JPH0332378A - Micro moving device - Google Patents

Abstract

PURPOSE:To reduce a size and a cost with a simple structure by composing a parallel spring of a driving piezoelectric element and a detecting piezoelectric element. CONSTITUTION:A micro moving device which uses a parallel spring has a base 1 and a movable base 4, and is driven by a driver 6. The spring is composed of a driving piezoelectric element 2 and a detecting piezoelectric element 3, and a detection signal 6 and a drive signal 7 are transmitted to and received from the driver 5.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a micro-movement device using parallel springs.

[Prior art] Conventionally, in micro-transfer devices using parallel springs, a base on which the entire device is fixed and a movable table on which a sample, etc. is placed are connected via a parallel spring, and the device is moved by the deflection of the parallel spring. I was trying to move the table.

[Problems to be Solved by the Invention] However, to drive such a micro-movement device, an external driving element is required, and to detect the movement state of the micro-movement device, a detection element must be provided externally. The structure was complicated and it was difficult to improve movement accuracy.

The present invention has been made in order to solve two consecutive problems, and its purpose is to achieve high precision by using piezoelectric elements for parallel springs, and to create an inexpensive microscopic device with a simple configuration. The purpose of the present invention is to provide a mobile device.

[Means for Solving the Problems] In order to achieve this object, the micro-movement device of the present invention includes a driving piezoelectric element that drives the moving table and a detection piezoelectric element that detects the moving state of the moving table. A parallel spring is interposed between the base and the moving table.

[Function] In the present invention having the above configuration, the driving piezoelectric element and the detection piezoelectric element serve as guides for the moving table, the driving piezoelectric element drives the moving table, and the detecting piezoelectric element guides the moving part. Detect movement status. Then, the amount of movement is fed back by the strain amount detection signal of the detection piezoelectric element, and a command signal is sent to the drive piezoelectric element, thereby controlling it with fine precision.

[Example] Hereinafter, an example embodying the present invention will be described with reference to the drawings.

First, to explain the configuration of the micro-movement device with reference to FIG. 1, there is a base 1 for fixing the entire micro-movement device;
Base 1. A driving piezoelectric element 2 and a detection piezoelectric element 3, both of bimorph type, are attached to the. A moving table 4 is provided with the drive piezoelectric element 2 and the detection piezoelectric element 3 as guides. A detection signal 6 is sent from the detection piezoelectric element 3 to the drive device 5, and a drive signal 7 is transmitted from the drive devices to the drive piezoelectric element 2. Further, a command signal 8 is given to the drive device 5 .

Next, the operation of the micro-movement device of this embodiment will be explained with reference to FIG. When the movement amount of the movable table 4 is given as a command signal 8 to the drive device 5, the drive device 5 outputs a drive signal 7 to the drive piezoelectric cable 2 using the detection signal 6 from the detection piezoelectric element 3 as a feedback signal. The moving table 4 is driven by the driving piezoelectric element 2 and moves by a set amount. The detection sensitivity of the detection piezoelectric element 3 is 4On++++ in length and 1 in thickness.
mn+, piezoelectric constant 340 x 10”m+Il/V
Assuming this, the drive piezoelectric element 2 has a high sensitivity of approximately 1 shoulder/V and is also a high-resolution actuator, so it is a micro-movement device that is capable of highly accurate positioning and has a simple configuration.

The present invention is not limited to the embodiments detailed above, and various changes can be made without departing from the spirit thereof.

For example, it is possible to develop the movement into two-dimensional movement as shown in FIG. 2, or three-dimensional movement. That is, in the case of two-dimensional movement, FIG.
0 and an X-axis detection piezoelectric element plate 11 are extended in parallel, and an intermediate moving table 12 is provided at the tips of both piezoelectric element plates 10 and 11,
The intermediate moving table 12 has a Y-axis drive piezoelectric element plate 13 and a Y-axis drive piezoelectric element plate 13 in a direction perpendicular to the extending direction of both piezoelectric element plates 10.
A piezoelectric element plate 14 for axis detection is extended in parallel, and a moving table 15 is provided at the tip thereof. In this example, a piezoelectric element plate 10 for X-axis drive and a piezoelectric element plate 13 for Y-axis drive By controlling the movable table 15, the movement of the movable table 15 in the X and Y directions can be controlled. Further, as shown in FIG. 3, a leaf spring 16 which is neither a driving element nor a detecting element may be added.

[Effects of the Invention] As is clear from the detailed description above, according to the present invention, the parallel spring is composed of a driving piezoelectric element that drives the moving table and a detection piezoelectric element that detects the moving state of the moving table. Therefore, highly accurate positioning is possible, and the simple structure allows the device to be small and inexpensive.

[Brief explanation of drawings]

1 to 3 show embodiments embodying the present invention, FIG. 1 is a schematic configuration diagram of the first embodiment, and FIG.
The figure is a schematic diagram of the second embodiment, and FIG. 3 is a schematic diagram of the third embodiment. In the figure, 1 is a base, 2 is a drive piezoelectric element, 3 is a detection piezoelectric element, 4 is a moving table, 10 is an X-axis drive piezoelectric element, 1] is an X-axis detection piezoelectric element, and 13 is a Y-axis Drive piezoelectric element, 14
is a piezoelectric element for Y-axis detection.

Claims (1)

[Claims] 1. In a micro-movement device in which a base and a moving table are connected via a parallel spring, the parallel spring controls a drive piezoelectric element that drives the moving table, and the movement state of the moving table. 1. A micro-movement device comprising a detection piezoelectric element that detects.