JPS6122762B2 - - Google Patents
Info
- Publication number
- JPS6122762B2 JPS6122762B2 JP11832777A JP11832777A JPS6122762B2 JP S6122762 B2 JPS6122762 B2 JP S6122762B2 JP 11832777 A JP11832777 A JP 11832777A JP 11832777 A JP11832777 A JP 11832777A JP S6122762 B2 JPS6122762 B2 JP S6122762B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- speckle pattern
- irradiation system
- roughness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003746 surface roughness Effects 0.000 claims description 25
- 230000001427 coherent effect Effects 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 12
- 230000000052 comparative effect Effects 0.000 claims description 11
- 238000007689 inspection Methods 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 24
- 235000019592 roughness Nutrition 0.000 description 15
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11832777A JPS5451863A (en) | 1977-09-30 | 1977-09-30 | Surface roughness measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11832777A JPS5451863A (en) | 1977-09-30 | 1977-09-30 | Surface roughness measuring apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5451863A JPS5451863A (en) | 1979-04-24 |
| JPS6122762B2 true JPS6122762B2 (en, 2012) | 1986-06-03 |
Family
ID=14733914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11832777A Granted JPS5451863A (en) | 1977-09-30 | 1977-09-30 | Surface roughness measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5451863A (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0263381U (en, 2012) * | 1988-11-01 | 1990-05-11 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100394162C (zh) * | 2003-01-23 | 2008-06-11 | 友达光电股份有限公司 | 分析薄膜表面粗糙度的方法 |
-
1977
- 1977-09-30 JP JP11832777A patent/JPS5451863A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0263381U (en, 2012) * | 1988-11-01 | 1990-05-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5451863A (en) | 1979-04-24 |
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