JPS61216323A - 電子像転写方法 - Google Patents

電子像転写方法

Info

Publication number
JPS61216323A
JPS61216323A JP60025605A JP2560585A JPS61216323A JP S61216323 A JPS61216323 A JP S61216323A JP 60025605 A JP60025605 A JP 60025605A JP 2560585 A JP2560585 A JP 2560585A JP S61216323 A JPS61216323 A JP S61216323A
Authority
JP
Japan
Prior art keywords
mask
film
substrate
mask pattern
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60025605A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0210565B2 (enExample
Inventor
Hiroshi Yasuda
洋 安田
Ichiro Honjo
本荘　一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60025605A priority Critical patent/JPS61216323A/ja
Publication of JPS61216323A publication Critical patent/JPS61216323A/ja
Publication of JPH0210565B2 publication Critical patent/JPH0210565B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Electron Beam Exposure (AREA)
JP60025605A 1985-02-13 1985-02-13 電子像転写方法 Granted JPS61216323A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60025605A JPS61216323A (ja) 1985-02-13 1985-02-13 電子像転写方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60025605A JPS61216323A (ja) 1985-02-13 1985-02-13 電子像転写方法

Publications (2)

Publication Number Publication Date
JPS61216323A true JPS61216323A (ja) 1986-09-26
JPH0210565B2 JPH0210565B2 (enExample) 1990-03-08

Family

ID=12170531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60025605A Granted JPS61216323A (ja) 1985-02-13 1985-02-13 電子像転写方法

Country Status (1)

Country Link
JP (1) JPS61216323A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936928A (ja) * 1982-08-25 1984-02-29 Toshiba Corp 電子ビ−ム転写装置
JPS59227122A (ja) * 1983-05-25 1984-12-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 電子リソグラフイ−マスクの製造方法及びその装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936928A (ja) * 1982-08-25 1984-02-29 Toshiba Corp 電子ビ−ム転写装置
JPS59227122A (ja) * 1983-05-25 1984-12-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 電子リソグラフイ−マスクの製造方法及びその装置

Also Published As

Publication number Publication date
JPH0210565B2 (enExample) 1990-03-08

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