JPS6122464B2 - - Google Patents
Info
- Publication number
- JPS6122464B2 JPS6122464B2 JP17718981A JP17718981A JPS6122464B2 JP S6122464 B2 JPS6122464 B2 JP S6122464B2 JP 17718981 A JP17718981 A JP 17718981A JP 17718981 A JP17718981 A JP 17718981A JP S6122464 B2 JPS6122464 B2 JP S6122464B2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- wafer
- refracted
- reflected
- receiver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000006096 absorbing agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17718981A JPS5879734A (ja) | 1981-11-06 | 1981-11-06 | ウエ−ハ有無判定テ−ブル位置制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17718981A JPS5879734A (ja) | 1981-11-06 | 1981-11-06 | ウエ−ハ有無判定テ−ブル位置制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5879734A JPS5879734A (ja) | 1983-05-13 |
| JPS6122464B2 true JPS6122464B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-31 |
Family
ID=16026729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17718981A Granted JPS5879734A (ja) | 1981-11-06 | 1981-11-06 | ウエ−ハ有無判定テ−ブル位置制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5879734A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004025150B4 (de) | 2004-05-21 | 2019-05-09 | Mattson Technology, Inc. | Lagebestimmung eines Halbleitersubstrats auf einer Rotationsvorrichtung |
-
1981
- 1981-11-06 JP JP17718981A patent/JPS5879734A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5879734A (ja) | 1983-05-13 |