JPS61215210A - 炭化珪素粉末の製造方法 - Google Patents

炭化珪素粉末の製造方法

Info

Publication number
JPS61215210A
JPS61215210A JP60058006A JP5800685A JPS61215210A JP S61215210 A JPS61215210 A JP S61215210A JP 60058006 A JP60058006 A JP 60058006A JP 5800685 A JP5800685 A JP 5800685A JP S61215210 A JPS61215210 A JP S61215210A
Authority
JP
Japan
Prior art keywords
powder
silicon carbide
silicon
hydrogen
carbide powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60058006A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530763B2 (en:Method
Inventor
Teizo Hase
長谷　貞三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP60058006A priority Critical patent/JPS61215210A/ja
Publication of JPS61215210A publication Critical patent/JPS61215210A/ja
Publication of JPH0530763B2 publication Critical patent/JPH0530763B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
JP60058006A 1985-03-21 1985-03-21 炭化珪素粉末の製造方法 Granted JPS61215210A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60058006A JPS61215210A (ja) 1985-03-21 1985-03-21 炭化珪素粉末の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60058006A JPS61215210A (ja) 1985-03-21 1985-03-21 炭化珪素粉末の製造方法

Publications (2)

Publication Number Publication Date
JPS61215210A true JPS61215210A (ja) 1986-09-25
JPH0530763B2 JPH0530763B2 (en:Method) 1993-05-10

Family

ID=13071885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60058006A Granted JPS61215210A (ja) 1985-03-21 1985-03-21 炭化珪素粉末の製造方法

Country Status (1)

Country Link
JP (1) JPS61215210A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990004741A1 (fr) * 1988-10-20 1990-05-03 Ebara Corporation Installation de combustion et procede de regulation de combustion
JP2006206391A (ja) * 2005-01-28 2006-08-10 Canon Inc 炭化ケイ素の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990004741A1 (fr) * 1988-10-20 1990-05-03 Ebara Corporation Installation de combustion et procede de regulation de combustion
US5127345A (en) * 1988-10-20 1992-07-07 Ebara Corporation Combustion apparatus and combustion control method therefor
JP2006206391A (ja) * 2005-01-28 2006-08-10 Canon Inc 炭化ケイ素の製造方法

Also Published As

Publication number Publication date
JPH0530763B2 (en:Method) 1993-05-10

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