JPS6121985A - Melt adhesible alloy for silicon nitride base ceramic - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to silicon nitride-based ceramic fusible alloys, more specifically, metallizing of ceramics such as silicon nitride and sialon, bonding of these ceramics together, This relates to an alloy that can be used for brazing with metals or as a bonding phase metal for cermets using these ceramics. It will be necessary to successfully combine it with other ceramics. In particular, bonding with metal is an important theme in improving the brittleness of ceramics. For this reason, research into composites of ceramics and dissimilar materials is very active, and some excellent methods have already been announced and put into practical use for oxide-based materials. However, it is extremely difficult to directly bond nitride ceramics and metals, and only some of them have been put into practical use.

This is a method in which Ti, Ti-Ni, Ti-Cu, and Ti-AQ alloys are used as low 4J, but these have the drawbacks of large wetting angles (contact angles) and low bonding strength.

The inventors have also found that Si has wettability, but the contact angle is 15 to 20 degrees, and complete wettability cannot be obtained.

<Problems to be Solved by the Invention> The present invention has been made in view of the above-mentioned problems. The object of the present invention is to provide a new fusion alloy that has fusion properties at low temperatures (0°C).

<Means for Solving the Problems> As a result of extensive research into this problem, the inventors found that complete wettability and fusion can be obtained by using the following alloy composition.

That is, as the ceramic fusion alloy, titanium group elements (
Ti, Zr, Hf), vanadine group elements (V, Nb, Ta
The problem of wettability can be completely solved by using an alloy whose basic constituent elements are one or more elements selected from the above and silicon (Si).

<Effect> The above alloy has the following effects.

(1) Si alone, Ti, Ti-Ni.

Although 1'-i-CU alone does not provide perfect wettability, complete wettability can only be obtained when T1 is added to 3i. In other words, there is a composite addition effect of alloys.

(2) This tendency can be said to be common to all combinations of 3i, titanium group elements, and vanadine group elements.

(3) Elements such as Fe, Ni, co, cr, cu, etc. are S
However, when titanium group and vanadine group elements are added to this alloy, the inhibitory effect of these elements is canceled and the wettability is improved again. can be restored to its original state (contact angle of zero).

<Example> Example 1 (Wettability test of various silicon alloys) Using Sialon as silicon nitride, silicon alloys of various compositions were placed on this ceramic, heated and melted under reduced pressure, and after cooling, each The contact angle (wetting angle) was measured.

The results are shown in Table 1.

Table 1 As can be seen from the results in Table 1, the alloy of the present invention has perfect adhesion to sialon even at relatively low temperatures, and has excellent wettability with Fe, Ni, c'u, etc. We were able to cancel out the negative effects of the inhibiting elements and restore the contact angle to essentially zero.

In addition, there is no difference in wettability even if the component ratio between Sl and titanium group and vanadine group elements is mainly used. It was fused.

Example 2 (Wettability test of each god silicate alloy) The same sialon as in Example 1 was used as the base material, and it was coated with S in advance.
After fusion coating the 1-20-1 alloy (first layer), inhibiting elements (second layer) such as Fe, Ni, Cr, and CU were placed thereon and heated and melted under reduced pressure to form Example 1. The contact angle was measured using the same method as above, and the results are shown in Table 2.

The results in Table 2 also show that the negative effects of inhibiting elements such as Fe, N2:, CO, and CR are also found in the titanium group and bees. This is canceled out by the presence of the syn-group elements, indicating that the wettability is completely restored.

Example 3 (Application to metallizing)
i-201i, si-50T-i, 3i-
Place a mixture of small silicon particles and lump titanium so that it becomes 90T1 (place it in the center of the board),
Under reduced pressure of Torr, 1350,1400.1450
'C for 30 seconds to fuse.

The M adhesion layer spread smoothly and evenly over the entire surface at a contact angle of 0 degrees, and some of the sides were wet.

From this result, even if the alloy of the present invention is not pre-alloyed but is made by blending each element separately and mixed, the alloy is evenly alloyed during the melting process and a completely wetted surface can be obtained. I was able to confirm that it was possible.

Example 4 (Joining of silicon nitride and sialon) 10X 1
Ox5mm171) - A slurry-like mixed powder of Si-20Ti composition was applied to a thickness of about imm between the sintered bodies of silicon nitride and Sialon, and heated and bonded at F1500'C for 15 minutes under reduced pressure of 5 x 10 TOrr. I did this.

Perform a shear test on the bonded specimen using an Instron.

As a result, a shear strength of about 9 kg/mrn' was obtained.

Example 5 (Binding phase of cermet) Small grains of Si-50% Li alloy were placed on a porous Si, N4 chip (15 x 15 x 3 mm) made by a reactive sintering method, and the powder was heated under reduced pressure of 5 x 10 Torr.
It was heated to 450°C for 5 minutes to completely impregnate the pores of the reaction sintered 5iJN.Here, the silicon nitride ceramic of the present invention is: (a) silicon nitride (b) Sialon (c) (a), (b) with other ceramics (M compound,
This refers to a mixture of carbides, nitrides, and borides.

<Effect of the invention> The alloy of the present invention has the following effects.

(1) It can be completely wetted and fused to silicon nitride ceramics.

(2) It can penetrate even minute gaps and holes.

(3) Wettability can be adjusted to multi-component alloys without any inhibiting layer.

(4) High fusion strength at the interface.

(5) Since the linear expansion coefficients are relatively close, thermal stress at the interface is small.

(6) Can be used in all applications related to fusion (metallizing, soldering, impregnation, as a binder phase).

(7) Due to the presence of the eutectic component, the melting point is low and a@ can be achieved even at relatively low temperatures. ,.

(8) Raw materials are inexpensive.

Claims (2)

[Claims] (1) A silicon nitride-based ceramic fusible alloy characterized by having one or more elements selected from titanium group elements and vanadine group elements and silicon (Si) as its basic components. . (2) The silicon nitride ceramic fusible alloy according to claim 1, wherein the alloy is a Si-Ti alloy.