JPS61233954A - 電子ビ−ムアニ−ル装置 - Google Patents
電子ビ−ムアニ−ル装置Info
- Publication number
- JPS61233954A JPS61233954A JP60074376A JP7437685A JPS61233954A JP S61233954 A JPS61233954 A JP S61233954A JP 60074376 A JP60074376 A JP 60074376A JP 7437685 A JP7437685 A JP 7437685A JP S61233954 A JPS61233954 A JP S61233954A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- modulation
- waveform
- annealing
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 52
- 238000000137 annealing Methods 0.000 title claims description 27
- 239000004065 semiconductor Substances 0.000 claims abstract description 20
- 238000009826 distribution Methods 0.000 abstract description 23
- 239000013078 crystal Substances 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 238000012886 linear function Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000012887 quadratic function Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60074376A JPS61233954A (ja) | 1985-04-10 | 1985-04-10 | 電子ビ−ムアニ−ル装置 |
| US06/762,374 US4662949A (en) | 1985-02-15 | 1985-08-05 | Method of forming a single crystal semiconductor layer from a non-single crystalline material by a shaped energy beam |
| US06/904,942 US4746803A (en) | 1985-02-15 | 1986-09-08 | Method of forming a single crystal semiconductor layer from a non-single-crystalline material and apparatus for forming the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60074376A JPS61233954A (ja) | 1985-04-10 | 1985-04-10 | 電子ビ−ムアニ−ル装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61233954A true JPS61233954A (ja) | 1986-10-18 |
| JPH0339379B2 JPH0339379B2 (enrdf_load_stackoverflow) | 1991-06-13 |
Family
ID=13545383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60074376A Granted JPS61233954A (ja) | 1985-02-15 | 1985-04-10 | 電子ビ−ムアニ−ル装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61233954A (enrdf_load_stackoverflow) |
-
1985
- 1985-04-10 JP JP60074376A patent/JPS61233954A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0339379B2 (enrdf_load_stackoverflow) | 1991-06-13 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |