JPS61214931A - Accurately controllable moving table of long stroke - Google Patents
Accurately controllable moving table of long strokeInfo
- Publication number
- JPS61214931A JPS61214931A JP5237585A JP5237585A JPS61214931A JP S61214931 A JPS61214931 A JP S61214931A JP 5237585 A JP5237585 A JP 5237585A JP 5237585 A JP5237585 A JP 5237585A JP S61214931 A JPS61214931 A JP S61214931A
- Authority
- JP
- Japan
- Prior art keywords
- transmission
- moving table
- transmission arm
- horizontally moving
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 42
- 238000006073 displacement reaction Methods 0.000 description 2
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- 241000522641 Senna Species 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の背景〕
水平に移動できるように精密に案内するレール手段を備
えた水平移動テーブルを水平方向に駆動する手段として
各種の方法（例えばエアシリンダ、チェーンとスプロケ
ット、ワイヤとシーツ等）が公知であるが、特に精密に
駆動し樽る手段としてはボールネジ・ナツト、及び、ピ
エゾスタックが有り、これら両者にはそれぞれ長短が有
る。DETAILED DESCRIPTION OF THE INVENTION BACKGROUND OF THE INVENTION Various methods (e.g., air cylinders, chains and sprockets, Wires, sheets, etc.) are well known, but ball screws/nuts and piezo stacks are known as means for precisely driving and barreling, and each of these has its advantages and disadvantages.
両者を比較した場合、ボールネジ・ナツトはセンチメー
トル単位の長いストロークが得られるが、ミクロンオー
ダーの誤差を伴う。When comparing the two, a ball screw nut can provide a long stroke on the order of centimeters, but it is accompanied by an error on the order of microns.
これに比してピエゾスタックはサブミクロンオーダーの
精度が得られるが、そのストロークは最大限０゜１１程
度である。In comparison, a piezo stack can achieve accuracy on the order of submicrons, but its stroke is at most about 0°11.
従って、センナメートル単位の長ストロークとサブミク
ロンオーダーの精密な操作機能との双方を得ようとする
と、ボールネジ・ナツトとピエゾスタックとを併用しな
ければならないととＫなる。Therefore, in order to obtain both a long stroke on the order of centimeters and a precise operation function on the order of submicrons, it becomes necessary to use a ball screw nut and a piezo stack in combination.
従来技術に基づいてボールネジ・ナツトとげニジスタッ
クとを併用して長ストロークの精密移動テーブルを構成
しようとすると、ボールネジ・ナツトで粗動される長ス
トロークのテーブルの上に、ピエゾスタックで精密に微
動されるテーブルを搭載することになる。When trying to construct a long-stroke precision moving table using ball screws, nuts, and spiny stacks based on the conventional technology, the long-stroke table, which is roughly moved by the ball screws and nuts, is moved precisely and finely by the piezo stack. It will be equipped with a table.
上記のように２層構造のテーブルを構成すると粗動テー
ブルが微動テーブルの重量を担持しなければならないた
め頑丈な構造としなければならず、その上、担持重量が
大きいので作動スピードを上げることが困難である。If the table has a two-layer structure as described above, the coarse movement table must carry the weight of the fine movement table, so it must have a sturdy structure.Furthermore, since the weight it carries is large, it is difficult to increase the operating speed. Have difficulty.
本発明は上述の事情に鑑みて為されたものでありて、そ
の目的とするところは単一の水平移動テーブルを長スト
ロークで粗動せしめ得る上に、超高精度で微動せしめる
ことができ、しかも高速作動に適した精密操作可能な長
ストロークの移動テーブルを提供しようとするものであ
る。The present invention has been made in view of the above-mentioned circumstances, and its purpose is to be able to coarsely move a single horizontally moving table with a long stroke, and also to be able to make fine movements with ultra-high precision. Furthermore, the present invention aims to provide a long-stroke moving table suitable for high-speed operation and capable of precise operation.
上記の目的を達成するため、本発明の装置は、水平移動
テーブルと、？−ルネゾとを平行に設置し、上記のゲー
ルネゾに螺合したゴールナツトに伝動アームを固定して
該伝動アームの先端部を水平移動テーブルの面に対向せ
しめ、一方、上記水平移動テーブルの上に伝動ブラケッ
トを固定して前記の伝動アームと水平方向に対向せしめ
て、上記伝動アームと伝動ブラケットとの間にピエゾス
タックを介装挾持せしめ、かつ、前記の伝動アームと伝
動ブラケットとの間にテンションスゲリングを介装係着
して前記のピエゾスタックを挾持している伝動アームと
伝動ブラケットに挾持圧を与えたことを特徴とする。To achieve the above object, the apparatus of the present invention comprises a horizontally moving table and a ? - A transmission arm is fixed to a goal nut screwed onto the above-mentioned Galnezo, and the tip of the transmission arm is opposed to the surface of the horizontally movable table; A bracket is fixed and horizontally opposed to the transmission arm, a piezo stack is interposed between the transmission arm and the transmission bracket, and a tension gauge is provided between the transmission arm and the transmission bracket. It is characterized in that a ring is interposed and engaged to apply clamping pressure to the transmission arm and the transmission bracket that clamp the piezo stack.
次Ｋ、本発明の１実施例を添付の図面（平面図）につい
て説明する。Next, one embodiment of the present invention will be described with reference to the accompanying drawings (plan views).
水平移動テーブルｌをクロストローラがイド２によって
図示左右方向に案内する。A cross roller guides the horizontally moving table 1 in the horizontal direction in the drawing by means of an id 2.
上記の水平移動テーブルｌに隣接せしめて、これと平行
１ｃｙｅ？−ルネジ３を設けてベアリング４で回転自在
に支承する。ＤＣＣサーブモータによシ歯車６，７を介
して前記の？−ルネジ３を正、逆転自在に駆動できるよ
うに構成する。Adjacent to the above horizontal movement table l, 1cye parallel to this? - A screw 3 is provided and rotatably supported by a bearing 4. The above-mentioned ? - The screw 3 is constructed so that it can be freely driven in the forward and reverse directions.
６は、前記？−ルネ−）３に螺合したゴールナツトであ
る。6 is the above? -René-) It is a goal nut screwed into 3.
伝動用のアーム７を構成して前記のゴールナツト６に固
定し、該アーム７の先端部を水平移動テーブルｌの上面
に対向せしめるＯ
１対の板バネ８それぞれの両端を？−シルナツト６水平
移動テーブルｌとに取シ付ける。これＫよりゾールナツ
ト６と水平移動テーブル１とは図示左右方向の相対的な
微小変位を許容して相互に平行姿勢に支承される。A transmission arm 7 is configured and fixed to the goal nut 6, and the tip of the arm 7 is made to face the upper surface of the horizontally movable table l. - Attach to Silnut 6 horizontal movement table l. From this K, the sol nut 6 and the horizontally moving table 1 are supported in a mutually parallel posture while allowing a small relative displacement in the horizontal direction in the drawing.
一方、水平移動テーブルｌ上に伝動用のブラケット９を
固定し、前記の伝動アーム７に対向せしめる。On the other hand, a transmission bracket 9 is fixed on the horizontally movable table l and is opposed to the transmission arm 7.
前記の伝動アーム７と伝動ブラケット９との間にピエゾ
スタック１０を位置せしめるとともに、上記伝動アーム
７と伝動ブラケット９との間にテンションスプリング１
１を介装係着し、ピエゾスタック１０に対する挾持圧を
与える。A piezo stack 10 is positioned between the transmission arm 7 and the transmission bracket 9, and a tension spring 1 is placed between the transmission arm 7 and the transmission bracket 9.
1 is interposed and engaged to apply clamping pressure to the piezo stack 10.
以上のように構成したテーブル装置においては、ピエゾ
スタック１０を伸縮せしめない状態でＤＣＣサーモータ
５を作動させるとゴールネジ３が回転してゴールナツト
６をネジ送りする。これに伴ってゴールナツト６に固定
した伝動アーム７が図の左右方向に移動する。In the table device configured as described above, when the DCC thermomotor 5 is operated with the piezo stack 10 not expanded or contracted, the goal screw 3 rotates and the goal nut 6 is screwed. Accordingly, the transmission arm 7 fixed to the goal nut 6 moves in the left-right direction in the figure.
伝動アーム７が成る寸法だけ図の右方へ移動すると、該
伝動アーム７はピエゾスタック１０を介して伝動ブラケ
ット９を図の右方へ同寸法だけ押動し、水平移動テーブ
ル１を右方へ走行せしめる。When the transmission arm 7 moves to the right in the figure by the same dimension, the transmission arm 7 pushes the transmission bracket 9 to the right in the figure by the same dimension via the piezo stack 10, and moves the horizontally moving table 1 to the right. Make it run.
また、伝動アーム７が成る寸法だけ図の左方へ移動する
と、該伝動アーム７はテンションスプリング１１を介し
て伝動ブラケット９を左方へ引き寄せ、同寸法だけ左方
に移動させて水平移動テーブル１を左方へ走行させる。Further, when the transmission arm 7 moves to the left in the figure by the dimension, the transmission arm 7 pulls the transmission bracket 9 to the left via the tension spring 11, moves the transmission bracket 9 to the left by the same dimension, and moves the horizontal movement table 1. drive to the left.
このようにして水平移動テーブル１は？−ルネジ・ナツ
ト手段による長ストローク（センナメートルオーダー）
を、？−ルネノ・ナツト手段の精度（ミクロンオーダー
）で粗動操作される。In this way, what about the horizontally moving table 1? -Long stroke by screw/nut means (Senna meter order)
of,? - Coarse movement operation is performed with the precision (on the order of microns) of the luneno nut means.
上記の粗動作動の後、ピエゾスタック１０を電気的に制
御して伸縮させると、水平移動テーブルｌはピエゾスタ
ックｌＯの精度（サブミクロンオーダー）で左右方向に
駆動される。After the coarse movement described above, when the piezo stack 10 is electrically controlled to expand and contract, the horizontal movement table 1 is driven in the horizontal direction with the precision (submicron order) of the piezo stack 10.
上記のピエゾスタックｌＯの伸縮に伴い、テンションス
ゲリング１１が伸縮しつつ該ビエゾスタック１０に対し
てほぼ一定の挾持圧を与え、その伸縮に伴わしめて水平
移動テーブルｌを微動せしめる。As the piezo stack 10 expands and contracts, the tension gel ring 11 expands and contracts while applying a substantially constant clamping pressure to the piezo stack 10, causing the horizontal movement table 1 to move slightly as the piezo stack 1O expands and contracts.
また板／Ｊネ８はピエゾスタック１０の伸縮に伴って僅
かに撓み、ぜ−ルナット６と水平移動テーブル１との相
対的変位を許容しつつ双方の部材の水平を維持せしめる
。Further, the plate/J-neck 8 is slightly bent as the piezo stack 10 expands and contracts, allowing relative displacement between the bolt nut 6 and the horizontally movable table 1 while maintaining the horizontality of both members.
上述の構造機能から明らかなように、本実施例のテーブ
ル装置は単一の水平移動テーブルｌを備えた構造で、し
かもポールネジ・ナツトに対してテーブルの重量やピエ
ゾスタックの重量が掛からないのでポールネジ・ナツト
が軽快９円滑に作動でき、高速作動が可能である。As is clear from the above-mentioned structural functions, the table device of this embodiment has a structure equipped with a single horizontally movable table l, and since the weight of the table and the weight of the piezo stack are not applied to the pole screw/nut, the pole screw・The nut can operate smoothly and easily, and high-speed operation is possible.
以上詳述したように、本発明の装置によれば、単・−の
テーブルよシなる簡単な構成で、該単−のテーブルを長
ストロークで粗動せしめ得る上に超高精度で微動操作す
ることができ、しかも高速作動が可能であるという優れ
た実用的効果を奏する。As detailed above, according to the device of the present invention, with a simple configuration consisting of a single table, it is possible to coarsely move the single table with a long stroke, and also perform fine movement with ultra-high precision. Moreover, it has excellent practical effects in that it can operate at high speed.
図面は本発明の精密操作可能な長ストロークの移動テー
ブルの１実施例を示す平面図である。
１・・・水平移動テーブル、２・・・クロスローラ、ｆ
４ド％ ３・・・ポールネジ、５・・・ＤＣＣサーモ
ータ、６・・・ポールナット、７・・・伝動アーム、８
・・・板バネ、９・・・伝動ブラケット、１ｏ・・・ピ
エゾスタック、１１・・・テンシ】ンスプリング。The drawing is a plan view showing one embodiment of a long-stroke moving table capable of precise operation according to the present invention. 1...Horizontal moving table, 2...Cross roller, f
4 do% 3... Pole screw, 5... DCC thermotor, 6... Pole nut, 7... Transmission arm, 8
...Plate spring, 9...Transmission bracket, 1o...Piezo stack, 11...Tension spring.
Claims (1)
記のボールネジに螺合したボールナットに伝動アームを
固定して該伝動アームの先端部を水平移動テーブルの面
に対向せしめ、一方、上記水平移動テーブルの上に伝動
ブラケットを固定して前記の伝動アームと水平方向に対
向せしめて、上記伝動アームと伝動ブラケットとの間に
ピエゾスタックを介装挾持せしめ、かつ、前記の伝動ア
ームと伝動ブラケットとの間にテンションスプリングを
介装係着して前記のピエゾスタックを挾持している伝動
アームと伝動ブラケットに挾持圧を与えたことを特徴と
する、精密操作可能な長ストロークの移動テーブル。A horizontally moving table and a ball screw are installed in parallel, and a transmission arm is fixed to a ball nut screwed onto the ball screw so that the tip of the transmission arm faces the surface of the horizontally moving table. A transmission bracket is fixed on a table and horizontally opposed to the transmission arm, a piezo stack is interposed between the transmission arm and the transmission bracket, and the transmission arm and the transmission bracket are A long-stroke moving table capable of precision operation, characterized in that a tension spring is interposed and engaged between them to apply clamping pressure to a transmission arm and a transmission bracket that clamp the piezo stack.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5237585A JPS61214931A (en) | 1985-03-18 | 1985-03-18 | Accurately controllable moving table of long stroke |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5237585A JPS61214931A (en) | 1985-03-18 | 1985-03-18 | Accurately controllable moving table of long stroke |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61214931A true JPS61214931A (en) | 1986-09-24 |
Family
ID=12913055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5237585A Pending JPS61214931A (en) | 1985-03-18 | 1985-03-18 | Accurately controllable moving table of long stroke |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61214931A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100686921B1 (en) | 2005-05-24 | 2007-02-26 | 티아이씨덕흥 주식회사 | A stroke adjustment device of a grinder table |
-
1985
- 1985-03-18 JP JP5237585A patent/JPS61214931A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100686921B1 (en) | 2005-05-24 | 2007-02-26 | 티아이씨덕흥 주식회사 | A stroke adjustment device of a grinder table |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5895084A (en) | Cam operated microgripper | |
| JP2839543B2 (en) | Displacement generator | |
| JP2789384B2 (en) | Method for bonding semiconductor element to tab tape and ultrasonic bonding apparatus | |
| WO1984001660A1 (en) | Planar biaxial micropositioning stage | |
| US8966992B2 (en) | Load frame assembly | |
| CN204206019U (en) | Piezoelectric linear motor | |
| JPH02287206A (en) | Positioning table | |
| CN104578897B (en) | Piezoelectric linear motor and working method thereof | |
| JPS61214931A (en) | Accurately controllable moving table of long stroke | |
| JPS61274835A (en) | Precisely minutely movable long-stroke moving table | |
| CN2180406Y (en) | Precision mini-feeding working table | |
| CN111948426A (en) | Curvature obtaining method, curvature testing equipment and curvature adjusting device | |
| JPH0630345Y2 (en) | Work transfer insertion device | |
| JPH0287108A (en) | Object lens driving device for automatic focus adjustment | |
| LU504157B1 (en) | Planar two-dimensional training robot and training method for upper-limb rehabilitation | |
| CN221092629U (en) | Turning device with aligning mechanism | |
| CN214412607U (en) | Ultrasonic motor clamping and positioning device | |
| JPH0430931A (en) | Movable table | |
| JPH079377Y2 (en) | XY table in bonding equipment | |
| JPH0442132B2 (en) | ||
| CN115140703A (en) | Pre-strain-assisted wrinkle-form micro-nano structure manufacturing device and method | |
| JPH0712072Y2 (en) | Brake device for head of drafting machine | |
| KR100196662B1 (en) | Device for controlling a small rotation | |
| JPH0332378A (en) | Micro moving device | |
| JPH05184165A (en) | X-y table device |