは従来法では不可能であった。
■ There is a limit to the minimization of the wire diameter of the ultra-fine coated copper wire,
The pitch of the recording electrode group was set to 0.125 m (8 electrodes/1fi
) is the limit. Therefore, in order to make images clearer in facsimiles, etc., the pitch of the recording electrode group is set to 16.
With conventional methods, it was impossible to obtain a higher density recording electrode group, such as 24 wires/1 m.

■ 記録電極10の断面形状は円形であるので、シャー
プな画°像を得ることが困難である。
(2) Since the cross-sectional shape of the recording electrode 10 is circular, it is difficult to obtain a sharp image.

■ 従来法は複雑な製造工程を要し、製造コストが高価
になる。
■ Conventional methods require complicated manufacturing processes and increase manufacturing costs.

■ 記録電極群の高密度化を図るため、第9図に示すよ
うに記録電極線aを2列に千鳥状に配することが行われ
ているが、この場合にはより一層、製造工程が複雑にな
るばかりか、静電潜像記録に時間差が生じ、これを補正
するための遅延回路などが必要となり、画像処理が複雑
になると共に精度上にも問題が生ずる。
■ In order to increase the density of the recording electrode group, the recording electrode lines a are arranged in two rows in a staggered manner as shown in Figure 9, but in this case the manufacturing process is even more complicated. Not only is this complicated, but a time difference occurs in electrostatic latent image recording, and a delay circuit or the like is required to correct this, which complicates image processing and poses a problem in terms of accuracy.

同様の問題点は前記記録電極群以外の高密度配線体の製
造方法についても略同様に当てはまる。
Similar problems also apply to methods of manufacturing high-density wiring bodies other than the recording electrode group.

問題点を解決するための手段 本発明は上記問題点を解決するため、第1図乃至第3図
の原理図に明らかなように、絶縁性基板20上に金属導
電層21を被覆形成してなる1対の板体22の夫々にレ
ーザ光線23を照射して、前記金属導電層21を所定ピ
ッチで帯状に除去することによって、その非除去部に帯
状除去部25より狭幅の電線部24を多数本形成し、次
いで両板体22を、一方の電線部24が他方の帯状除去
部25に対向する位置に配した後、合着して高密度配線
体を得ることを特徴とする。
Means for Solving the Problems In order to solve the above problems, the present invention forms a metal conductive layer 21 on an insulating substrate 20 as shown in the principle diagrams of FIGS. 1 to 3. By irradiating each of the pair of plate bodies 22 with a laser beam 23 to remove the metal conductive layer 21 in strips at a predetermined pitch, a wire portion 24 having a narrower width than the strip-shaped removed portion 25 is formed in the unremoved portion. It is characterized in that a large number of wiring boards 22 are formed, and then both plates 22 are placed in a position where the wire portion 24 of one side faces the strip-shaped removed portion 25 of the other side, and then joined together to obtain a high-density wiring body.

作用 本発明は上記構成を有するので、次のような作用を有し
ている。
Effects Since the present invention has the above configuration, it has the following effects.

■ 各板体における電線部はレーザ光線で形成されるの
で、その電線部群の密度を高めることができると共に正
確な位置に形成でき、更に上記のように形成された1対
の板体を合着して高密度配線体を得ることができる結果
、従来法では不可能であったピンチ16本/l龍、或い
はピンチ24本/1mmの超高密度の配線体を製造する
ことができる。
■ Since the wires on each plate are formed using a laser beam, the density of the wires can be increased and they can be formed in accurate positions. As a result, it is possible to produce a wiring body with a high density of 16 pinches/l or 24 pinches/1 mm, which was impossible with conventional methods.

■ 電線部はレーザ光線で形成するため、矩形又はこれ
に近い任意の形状の断面とすることができる。
(2) Since the electric wire portion is formed using a laser beam, the cross section can be rectangular or any shape close to this.

■ 高密度配線体の製造工程は基本的には第1図、第2
図及び第3図に示すものからなるので、極めて簡単であ
る。
■ The manufacturing process for high-density wiring bodies is basically as shown in Figures 1 and 2.
It is extremely simple since it consists of what is shown in Fig. 3 and Fig. 3.

■ 電線部群は第3図に示すように1列に整列させるこ
とができる。
(2) The wire group can be arranged in a line as shown in FIG.

実施例 以下本発明の一実施例を図面を参照しながら説明する。Example An embodiment of the present invention will be described below with reference to the drawings.

本実施例は第6図及び第7図に示す静電多針記録ヘッド
30に用いられる記録電極ユニット31を製造する方法
に係るものである。
This embodiment relates to a method of manufacturing a recording electrode unit 31 used in an electrostatic multi-needle recording head 30 shown in FIGS. 6 and 7.

高密度配線体の1例である記録電極ユニット31は、絶
縁性基板20上に金属導電層21を被覆形成してなる1
対の板体22を用いて製造される。
A recording electrode unit 31, which is an example of a high-density wiring body, is made by coating an insulating substrate 20 with a metal conductive layer 21.
It is manufactured using a pair of plate bodies 22.

この板体22としてはアルミナ系セラミックス板を絶縁
性基板20とし、その上に銅又は銅合金の金属導電層2
1をメッキ、真空蒸着などによって、厚さHが40μm
になるように被覆形成したものを用いると好適である。
The plate body 22 is an insulating substrate 20 made of an alumina ceramic plate, and a metal conductive layer 2 of copper or copper alloy is placed on top of the insulating substrate 20.
1 to a thickness H of 40 μm by plating, vacuum deposition, etc.
It is preferable to use a material coated so as to have the following properties.

夫々の板体22には、第1図に示すように、レーザ光線
23の照射によるレーザ加工が施される。レーザ装置と
してはネオジウムヤグレーザを用いて、その第2高調波
(波長0.532μm)を用いると好適である。
Each plate 22 is subjected to laser processing by irradiation with a laser beam 23, as shown in FIG. It is preferable to use a neodymium YAG laser as the laser device, and use its second harmonic (wavelength: 0.532 μm).

前記金属導電r521はレーザ光線23の照射によって
、所定ピッチで帯状に除去され、その非除去部に多数本
の記録電極線(電線部)24が形成される。各電線部2
4は帯状除去部25によって互いに隔絶されて絶縁関係
にあり、その断面は矩形状に形成される。又前記帯状除
去部25は前記絶縁性基板20の表層部を扶るように深
く形成され、各電線部24間の絶縁を確実なものとして
いる。
The metal conductive r521 is removed in a band shape at a predetermined pitch by irradiation with a laser beam 23, and a large number of recording electrode lines (wire portions) 24 are formed in the non-removed portion. Each electric wire part 2
4 are separated from each other by the strip-shaped removed portion 25 and are in an insulating relationship, and have a rectangular cross section. Further, the strip-shaped removed portion 25 is formed deeply so as to cover the surface layer of the insulating substrate 20 to ensure insulation between each wire portion 24.

前記電線部24の横幅Mは32μm、前記帯状除去部2
5の横幅Nは52μmに形成されている(正確には第5
図に示すようにP=M+ (N−M)/2が1000/
24pmになる。)。
The width M of the electric wire portion 24 is 32 μm, and the width M of the wire portion 24 is 32 μm.
5 is formed to have a width N of 52 μm (to be exact, the width N of the 5th
As shown in the figure, P=M+ (N-M)/2 is 1000/
It will be 24pm. ).

上記のように形成された1対の板体22は、次に第4図
に示すように、一方の電線部24の中心線が他方の帯状
除去部25の中心線に一致する位置において対向するよ
うに配され、更に両者間に低融点ガラスシート26が配
された後に、加熱条件下で合着される。前記低融点ガラ
スシート26は融点が450°C前後のものを用いると
好適である。
Next, as shown in FIG. 4, the pair of plates 22 formed as described above face each other at a position where the center line of one electric wire section 24 coincides with the center line of the other strip-shaped removed section 25. After a low melting point glass sheet 26 is further placed between them, they are bonded together under heating conditions. The low melting point glass sheet 26 preferably has a melting point of about 450°C.

かくして第5図に示すように、各電線部24間に低融点
ガラス26aが充填されると共に、この低融点ガラス2
6aによって両絶縁性基板20が結合された高密度配線
体(記録電極ユニット)31が得られる。この高密度配
線体31の電線部24のピンチPは24本/ 1 tm
となり、各電線部24の間隙は108mとなる。
In this way, as shown in FIG.
A high-density wiring body (recording electrode unit) 31 in which both insulating substrates 20 are combined by 6a is obtained. The pinch P of the wire portion 24 of this high-density wiring body 31 is 24 pieces/1 tm.
Therefore, the gap between each wire portion 24 is 108 m.

上記のようにして得られた記録電極ユニット31は、第
6図及び第7図に示すように、複数個1直線上に配され
て静電多針記録ヘンド30に組込まれる。1)は制御電
極、32は低融点ガラス外装体、33はプリント基板を
内装したケース本体、34はカバー板である。
A plurality of recording electrode units 31 obtained as described above are arranged in a straight line and assembled into an electrostatic multi-needle recording head 30, as shown in FIGS. 6 and 7. 1) is a control electrode, 32 is a low melting point glass exterior body, 33 is a case body with a printed circuit board inside, and 34 is a cover plate.

本発明は上記実施例に示す外、種々の態様に構成するこ
とができる0例えば絶縁性基板20、金属導電層21の
材質は上記実施例に示すものに限定されず、又前記電線
部24、帯状除去部25の形状、寸法も上記実施例に示
すものに限定されない、更に前記両板体22を合着する
方法も上記実施例に示すものに限定されない。
The present invention can be configured in various ways other than those shown in the above embodiments. For example, the materials of the insulating substrate 20 and the metal conductive layer 21 are not limited to those shown in the above embodiments, and the electric wire portion 24, The shape and dimensions of the strip-shaped removed portion 25 are not limited to those shown in the above embodiments, and the method of joining the two plate bodies 22 is also not limited to that shown in the above embodiments.

発明の効果 本発明は上記構成を有する結果、超高密度に1列に電線
部を配列させることができると共にその電線部の断面形
状を矩形又はこれに近い任意の形状とすることができる
高密度配線体を簡単容易な製造工程によって製造できる
という効果がある。
Effects of the Invention As a result of the present invention having the above-mentioned configuration, it is possible to arrange the electric wire portions in a row at an extremely high density, and the cross-sectional shape of the electric wire portions can be made into a rectangular shape or any shape close to this. This has the effect that the wiring body can be manufactured by a simple and easy manufacturing process.

特に本発明を静電多針記録ヘッドの記録電極ユニットの
製造法に実施すると、従来不可能であったピッチ16本
/lfi、或いは24本/1鶴という超高密度に記録電
極を配列させることができ、しかもその配列を1列とす
ると共に記録電極の断面形状を矩形とすることができる
記録電極ユニットを得ることができる。従ってかかる記
録電極ユニットを備えたファクシミリなどの画像は極め
て鮮明になる。
In particular, when the present invention is applied to a method for manufacturing a recording electrode unit of an electrostatic multi-needle recording head, it is possible to arrange recording electrodes at an extremely high density of 16 electrodes/lfi or 24 electrodes/lfi, which was previously impossible. Furthermore, it is possible to obtain a recording electrode unit in which the recording electrodes can be arranged in one row and have a rectangular cross-sectional shape. Therefore, images produced by a facsimile machine equipped with such a recording electrode unit become extremely clear.

【図面の簡単な説明】 第1図、第2図及び第3図は本発明の方法を原理的に示
す縦断側面図、第4図は本発明の一実施例を示す斜視図
、第5図はその縦断側面図、第6図は本発明によって得
られた高密度配線体(記録電極ユニット)を組込んだ静
電多針記録ヘッドの縦断側面図、第7図はその斜視図、
第8図は静電多針記録ヘッドの回路図、第9図は従来の
記録電極ユニットの1例を示す縦断側面図である。 20−・−・・・・−・・・・・−・・・−・・・・・
・−・・・・・−・・・・・・絶縁性基板21−m−・
−・−・−・・−m−−−・−・−・−・−・−・−・
・・・・・・・金属導電性22−−−−−−−−−−−
−・−・・・・・・−・・・−・・・・・・−・・・・
・・−板体23−・−−−−一−−−・−・−・−−−
一−・−・−−一−−・−・レーザ光線24・−・−・
・−−−−−一一−−−−−−−−−−−−−−−−−
−−一−−・電線部25−・・−・−−−一−・−一−
−−−−−−−−−・−・−・・・・・・帯状除去部。 出願人  松下電器産業株式会社 代理人  弁理士 中尾敏男 はか1名く      
 の   Q
[Brief Description of the Drawings] Figures 1, 2, and 3 are vertical sectional side views showing the principle of the method of the present invention, Figure 4 is a perspective view showing an embodiment of the present invention, and Figure 5 is a perspective view showing an embodiment of the present invention. 6 is a longitudinal side view of an electrostatic multi-needle recording head incorporating a high-density wiring body (recording electrode unit) obtained by the present invention, and FIG. 7 is a perspective view thereof.
FIG. 8 is a circuit diagram of an electrostatic multi-needle recording head, and FIG. 9 is a longitudinal sectional side view showing an example of a conventional recording electrode unit. 20-・-・・・・・・・・・・・・・・・
・-・・・・・・Insulating substrate 21-m-・
−・−・−・・−m−−−・−・−・−・−・−・−・
・・・・・・Metal conductivity 22----------------------
−・−・・・・・・・−・−・・・・・・−・・
・・−Plate 23−・−−−−1−−−・−・−・−−−
1−・−・−−1−−・−・Laser beam 24・−・−・
・−−−−−11−−−−−−−−−−−−−−−−−
−−1−−・Electric wire part 25−・・−・−−−1−・−1−
−−−−−−−−−・−・−・・・・ Band-shaped removed part. Applicant Matsushita Electric Industrial Co., Ltd. Agent Patent Attorney Toshio Nakao
Q of

Claims (1)

【特許請求の範囲】[Claims] (1)絶縁性基板上に金属導電層を形成してなる1対の
板体の夫々にレーザ光線を照射して、前記金属導電層を
所定ピッチで帯状に除去することによって、その非除去
部に帯状除去部より狭幅の電線部を多数本形成し、次い
で両板体を、一方の電線部が他方の帯状除去部に対向す
る位置に配した後、合着して高密度配線体を得ることを
特徴とする高密度配線体の製造方法。
(1) By irradiating each of a pair of plates consisting of a metal conductive layer formed on an insulating substrate with a laser beam and removing the metal conductive layer in a band shape at a predetermined pitch, the unremoved portion is removed. A large number of electric wire sections having a width narrower than the strip-shaped removed section are formed on the substrate, and then both plates are placed in a position where one of the electric wire sections faces the other strip-shaped removed section, and then joined together to form a high-density wiring body. A method of manufacturing a high-density wiring body, characterized in that:
JP7765885A 1985-04-12 1985-04-12 Manufacture of high-density wiring block Pending JPS61235163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7765885A JPS61235163A (en) 1985-04-12 1985-04-12 Manufacture of high-density wiring block

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7765885A JPS61235163A (en) 1985-04-12 1985-04-12 Manufacture of high-density wiring block

Publications (1)

Publication Number Publication Date
JPS61235163A true JPS61235163A (en) 1986-10-20

Family

ID=13639976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7765885A Pending JPS61235163A (en) 1985-04-12 1985-04-12 Manufacture of high-density wiring block

Country Status (1)

Country Link
JP (1) JPS61235163A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03184880A (en) * 1989-12-14 1991-08-12 Matsushita Electric Ind Co Ltd Electrostatic recording head and production thereof
US6233819B1 (en) 1999-01-21 2001-05-22 Yamaha Corporation Fine-pitch electrode, process for producing the same, and fine-pitch electrode unit
JP2001289875A (en) * 2000-04-05 2001-10-19 Mitsubishi Materials Corp Contact probe
JP2006292719A (en) * 2005-04-14 2006-10-26 Korea Advanced Inst Of Science & Technology Probe card and its manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571564A (en) * 1978-11-20 1980-05-29 Dynamics Res Corp Electrostatic printing head and making method thereof
JPS55130780A (en) * 1979-03-30 1980-10-09 Sharp Corp Manufacture of multi-needle electrode

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571564A (en) * 1978-11-20 1980-05-29 Dynamics Res Corp Electrostatic printing head and making method thereof
JPS55130780A (en) * 1979-03-30 1980-10-09 Sharp Corp Manufacture of multi-needle electrode

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03184880A (en) * 1989-12-14 1991-08-12 Matsushita Electric Ind Co Ltd Electrostatic recording head and production thereof
US6233819B1 (en) 1999-01-21 2001-05-22 Yamaha Corporation Fine-pitch electrode, process for producing the same, and fine-pitch electrode unit
JP2001289875A (en) * 2000-04-05 2001-10-19 Mitsubishi Materials Corp Contact probe
JP2006292719A (en) * 2005-04-14 2006-10-26 Korea Advanced Inst Of Science & Technology Probe card and its manufacturing method
JP4554496B2 (en) * 2005-04-14 2010-09-29 コリア アドバンスト インスティチュート オブ サイエンス アンド テクノロジー Probe card

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