JPS61223295A - オイルフリ−スクリユ−真空ポンプ - Google Patents

オイルフリ−スクリユ−真空ポンプ

Info

Publication number
JPS61223295A
JPS61223295A JP6058585A JP6058585A JPS61223295A JP S61223295 A JPS61223295 A JP S61223295A JP 6058585 A JP6058585 A JP 6058585A JP 6058585 A JP6058585 A JP 6058585A JP S61223295 A JPS61223295 A JP S61223295A
Authority
JP
Japan
Prior art keywords
rotor
rotors
gas
vacuum pump
male
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6058585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0588392B2 (US06826419-20041130-M00005.png
Inventor
Kotaro Naya
納谷　孝太郎
Koji Takagi
高木　恒治
Kazuaki Shiiki
和明 椎木
Katsumi Matsubara
松原　克躬
Riichi Uchida
利一 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6058585A priority Critical patent/JPS61223295A/ja
Publication of JPS61223295A publication Critical patent/JPS61223295A/ja
Publication of JPH0588392B2 publication Critical patent/JPH0588392B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Applications Or Details Of Rotary Compressors (AREA)
JP6058585A 1985-03-27 1985-03-27 オイルフリ−スクリユ−真空ポンプ Granted JPS61223295A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6058585A JPS61223295A (ja) 1985-03-27 1985-03-27 オイルフリ−スクリユ−真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6058585A JPS61223295A (ja) 1985-03-27 1985-03-27 オイルフリ−スクリユ−真空ポンプ

Publications (2)

Publication Number Publication Date
JPS61223295A true JPS61223295A (ja) 1986-10-03
JPH0588392B2 JPH0588392B2 (US06826419-20041130-M00005.png) 1993-12-22

Family

ID=13146463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6058585A Granted JPS61223295A (ja) 1985-03-27 1985-03-27 オイルフリ−スクリユ−真空ポンプ

Country Status (1)

Country Link
JP (1) JPS61223295A (US06826419-20041130-M00005.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5314320A (en) * 1991-07-10 1994-05-24 Ebara Corporation Screw vacuum pump with a reduced starting load
US5374170A (en) * 1991-07-10 1994-12-20 Ebara Corporation Screw vacuum pump
JP2006342754A (ja) * 2005-06-10 2006-12-21 Hitachi Industrial Equipment Systems Co Ltd オイルフリースクリュー圧縮機

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320109A (en) * 1976-08-07 1978-02-24 Ebara Corp Rotor and fluid machine utilizing the same
JPS55153881A (en) * 1979-04-24 1980-12-01 Anretsuto:Kk Helical type double-axle rotary fluid pump
JPS5929794A (ja) * 1982-08-13 1984-02-17 Hitachi Ltd スクリュー機械のロータ
JPS59176489A (ja) * 1983-03-25 1984-10-05 Hitachi Ltd スクリユ流体機械

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320109A (en) * 1976-08-07 1978-02-24 Ebara Corp Rotor and fluid machine utilizing the same
JPS55153881A (en) * 1979-04-24 1980-12-01 Anretsuto:Kk Helical type double-axle rotary fluid pump
JPS5929794A (ja) * 1982-08-13 1984-02-17 Hitachi Ltd スクリュー機械のロータ
JPS59176489A (ja) * 1983-03-25 1984-10-05 Hitachi Ltd スクリユ流体機械

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5314320A (en) * 1991-07-10 1994-05-24 Ebara Corporation Screw vacuum pump with a reduced starting load
US5374170A (en) * 1991-07-10 1994-12-20 Ebara Corporation Screw vacuum pump
JP2006342754A (ja) * 2005-06-10 2006-12-21 Hitachi Industrial Equipment Systems Co Ltd オイルフリースクリュー圧縮機

Also Published As

Publication number Publication date
JPH0588392B2 (US06826419-20041130-M00005.png) 1993-12-22

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