JPS61213131A - Manufacture of information recording disc - Google Patents

Abstract

PURPOSE:To improve productivity, by a method wherein photosetting molding resin is applied to a resin pattern molding surface of a stamper under atmospheric pressure and the molding resin is stretched by bonding a replica base to the molding resin with pressure under depressurized state. CONSTITUTION:A stamper 1 and replica substrate 3 obtained by inverting an information pattern are fitted to a stamper holding member 11 and replica holding member 12 of a vacuum tank 10 and photosetting molding resin 2 which is under a fluidized state is applied to an information pattern molding surface 1a under atmospheric pressure. Then a transparent lid member 10a is clad to the vacuum tank 10 and the atmospheric pressure is reduced by driving a vacuum pump 13. Press bonding of the replica substrate 3 is applied to the resin 2 under this state, the resin 2 is stretched extending to an external circumferential part from the center of the stamper 1 and substrate 3, setting rays 5 are irradiated to the resin 2 by transmitting through the base 3 under a state wherein the substrate 3 is bonded uniformly to the resin 2 with pressure and the resin 2 is cured. The resin layer 2 is peeled off from the stamper 1 and a disc veneer 7, which is obtained by unification of the resin layer 2 and substrate 3 is unloaded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing information recording disks, such as laser-type and capacitance-type video disks.

- [Prior art] Conventionally, as a manufacturing method for this type of information recording disc, 1
A photocurable molding resin in a fluid state is applied to a stamper with an inverted information pattern formed on its surface, and a replica substrate made of a glass plate or a plastic plate is pressure-bonded to the molding resin.

A method of transferring an information pattern onto this replica substrate is known.

An example of a conventionally known manufacturing method for this type of information recording disk will be explained based on FIG.
3-86756).

First, as shown in FIG. 2(a), the information pattern forming surface 1a of the stamper 1 has an uneven pattern that is the reverse of the information pattern to be transferred onto the information recording disk.
The photocurable molding resin 2, which is still in a fluid state, is placed approximately in the center of the molding resin.

Subsequently, as shown in FIG. 2(b), a replica substrate 3 is elastically deformed into a spherical shell shape with its center portion facing the standby l side.
is pressed onto the molding resin 2, and the molding resin 2 is expanded radially from the center toward the outer periphery while gradually releasing the elastic deformation of the replica substrate 3.

After the stretching is completed and the replica substrate 3 is uniformly pressed onto the molding resin 2, an exposure mask 4 is placed on the replica substrate 3 as shown in FIG. 2(C).

Resin curing light 5 is irradiated onto molding resin 2 from outside of exposure mask 4 . The exposure mask 4 is made of a light-transmissive plate material, and a ring-shaped masking member 6 is attached to the periphery of the mask 4 to prevent passage of the resin curing light 5. Therefore, in the central part of the replica substrate 3 including the information pattern forming surface 1a! The resin curing light 5 is irradiated to cure the molding resin 2, while the outer periphery of the replica substrate 3 is not irradiated with the resin curing light 5, so the molding resin remains uncured. Become.

Subsequently, as shown in FIG. 2(d), the uncured molding resin 2a remaining on the outer periphery of the stamper 1 and replica substrate 3 is removed by wiping or the like.

Finally, as shown in FIG. 2(e), the molding resin layer 2 integrated with the replica substrate 3 is peeled off from the stamper plate.
Take out the disk single plate 7.

The above-mentioned conventional information recording disc manufacturing method is as follows.

Since the molding resin 2 supplied to the center of the stamper is gradually expanded from the center to the outer periphery on the replica substrate 3 which is elastically deformed into a spherical shell, the viscosity of the molding resin is Also, by appropriately adjusting the stretching speed, it is possible to prevent air bubbles from being entrained during stretching.

Next, another example of the conventionally known manufacturing method of this type of information recording disk will be explained with reference to FIG.
Day 53-116105).

First, as shown in FIG. 3 Ca), the replica substrate 3 is attached to the clamper 8, which is vertically movably arranged through the central through-hole 1b formed in the center of the stamper 1. A predetermined amount of photocurable molding material 1rfI2, which is still in a fluid state, is supplied from the central through hole 1b to the information pattern molding surface 1a of the stamper 1.

Subsequently, as shown in the third (!I(b)), the clamper 8 is lowered, the central through hole 1b is closed by the clamper 8, and the replica substrate 3 is crimped onto the molding resin 2.

Thereafter, by the same means as in the first conventional information recording disk manufacturing method described above, the molding resin 2 is cured, the uncured molding resin 2 is removed, and the stamper 1 is peeled off, and then the replica substrate 3 and the information Obtain a disk veneer 7 that is integrated with the molding resin layer 2 to which the pattern has been transferred.

In the above-mentioned second conventional information recording disk manufacturing method, the molding resin a2 is supplied quietly from below the stamper 1, so that there is no air bubbles involved.

In addition, since there is no need to elastically deform the replica substrate 3 into a spherical shell shape, it is easy to manufacture.

[Problems with the prior art] In all of the above-described conventional methods for manufacturing information recording disks, the molding resin 2 is applied and stretched under atmospheric pressure, so the applied molding resin 2 is affected by its viscosity. The process of spreading on the standby.

It is easy to entrain air during the stretching process, and molding resin 2
There is a problem that air '41 is easily mixed inside.

That is, since the replica substrate 3 as well as the information pattern molding surface 1a of the stamper 1 are not formed into a perfect plane when viewed microscopically, the viscosity of the molding resin 2 is high and the replica substrate 3 has a high viscosity. If the speed is too high, the air does not have time to be driven out by the molding resin, and air bubbles become trapped.

In this type of information recording disk, a reproduction laser beam is irradiated along the information pattern, and the information signal is read out by changing the intensity of reflected light or transmitted light from the information pattern. If air bubbles are mixed into the formed molding resin 2, normal reading of information will become impossible.

Also, what is the conventional manufacturing method for information recording discs?

When spreading the molding resin 2, a slightly larger amount of the molding resin is supplied than necessary for transferring the information pattern, and the excess molding resin is disposed of inside the stamper 1 and the replica substrate 3 during spreading. The method used is to allow the resin to protrude from the periphery and the outer periphery, and after the stretching is completed, remove the excess molding resin by wiping, etc., to obtain a disc of the desired shape. There is a problem that it is indispensable and has poor productivity.

[Means for solving problems]

In order to solve the above-mentioned problems in the production of conventional information recording disks, the present invention first applies a photocurable molding resin to the information pattern forming surface of a stamper under atmospheric pressure, and then applies the molding resin under reduced pressure. This is characterized in that the replica substrate is pressure-bonded to the resin and the molding resin is expanded.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

In this figure, the same members as shown in FIGS. 2 and 3 are designated by the same reference numerals.

First, as shown in FIG. 1(a), a stamper 1 has an uneven pattern that is the reverse of the information pattern to be transferred to an information recording disk, and a replica substrate 3 made of a glass plate or a plastic plate. and are attached to the standbar holding member 11 and replica substrate holding member 12 of the vacuum chamber 10.

Next, as shown in FIG. 1(b), a photocurable molding resin 2 such as UV resin, which is still in a fluid state, is applied to the information pattern molding surface 1a of the stamper 1 under atmospheric pressure. In this case, the optimum amount of coating that can be spread over almost the entire surface of the stamper 1 and the replica substrate 3 and that does not protrude from the overlapping surface of the stamper 1 and the replica substrate 3 is determined in advance, and the amount of coating is determined in advance for each duplication process. Apply this optimum amount of molding resin to.

Next, as shown in FIG. 1(e), a transparent lid 10a is attached to the vacuum chamber 10, and the vacuum pump 13 is driven to reduce the pressure inside the vacuum chamber IO. In this case, the atmospheric pressure in the vacuum chamber 10 is adjusted to a value sufficient to evaporate air bubbles and volatile substances mixed into the molding resin, which will be described later.

In the second state, as shown in Section 111(d), Revli.

The force substrate 3 is pressed onto the molding resin 2, and the molding resin 2 is expanded from the center of the stamper 1 and the replica substrate 3 to the outer periphery.

After the stretching is completed and the replica substrate 3 is evenly pressed onto the molding resin 2, as shown in FIG. Curing light 5 is irradiated to cure the molding resin 2.

Finally, as shown in FIG. 1(f), the molding resin layer 2 is peeled off from the stamper 1, and the disk single plate 7 in which the molding resin layer 2 and the replica substrate 3 are integrated is taken out.

The information recording disc manufacturing method of the above embodiment is as follows.

Since the molding resin 2 was expanded in a vacuum,
Due to the fluidity of the applied molding resin 2, air bubbles caught in the molding resin during the process of spreading on the stand bar 1 can be completely defoamed during the spreading process.

Furthermore, entrainment of air bubbles during the stretching process can be completely prevented. In addition, for the same reason, volatile substances contained in the molding resin 2 are completely removed during the stretching process, so such substances do not volatilize from the molding resin after disk molding, and the information signal can increase the stability of Furthermore, unlike conventional methods for manufacturing information recording disks, there is no need to apply a longer molding resin than is required to remove air bubbles mixed in the molding resin, and the stamper 1 and replica substrate 3 are It is sufficient to apply an optimum amount of molding resin that can be spread over almost the entire surface and that does not protrude from the overlapping surface of the stamper 1 and the replica substrate 3. It does not protrude from the inner and outer peripheral edges of the replica substrate 3, and the wiping work that was conventionally considered indispensable can be omitted, and productivity can be increased accordingly.

Incidentally, in the above embodiment, a technique is employed in which the stamper 1 and the replica substrate 3 are attached in advance to the stamper holding member 11 and the replica substrate holding member 12 of the vacuum chamber 10, and the molding resin 2 is applied to the stamper 1 in this state. However, the gist of the present invention is not limited to this, and the molding resin 2 is applied at the stage when the stamper 1 is attached to the stamper holding member 11, and then the replica substrate 3 is attached to the replica substrate holding member 12. It is also possible to attach it to L'.

It is also possible to apply molding resin 2 to the stamper 1 before attaching it to the stamper holding member 11, and then attach the stamper 1 to the stamper holding member 11 and the replica substrate 3 to the replica substrate holding member 12. can.

[Results of invention]

As explained above, according to the present invention, the molding resin is stretched in a vacuum, so even if air bubbles are mixed in during the molding resin application process, they are completely defoamed during the stretching process. As a result, no air bubbles are mixed into the molding resin. Therefore, the yield of products can be improved. In addition, unlike conventional methods, air bubbles do not get mixed in without having to slow down the spreading speed of the molding resin, which speeds up the spreading process and eliminates the need to wipe off excess molding resin. Therefore, productivity can be improved accordingly.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing an example of a method for manufacturing an information recording disc according to the present invention, and FIG. 2 is an explanatory diagram showing an example of a conventional method for manufacturing an information recording disc. FIG. 3 is an explanatory diagram showing another example of the conventional information recording disc manufacturing method. 1. Nistampa, 2: Molding resin, 3: Replica board,
lO: Shinsin tank, 1 j, Nissampa holding member, 1
2: Replica board holding member, Figure 2(b)

Claims (3)

[Claims] (1) A photocurable molding resin, which is still in a fluid state, is applied to the information pattern forming surface of the stamper, on which unevenness is formed that is the reverse of the information pattern to be transferred to the information recording disk. Next, the replica substrate is pressure-bonded to this molding resin, and the molding resin is expanded. After the stretching is completed, the molding resin is applied from the outside of the replica substrate with the replica substrate uniformly crimped to the molding resin. In a method for manufacturing an information recording disk, the information recording disk is taken out by irradiating resin curing light to the molding resin and peeling off the molding resin integrated with the replica substrate from the stamper after the molding resin is cured.
Information characterized in that a photocurable molding resin is applied to the information pattern molding surface of the stamper under atmospheric pressure, and then a replica substrate is crimped onto the molding resin under reduced pressure to spread the molding resin. A method of manufacturing a recording disc. (2) In the method for manufacturing an information recording disk according to claim (1), the stamper and the replica substrate are stored in a vacuum chamber in advance, and after applying the molding resin, the stamper and the replica substrate are placed in the vacuum chamber. A method for manufacturing an information recording disk, characterized in that the molding resin is expanded by reducing the pressure. (3) In the method for manufacturing an information recording disk according to claim (1) above, a molding resin is applied to the information pattern molding surface of the stamper outside a vacuum chamber, and this molding resin is applied. A method for manufacturing an information recording disk, characterized in that a stamper and a replica substrate are housed in a vacuum chamber, and the pressure in the vacuum chamber is reduced to spread a molding resin.