JP2008079492A - Drive device using piezoelectric actuator, and electronic equipment mounted with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To attain a drive device that is capable of accurate positioning and proper controllability, has small power consumption, and is abundant in reliability, and has a small and simple structure. <P>SOLUTION: The drive device has an operation part, an elastic member, whose one end is fixedly provided to the operation part and whose the other end is fixedly provided to a support member, and a piezoelectric actuator whose one end is fixedly provided to the operation part and whose the other end is fixedly provided to the support member. The operating member is operated in a first direction due to a displacement of the piezoelectric actuator. The rigidity of the elastic member in the first direction is lower than that of in the direction that is orthogonal to the first direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a driving device using a piezoelectric actuator, and more particularly to a driving device that is mounted on a camera or a video camera and corrects a user's camera shake by driving a lens or an image sensor.

  In recent years, electronic devices have been improved in functionality and performance. For example, digital still cameras are increasingly equipped with a function of optically correcting user shakes, and various actuators are used.

  Of the various directions of camera shake, the problem with the image is the rotational movement around two axes (pitch and yaw) orthogonal to the optical axis of the lens. There is known a method in which a correction lens or an image sensor itself arranged in an orthogonal plane is operated according to the direction and amount of camera shake.

The mechanism that drives the operating body including the lens and the image sensor uses an electromagnetic actuator including a magnet and a coil and a guide mechanism including a shaft and an oilless metal (Patent Document 1), and a piezoelectric element. There is known an apparatus that frictionally drives an operating portion that frictionally couples with a drive rod provided on a piezoelectric element by rapid deformation of the element (Patent Document 2).
Japanese Patent No. 2641172 Japanese Patent Laid-Open No. 10-254012

  However, in the case of using an electromagnetic actuator, it is necessary to keep a current flowing in order to keep the operating body in a specific position, and it is difficult to reduce power consumption. When the electronic device on which this actuator is mounted is not used (when no current is supplied to the actuator), the actuator does not have a holding force, so there is a risk of damage to the drive device due to dropping or impact. . Although a mechanism for preventing this can be provided, in this case, there is a fear that the drive device becomes large or power consumption increases. In addition, if a guide mechanism such as a guide shaft is used, smooth movement may not be possible, and there is a slight gap in the guide part. In some cases, the desired correction effect could not be obtained.

  On the other hand, due to the rapid deformation of the piezoelectric element, in the case of the type that frictionally drives the operating part that is frictionally coupled to the drive rod provided in the piezoelectric element, the pressurization mechanism and guide mechanism of the drive shaft and the operating part become complicated It is difficult to reduce the cost, and wear powder is inevitably generated by friction driving. Therefore, when this is mounted on a camera, it is necessary to take a dust-proof measure so that the abrasion powder does not adhere to the lens or the image pickup device, which reduces the degree of freedom in design and increases the cost.

  An object of the present invention is to provide a drive device having a configuration that has a simple mechanism but can be smoothly moved, has good controllability, and does not increase power consumption or increase costs.

  Therefore, in order to solve the above problems, the drive device of the present invention is provided with an operating portion, one end fixed to the operating portion in a normal state, the other end fixed to a support member, an elastic member, and one end to the operating portion. A piezoelectric actuator provided in a fixed state with the other end fixed to the support member, and the operating member is moved in the first direction by the displacement of the piezoelectric actuator, and the elastic member is moved in the first direction. The driving device is characterized in that the rigidity is lower than the rigidity in another direction orthogonal to the first direction.

  According to this, a drive device with good controllability and low power consumption can be realized with a small and simple configuration.

  Further, one end is fixed to the support member, the other end is fixed to the second support member, and one end is fixed to the support member, and the other end is supported to the second support member. A second piezoelectric actuator fixed to the member, and the second support member operates in a second direction orthogonal to the first direction by the displacement of the second piezoelectric actuator, The elastic member has a rigidity in the second direction lower than the rigidity in the other direction orthogonal to the second direction. According to this, it is possible to realize a drive device that can operate freely in one plane (xy plane).

  Here, the elastic member is composed of a pair of spring members. According to this, it becomes possible to operate the operating part precisely and smoothly in the target direction without rotational motion, and the controllability is improved because the displacement of the piezoelectric actuator and the displacement of the operating part have a linear relationship. .

  The piezoelectric actuator is composed of a pair of piezoelectric actuators. This further increases the effect.

  Furthermore, the piezoelectric actuator also serves as an elastic member. According to this, the drive device can be reduced in size and simplified.

  Further, the distance from the support member to the fixed point between the operating part and the elastic member is the same as the distance from the support member to the fixed point between the operating part and the actuator. According to this, the controllability is improved because the displacement of the piezoelectric actuator and the displacement of the operating portion have a linear relationship.

  And by using an electronic device characterized by including these driving devices, an electronic device with low power consumption and high reliability can be realized.

  In particular, battery life can be achieved by providing an electronic apparatus (camera) including these driving devices, a sensor that detects camera shake, and a control unit that controls driving of the driving device according to the output of the sensor. A camera capable of correcting camera shake in a wide frequency range can be realized.

  According to the present invention, a drive device that consumes less power and can position the operating part smoothly and precisely can be realized with a simple structure. Therefore, electronic devices using this drive device can be reduced in size and power consumption can be reduced. It becomes. In particular, when the drive device of the present invention is used in a camera shake correction device, camera shake can be corrected over a wide frequency range.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
The structure and operation of the drive device 100 of the present invention will be described with reference to FIG. The driving device 100 according to the present invention is fixed to the support member 4, a pair of elastic members (plate springs) 2, 3 fixed at one end to the support member 4, and the other ends of the elastic members 2, 3. The operating portion 1, the piezoelectric actuator 6 having one end fixed to the support member 4, and the joining member 5 that connects the other end of the piezoelectric actuator 6 and the other end of the elastic member 3.

  The elastic members 2 and 3 are leaf springs made of a metal such as stainless steel or plastic, and the dimension (width) in the x-axis direction in the figure is thinner than the dimensions (thickness and length) in other directions. Therefore, it is easy to deform in the x-axis direction (low rigidity) and difficult to deform in the direction orthogonal to the x-axis direction (high rigidity). The operation member 1 and the elastic members 2 and 3 are fixed by means such as adhesion at the convex portions 1a and 1b provided on the operation unit 1. However, you may comprise the convex parts 1a and 1b with a member different from the operation part 1. FIG. The convex portions 1a and 1b are provided so that they do not come into contact with the operating portion 1 when the elastic members 2 and 3 are deformed.

  The piezoelectric actuator 6 is a general bimorph element in which two piezoelectric elements 6a and 6b are bonded together. The bonding member 5 is bonded between the piezoelectric actuator 6 and the elastic member 3, and this is propelled to the operating unit 1 through the elastic member 3 while preventing the piezoelectric actuator 6 and the elastic member 3 from contacting each other. It is intended to convey power. Therefore, the elastic member 3 and the piezoelectric actuator 6 may be provided with a convex portion to have this function. Further, the force generated by the piezoelectric actuator 6 may be directly applied to the operating unit 1 without the elastic member 3 interposed therebetween. The joining region between the joining member 5 and the elastic member 3 overlaps with the joining region between the convex portion 1b and the elastic member 3 in the x-axis direction, but is within a range that fits within the joining region between the convex portion 1b and the elastic member 3. Thus, the joining of the joining member 5 and the elastic member 3 does not affect the deformation of the elastic member 3 and is the same as the deformation of the elastic member 2. In addition, the distance from the support member 4 to the fixed point between the operating part 1 and the elastic members 2 and 3 and the distance from the support member 4 to the fixed point between the active part 1 and the piezoelectric actuator 6 are the same. Therefore, the controllability of the drive device 100 is improved.

  Next, the operation of the driving device 100 of the present invention will be described. The operating unit 4 is guided by the elastic members 2 and 3 so as to operate in the first direction (x-axis direction). When a voltage is applied to the piezoelectric actuator 6, the piezoelectric actuator 6 is bent and displaced, and the other end of the piezoelectric actuator 6 (joint portion with the joining member 5) is displaced in the first direction. Thereby, as shown in FIG.1 (b), the operation part 1 is also displaced to a 1st direction. Since the piezoelectric actuator 6 can be regarded as a capacity equivalently, a current flows when the operating unit 1 is moved (the voltage value is changed), but is stopped at a specific position (adding the same voltage value) Current) does not flow. The moving direction of the operating unit 1 differs depending on the polarity of the voltage applied to the piezoelectric actuator 6, and the amount of displacement can be controlled by the voltage value. In this way, by arranging the elastic members (plate springs) 2 and 3 in parallel and functioning as a pair of springs, the operation unit 1 is not accompanied by a rotation operation, and the first direction (x in the drawing) Direction). Further, by providing the piezoelectric actuator 6 independently of the elastic members 2 and 3, even if the displacement direction of the piezoelectric actuator 6 is slightly different from the first direction, the operating portion 1 is It is guided to move in the first direction with deformation. Further, by adopting a configuration in which the operating unit 1 is supported by the elastic members 2 and 3, a shock to a drop or impact can be absorbed, and a highly reliable drive device 100 can be realized.

  In FIG. 1, the support member 4 to which the elastic members 2 and 3 are fixed and the support member 4 to which the piezoelectric actuator 6 is fixed are the same, but they may be separate. However, in this case, all the supporting members are required to be in the same operation state by being fixed to other members. Such an operation guidance method is different from guidance accompanied by sliding by a guide shaft or the like, and does not generate stick-slip, so that it operates smoothly and there is no loss of force at the guide section. And since there is no generation | occurrence | production of abrasion powder, it is not necessary to consider the lifetime by abrasion, if other members are not polluted. For this reason, the drive device 100 excellent in controllability can be realized.

  In addition, the elastic members 2 and 3 and the support member 4 are each constituted by separate members, but may be constituted by integral members. The shape may be processed from the metal plate by electric discharge machining or the like, or the target shape may be obtained by plastic deformation of the metal plate by a press or the like. Alternatively, the desired shape may be obtained by injection molding with plastic.

(Embodiment 2)
A second example of the drive device of the present invention will be described with reference to FIG. Here, the description will focus on differences from the driving apparatus 100 shown in the first embodiment.

  In FIG. 2 which shows the structure of the drive device 200 of this invention, a pair of piezoelectric actuators 9 and 10 are used as a piezoelectric actuator. The piezoelectric actuators 9 and 10 have one end on the two extending portions 8a and 8b of the support member 8 and the other end on the other end of the elastic members 2 and 3 (the surface that becomes a joint portion with the convex portions 1a and 1b of the operating portion 1). Are joined to the back surface of each). Here, the piezoelectric actuators 9 and 10 are laminated piezoelectric elements that expand and contract in the x-axis direction, and operate the operating unit 1 by being displaced in opposite directions. For example, if the piezoelectric actuator 9 is extended and the piezoelectric actuator 10 is contracted, the movable portion 1 is displaced in the x-axis direction to the + side (the same as the displacement direction of the movable portion 1 in FIG. 1B). By the way, as long as the piezoelectric actuators 9 and 10 generate a displacement that operates the operating unit 1 in the x-axis direction, the shape and the principle are not limited. For example, as shown in Japanese Patent Publication No. 2003-518752, A piezoelectric actuator (commonly referred to as a hemimorph actuator) formed of a spirally curved piezoelectric element may be used. Further, as shown in the first embodiment, a bimorph actuator or a unimorph actuator may be used. However, in this case, the operating unit 1 is moved by making the displacement directions of the two actuators the same.

  In this way, by providing the pair of elastic members 2 and 3 and the pair of piezoelectric actuators 9 and 10 so as to correspond to each of them, the force applied to the operating unit 1 becomes bilaterally symmetrical. It does not rotate and operates smoothly in the x-axis direction.

(Embodiment 3)
A third example of the drive device of the present invention will be described with reference to FIG. Here, the difference from the driving device 100 shown in the first embodiment will be mainly described. In FIG. 3, the driving device 300 has a configuration in which one of the pair of elastic members (elastic member 3) that supports the movable portion 1 in Embodiment 1 is also used as a bimorph piezoelectric actuator 6. By omitting one elastic member, the drive device 300 can be reduced in size and cost. In particular, by making the rigidity of the elastic member 2 and the piezoelectric actuator 6 equal, no rotational force is applied to the movable portion 1 and it can be accurately moved only in the x-axis direction.

  FIG. 4 shows a modification of the third example of the driving apparatus of the present invention. The operating unit 1 is supported by two identical bimorph piezoelectric actuators 7 and 11, and these serve as an elastic member. The piezoelectric actuator 7 is provided with a shim 7c made of a metal plate and serving as an electrode between the two piezoelectric elements 7a and 7b. The piezoelectric actuator 11 is formed of a metal plate between two piezoelectric elements 11a and 11b, and a shim 11c that also serves as an electrode is provided. The shims 7c and 11c work as spring members and compensate for the low impact resistance of the piezoelectric element, and can obtain high reliability against dropping or the like.

  In contrast to the configuration of FIG. 3, the piezoelectric actuators 7 and 11 are provided on the left and right, respectively, and these serve as an elastic member, so that the deformation of the two piezoelectric actuators 7 and 11 serving as the elastic members is the same. Since the rotational force is not applied to the part 1 and it can be accurately operated only in the x-axis direction, the degree of freedom in designing the piezoelectric actuators 7 and 11 is increased.

(Embodiment 4)
A fourth example of the drive device of the present invention will be described with reference to FIG. The driving device 500 in the present embodiment is a driving device that can freely operate the operating unit 20 in the x and y axis directions in the drawing.

  The driving device 500 includes an L-shaped second support member 12, a pair of second elastic members (plate springs) 13 and 14 that are fixed to the second support member 12 and are parallel to each other, A pair of elastic members (plate springs) disposed on the inner side of the support member 16 and having one end fixed to the support member 16 and parallel to each other. ) 17, 18, the operating portion 20 fixed to the other end of the elastic members 17, 18, and a second end fixed to the second support member 12 and the other end fixed to the second elastic member 14. And the piezoelectric actuator 19 having one end fixed to the support member 16 and the other end fixed to the elastic member 18. A lens 20 c is provided at the center of the operating unit 20.

  The second elastic members 13 and 14 are leaf springs made of metal such as stainless steel or plastic, and the dimension (width) in the Y-axis direction is thinner than the dimensions (thickness and length) in other directions. Therefore, it is easy to deform in the Y-axis direction (low rigidity), and difficult to deform in the direction orthogonal to the Y direction (high rigidity). The elastic members 17 and 18 are also leaf springs made of metal such as stainless steel or plastic, and the dimension (width) in the x-axis direction is thinner than the dimensions (thickness and length) in other directions. Therefore, it is easy to deform in the x-axis direction (low rigidity), and difficult to deform in the direction orthogonal to the x-axis direction (high rigidity).

  The support member 16 and the second elastic members 13 and 14 are fixed by means of adhesion or the like at the convex portions 16a and 16b provided on the support member 16, but the convex portions 16a and 16b may be configured by separate members. I do not care. The convex portions 16a, 16b are provided so as not to contact the support member 16 when the second elastic members 13, 14 are deformed. Similarly, the operating member 20 and the elastic members 17 and 18 are fixed by means of adhesion or the like in the convex portions 20a and 20b provided in the operating portion 20, but the convex portions 20a and 20b may be configured by separate members. I do not care. The convex portions 20a and 20b are provided so as not to contact the operating portion 1 when the elastic members 17 and 18 are deformed.

  The second piezoelectric actuator 15 has one end joined to the second support member 12 and the other end joined to the second elastic member 14. The piezoelectric actuator 19 has one end joined to the support member 16 and the other end joined to the elastic member 18. Here, the second piezoelectric actuator 15 is a laminated piezoelectric element that expands and contracts in the y-axis direction, and the piezoelectric actuator 19 is a stacked piezoelectric element that expands and contracts in the x-axis direction. The support member 16 to which the operating unit 20 is fixed by the displacement of the second piezoelectric actuator 15 operates in the y-axis direction, and the operating unit 20 operates in the x-axis direction by the displacement of the piezoelectric actuator 19. Therefore, by independently driving the second piezoelectric actuator 15 and the piezoelectric actuator 19, the operating unit 20 can be operated at a desired position in the x-axis direction and a desired position in the y-axis direction. . That is, the operating unit 20 can be freely positioned at a desired position in the xy plane. As described above, since the support member 16 and the second support member 12 are provided in the plane in which the operating unit 20 operates, the driving device 500 can be thinned.

  By the way, if the second piezoelectric actuator 15 generates a displacement that moves the operating unit 20 in the y-axis direction, and the piezoelectric actuator 19 generates a displacement that operates the operating unit 20 in the x-axis direction, Regardless of the shape and principle, for example, a piezoelectric actuator (commonly referred to as a hemimorph actuator) made of a helically curved piezoelectric element as disclosed in Japanese Patent Application Publication No. 2003-518752 may be used. Further, as shown in the first embodiment, a bimorph actuator or a unimorph actuator may be used. Then, as shown in the second and third embodiments, if each piezoelectric actuator that operates the operating unit 20 and the support member 16 is constituted by a pair of piezoelectric actuators to function, the operating unit 20 and the support member 16 are made to function. Since no rotational force is applied, the operation unit 20 and the support member 16 can be operated smoothly in the intended direction.

(Embodiment 5)
A fifth example of the drive device of the present invention will be described with reference to FIG. The drive device 600 in the present embodiment is a drive device that can operate the operating unit 20 freely in the x- and y-axis directions in the figure as in the fourth embodiment. The difference from the fourth embodiment will be mainly described.

  6A is a top view of the driving device 600, and FIG. 6B is a side view. The drive device 600 includes a U-shaped second support member 32, a pair of second piezoelectric actuators 30 and 31 parallel to each other, one end of which is fixed to the second support member 32, and the second piezoelectric actuator 30. , 31 fixed at the other end, a pair of parallel piezoelectric actuators 27, 28 fixed at one end to the support member 29, and fixed at the other ends of the piezoelectric actuators 27, 28. And an operating unit 20. A lens 20 c is provided at the center of the operating unit 20. Therefore, unlike the drive device 500 shown in the fourth embodiment, the support member 29 and the second support member 32 are provided so as to overlap each other on an axis orthogonal to the plane in which the operating unit 20 operates. Thereby, the cross-sectional area of the driving device 500 can be reduced.

  The piezoelectric actuators 27, 28, 30, and 31 are bimorph piezoelectric actuators that also serve as elastic members, similarly to the piezoelectric actuators 7 and 11 shown in the third embodiment (FIG. 4). The piezoelectric actuators 27 and 28 move the operating part 20 in the x-axis direction in the figure, and the second piezoelectric actuators 30 and 31 move the support member 29 and the operating part 20 in the y-axis direction in the figure. By the way, the piezoelectric actuator and the elastic member are not limited to this, and those shown in the first to fourth embodiments may be used.

(Embodiment 6)
A camera shake correction device using the drive device of the present invention and a camera which is an electronic device equipped with the same will be described. FIG. 7 is a diagram showing the position and operation of the drive unit of the camera shake correction device in the optical system of the camera. FIG. 8 is a block diagram showing a camera shake correction apparatus 700. Here, the drive unit is the drive device 500, 600 shown in the fourth and fifth embodiments, and is hereinafter referred to as the drive unit 500, 600.

  First, the operation of the drive units 500 and 600 will be described. The drive units 500 and 600 are disposed between the lens 24 on the subject side and the image sensor 25. Here, the image pickup element 25 is a CCD or C-MOS sensor in the case of a digital camera, and is a film in the case of a film camera. Now, assuming that the camera is tilted by camera shake and the optical axis 26a becomes light 26b, the image reaching the image sensor 25 is shaken by an amount indicated by A in FIG. In order to correct this, a lens provided in the center of the drive units 500 and 600 is operated in a plane perpendicular to the optical axis according to the direction and amount of shake, and the image captured by the image sensor 25 is shaken. Do not.

  Next, a method of driving and controlling the drive units 500 and 600 according to hand shake will be described with reference to FIG. The camera shake correction apparatus of the present invention includes an operating unit 20 having a lens 20c, a piezoelectric actuator 15 that operates the operating unit 20, a driving unit 500 and 600 having a second piezoelectric actuator 19, and a rotational angular velocity in the pitch direction caused by camera shake. On the basis of the detection signals of the gyro sensors 21 and 22 and the second gyro sensor 22 for detecting the angular velocity around the rotation axis in the yaw direction orthogonal to the rotation axis detected by the gyro sensor 1. And a control means 23 for driving and controlling the second piezoelectric actuator 19. The piezoelectric actuator 15 is driven and controlled based on the detection amount of the gyro sensor 21, and the second piezoelectric actuator 19 is driven and controlled based on the detection amount of the gyro sensor 22.

  By the way, the driving devices 500 and 600 capable of operating in the xy plane are used as the driving unit in the camera shake correction device of the present invention. However, the driving devices 100, 200, 300, and 400 shown in the first to third embodiments are used. May be arranged on the optical axis, and each driving device may be configured to operate the lens in the x-axis direction and the y-axis direction, respectively.

  Next, the operation of the digital camera equipped with the camera shake correction apparatus of the present invention will be described. When the gyro sensors 21 and 22 detect that camera shake has occurred when the user presses a shutter button (not shown) or when the shutter button is touched as a pre-stage before pressing, the gyro sensors 21 and 22 A detection signal is input to the control means 23. From these detection signals, the control means 23 determines which direction and how much the lens 20c should be moved in order to correct the camera shake at this time, and sends drive signals to the piezoelectric actuator 15 and the second piezoelectric actuator 19, respectively. Apply. The position of the operating unit 20 is detected by a position sensor (not shown), and an output signal from the position sensor is input to the control unit 23, so that the control unit 23 causes the piezoelectric actuator 15 and the first actuator so that the operating unit 20 is positioned at a predetermined position. The second piezoelectric actuator 19 is controlled. Even if camera shake occurs by such a method, this is corrected and an image without camera shake is input to the image sensor 25.

  By the way, in this embodiment, the lens 20c for correcting camera shake is arranged between the lens 24 on the subject side and the image sensor 25, and the camera shake is corrected by operating the lens 20c. The image sensor 25 may be operated directly by 600.

  As described above, the digital camera (driving of the camera shake correction device) is shown as an application example of the driving device 100, 200, 300, 400, 500, 600 of the present invention, but the present invention is not limited to this. Necessary, small, thin, and low power consumption electronic devices such as optical disk and magnetic disk pickup drive unit, optical disk optical system (lens, prism, etc.) adjustment mechanism drive unit, camera autofocus The present invention can be applied to a lens driving unit in a mechanism, a fine movement device in a microscope or a measuring device, and the like.

  In this way, by using the drive device of the present invention in an electronic device, the electronic device can be reduced in size, performance, and quietness, and at the same time, the power consumption can be reduced. Overall size and weight can be reduced.

  The drive device of the present invention is simple in structure, easy to miniaturize, has a feature of precise positioning and low power consumption, so that it can drive a pickup in an optical disk or a magnetic disk, or an optical system in an optical disk. The present invention can be applied to driving of an adjustment mechanism (components such as a lens and a prism) and lens driving in an autofocus mechanism of a camera. Further, since it has a feature that it can be operated freely in the xy plane, it can be applied as a camera shake correction device in a camera or video camera in addition to a fine movement device in a microscope or a measurement device.

It is a figure which shows the structure of the drive device of Embodiment 1 of this invention. It is a figure which shows the structure of the drive device of Embodiment 2 of this invention. It is a figure which shows the structure of the drive device of Embodiment 3 of this invention. It is a figure which shows the structure of the modification of the drive device of Embodiment 3 of this invention. It is a figure which shows the structure of the drive device of Embodiment 4 of this invention. It is a figure which shows the structure of the drive device of Embodiment 5 of this invention. It is a figure which shows arrangement | positioning of the drive part of the drive device in the camera-shake correction apparatus of the digital camera of Embodiment 6 of this invention. It is a block diagram which shows the camera-shake correction apparatus of the digital camera of Embodiment 6 of this invention.

Explanation of symbols

1,20 Moving part 2,3,17,18 Elastic member 4,8,16,29 Support member 6,7,9,10,11,19,27,28,30,31 Piezoelectric actuator 13,14 Second Elastic members 12, 32 Second support member 15 Second piezoelectric actuator

Claims (10)

Working part,
An elastic member provided with one end fixed to the operating portion and the other end fixed to the support member;
A piezoelectric actuator provided with one end fixed to the operating portion and the other end fixed to the support member;
Due to the displacement of the piezoelectric actuator, the operating member operates in the first direction,
The drive device according to claim 1, wherein the rigidity of the elastic member in the first direction is lower than the rigidity in a direction orthogonal to the first direction. A drive device according to claim 1;
A second elastic member provided with one end fixed to the support member and the other end fixed to the second support member;
A second piezoelectric actuator provided with one end fixed to the support member and the other end fixed to the second support member;
Due to the displacement of the second piezoelectric actuator, the support member operates in a second direction orthogonal to the first direction,
The drive device according to claim 1, wherein the rigidity of the second elastic member in the second direction is lower than the rigidity in a direction orthogonal to the second direction.   The drive device according to claim 2, wherein the support member and the second support member are provided in a plane in which the operating portion operates.   The drive device according to claim 2, wherein the support member and the second support member are provided on an axis orthogonal to an in-plane in which the operating unit operates.   The drive device according to claim 1, wherein the elastic member includes a pair of spring members.   The drive device according to claim 1, wherein the piezoelectric actuator includes a pair of piezoelectric actuators.   The drive device according to claim 1, wherein the piezoelectric actuator also serves as the elastic member.   5. The distance from the support member to a fixed point between the operating part and the elastic member is the same as the distance from the support member to the operating part and a fixed point of the actuator. The driving device according to any one of the above.   An electronic apparatus comprising the driving device according to claim 1. 9. An electronic apparatus comprising: the driving device according to claim 1; a sensor that detects camera shake; and a control unit that controls driving of the driving device in accordance with an output of the sensor.

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