JPS61210637A - Washing apparatus - Google Patents

Abstract

PURPOSE:To improve the washing effect by constructing a washing line through parallel provision of a wet washing apparatus and a dry washing apparatus using ozone. CONSTITUTION:An object to be washed on a tray 12 is sequentially conveyed in the direction of arrow P, and clean air A flows in the direction of arrow Q. Separately from the clean air A, clean air B is fed only into an electromagnetic wave irradiation type washing apparatus 6 so as to discharge the carbonic acid gas and water vapor, which are generated by oxidative destruction of the organic dusts deposited on the object to be washed 9 by ozone and oxygen radicals, to the out side of the apparatus 6. Then, the object to be washed 9 is dipped in a wet supersonic washing bath 3b, and a vibrator 3c is caused to vibrate to provide supersonic vibration to the water 3d in the bath 3b, thereby allowing the dusts to liberate from the surface of the object to be washed 9 from large ones to small ones.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a cleaning device suitable for removing dust caused by a mixture of organic and inorganic substances adhering to the surface of, for example, semiconductor components.

[Background of the invention]

Conventionally, as a cleaning device for semiconductor parts, etc., the
As disclosed in Japanese Patent No. 15939, there is a dry cleaning apparatus that uses ozone to remove photoresist attached to an object to be cleaned.

However, this cleaning device has the disadvantage that it has little cleaning effect on dust caused by a mixture of organic and inorganic substances, and cannot sufficiently remove organic dust whose surface is covered by inorganic dust.

In addition, a known wet ultrasonic cleaning device immerses the object to be cleaned in water in a cleaning tank, and a vibrator is installed in the cleaning tank.
By applying ultrasonic vibrations to the vibrator, it is attempted to liberate and remove dust adhering to the surface of the object to be cleaned, but it is only capable of removing large dust, mainly inorganic substances, and therefore, as mentioned above, It was difficult to remove dust due to the mixture of organic and inorganic substances.

[Purpose of the invention]

The present invention has been made to solve the above-mentioned drawbacks and problems.The present invention removes dust caused by a mixture of organic and inorganic substances through continuous processing, and provides an apparatus for inspecting the cleaning results, thereby improving the cleaning effect. The purpose is to provide a cleaning device with

[Summary of the invention]

The present invention is characterized in that one or more types of wet cleaning devices and an inspection unit are provided at the end of the wet cleaning device.

[Practice of the invention U]

FIG. 1 is a schematic plan view of the entire cleaning device of the present invention, a cleaning path for objects to be cleaned, and a flow path for cleaning air, and FIG. 2 is a plan view showing the internal configuration of the cleaning device shown in FIG. 1. It is a diagram.

As shown in FIG. 1, the cleaning device l of the present invention includes a loader 2
, wet ultrasonic cleaning device 3, showering device 4, scrubber device 5, electromagnetic wave irradiation type cleaning device 6, inspection unit 7,
The unloader 8 and the like are sequentially arranged in parallel to form a series of cleaning devices. The object to be cleaned 9 is placed on the tray 12 while being cleaned and inspected via the devices 2゜3.4, 5.6, and 7.8 constituting the cleaning device 1. It is processed. The objects 9 to be cleaned on the tray 12 are sequentially conveyed by a conveying device in the direction of arrow P in FIG. The clean air A is supplied to the tray 1 in the movement directions P and 2 of the object 9 to be cleaned.
Each device 8
, 7, 5, 4° 3.2 to prevent dust from adhering to the object 9 to be cleaned. Therefore, for example, dust generated in the showering device 4 will not be carried into the next step, the scrubber device 5. In addition, the clean air A gradually becomes contaminated as it passes through the cleaning device l;
As described above, since the object 9 on the tray 12 is flown in the opposite direction to the moving direction of the object 9 on the tray 12, the object 9 on the tray 12 is moved in the direction of movement of the object 9 on the tray 12. It is always in contact with fresh air on the exit side from 8, and even when the clean air A is flowed in the same direction as the cleaning process route of the object 9 to be cleaned, it is configured to be less likely to be contaminated.

Note that the clean air A is not diverted to the electromagnetic wave irradiation type cleaning device 6, but is separately provided exclusively for the electromagnetic wave irradiation type cleaning device 6.
Clean air B is sent in, and as a result of organic dust adhering to the object to be cleaned 9 on the tray 12 being oxidized and decomposed by ozone and oxygen radicals, the carbon dioxide and water vapor generated are immediately irradiated with electromagnetic waves. The dust is discharged outside the cleaning device 6 to prevent the dust from being sent to the next process.

Instead of clean air B, oxygen gas may be fed into the electromagnetic wave irradiation type cleaning device 6, which acts to promote the generation of ozone in the device 6.

Since each device 2, 3, 4, 5, 6, 7°8 in the cleaning device 1 is arranged in a U-shape as shown in Fig. 1, the When considered, the longitudinal dimension can be reduced by approximately 1/2. In addition, the driving devices and piping parts of each device 2, 3, 4, 5, 6° 7.8 are not arranged in the middle part or the outer periphery of each of the above devices, but are centrally arranged in the center R of the U-shape. Therefore, it is easy to monitor and inspect the condition of the object 9 to be cleaned, and to handle accidents from the outer circumferential side of the cleaning device 1 without being obstructed by the drive device and piping section. , and the rotating arm l
It is possible to secure the necessary space for 5a and 5h in the middle of the rotation range of 1.

The object to be cleaned 9 is placed on a tray 12 on a disk as shown in FIG.
It is sent into the cleaning device 1 while being placed on top of the cleaning device.

The trays 12 carrying the objects 9 to be cleaned are stacked in multiple stages on a rack 13 and sent to the loader 2, as shown in FIG. The objects 9 to be cleaned on the tray 12 are sequentially placed on the conveyor 26 via the lifting table 2a of the rotor 2.
It is sent to the wet ultrasonic cleaning device 3.

The object 9 to be cleaned on the tray 12 is immersed in the water of the wet ultrasonic cleaning tank 3b by the pallet 3a from the transport comparer 2b. The position of the pallet 3a in FIG. 4 indicates the position when the object 9 on the tray 12 is not immersed in the water of the wet ultrasonic cleaning tank 3b. A vibrator 3C is provided at the bottom of the cleaning tank 3b, and by vibrating the vibrator 3C and applying ultrasonic vibration to the water 3d in the cleaning tank 3b, dust on the surface of the object 9 to be cleaned is removed. is given vibrational energy. Since the thicker the dust, the more vibration energy is applied to it, the larger belly drum cleaning device 3 can mainly remove inorganic dust. By removing the inorganic dust, the organic dust that has been covered by the inorganic dust can be exposed on the surface of the object 9 to be cleaned.

The water 3d in the wet ultrasonic cleaning tank 3b is guided to the cleaning tank 14 by overflowing the water 70, and is circulated from the tank 14 through the filter 16 by the pump 15 so that it is re-supplied to the cleaning tank 3b. .

Dust released in the water is filtered and removed by the filter 16.

When the cleaning in the wet ultrasonic cleaning tank 3b is completed, the pallet 3a is pulled up, and the tray 12 carrying the objects 9 to be cleaned is placed on the showering conveyor 4a to be sent to the showering device 4.

The items 9 to be cleaned on the tray 12 are transferred to the showering conveyor 4.
When moving on the wet ultrasonic cleaning tank 3b, any dust attached in the wet ultrasonic cleaning tank 3b is removed by sprinkling water from the water nozzle 4b arranged above the showering conveyor 4a.

In FIGS. 5 and 6, the tray 12 on which the objects to be cleaned 9 are placed is connected to the showering conveyor 4a and the slider 4C.
is sent to the scrubber device 5 by. The scrubber device 5 has a table 5a in the center, and at the same time, the brush scrubber 5 injects pure water from the rinse nozzle 5d onto the object 9 to be cleaned on the tray 12 placed on the table 5a.
b scrubs the object 9 to be cleaned, removing organic and inorganic dust stuck to its surface. The large dust that had adhered to the object to be cleaned 9 on the tray 12 by the wet ultrasonic cleaning device 3 shown in FIG. Since small inorganic dust particles are easily peeled off after passing through the showering device shown in FIG. 5, the brushing effect of the brush scrubber 5 is increased. Continuing] By jetting water from the jet scooter 7 and the bar 5C disposed above the table 5a, the peeled organic and inorganic dust is removed from the surface of the object to be cleaned 90. Further, the object to be cleaned 9 and the tray 12 are dried by spraying pure water from the rinse nozzle 5d, rotating the table 5a at high speed, and spraying N2 gas from the blow nozzle. Table 5a includes l-ray 1 shown in FIG.
A vacuum hole 12a corresponding to the vacuum hole 12a of No. 2 is similarly provided, and by depressurizing the vacuum hole 12a from this hole 12a using a vacuum pump (not shown), the object 9 to be cleaned is removed from the table together with the tray 12. It is fixed relative to 5a.

After the cleaning in the scrubber device 5 is completed, the suction state is released by returning from the above-mentioned reduced pressure state to normal pressure, and the tray 12 on which the object to be cleaned 9 is placed is transferred to the next conveyor 17 by the slider 4c. It will be done.

In FIGS. 6 and 7, the object to be cleaned 9 on the tray 12
is carried by the conveyor 17 to the position of the rotating arm 11, and then placed on the rotating arm 11, and as the rotating arm 11 rotates, the object to be cleaned 9 on the tray 12 is cleaned by electromagnetic wave irradiation. It is sent to the front chamber 6a of the device 6. Shutters 6b and 6c are provided at the entrance and exit of the front chamber 6a.

The shutter 6bI6C is configured to open only when the tray 12 on which the object 9 to be cleaned is placed passes. front g6a
is provided to prevent ozone and oxygen radicals generated in the main house 6d from flowing into the scrubber device 5.

The rotating arm 11 further rotates to place the object 9 on the tray 12 onto the table 6e in the main house 6d. Several mercury lamps 6f and a plurality of infrared lamps 6g are provided above the table 6C. mercury lamp 6
When power is applied to f, the air inside the main house 6d is decomposed into ozone and oxygen radicals by the action of ultraviolet rays emitted from the mercury lamp 6f, which acts on the organic matter attached in a thin film form to the surface of the object to be cleaned 90 on the tray 12. , decomposes organic matter into carbon dioxide gas and water vapor. As mentioned above, it is exposed to the surfaces of the wet ultrasonic cleaning device 7-#3, the showering device 4, the scrubber device 5, and the purified object 9, so that the oxidative decomposition effect can be effectively performed. The wavelength of the ultraviolet light emitted from the mercury lamp 6f is effectively 184.9 nm or 253.7 nm. Further, by energizing the mercury lamp 6f and the infrared lamp 6g, oxidative decomposition of organic matter on the surface of the object 9 to be cleaned on the tray 12 is promoted.

Since infrared rays have the effect of exciting molecules of organic matter and evaporating moisture remaining on the surface, it can also serve to dry the object to be cleaned 9 and the tray 12. After organic dust has been removed from the object 9 on the tray 12, the object 9 to be cleaned is sent from the main house 6d to the rear chamber 6h by the rotation of the rotating arm 18. Note that the table 6e is provided to be vertically movable and rotatable, and has a configuration convenient for selecting the optimum position for transportation by the rotation arms 11 and 18 and for ultraviolet irradiation by the mercury lamp 6f. .

Shutters 6i and 6j are provided at the entrance and exit of the rear chamber 6h, and the shutters 5i and 6j are opened only when the tray 12 carrying the object 9 to be cleaned passes through. This rear chamber 6h is provided to prevent ozone and oxygen radicals generated in the main house 6d from flowing out to the inspection unit 7.

As the rotating arm 18 shown in FIG. 7 further rotates, the object 9 on the tray 12 is transferred onto the conveyor 7a in the inspection unit 7, and then from the conveyor 7a to the table as shown in FIG. 7b.

The table 7b is attached to a support base 7g so as to be vertically movable and rotatable. In addition, the support stand 7g includes a table 7b.
On a table 7b on which a microscope 7C and a camera 7d are arranged above, the surface of the object 9 to be cleaned placed on the tray 12 is observed with the microscope @ 7c, and further photographed with the camera 7d. Display 7e the condition of the surface.
It is now possible to display the information on the screen as well as view the displayed content.

Figure 9 shows the support stand 7 seen in the direction of arrow F in Figure 8.
In the inspection unit 7, when it becomes necessary to observe and examine the surface of the object 9 to be cleaned in detail, the table 7b is manually raised and the object 9 to be cleaned is placed on the table 7b. The loaded tray 12 is removed from the conveyors 7f and 7a, and the tray 12 is removed from the support stand 7g along with the XY table 7h, table 7b, microscope 7c, and camera 7d provided on the support stand 7g.
is moved in the direction of arrow M to perform a more detailed inspection in another space outside the inspection line within the inspection unit z.

Next, from the inspection unit 7, the tray 12 on which the object to be cleaned 9 is placed is sent to the unloader 8 by the conveyor 7f, and is loaded onto the rack 13.

The clean air A is configured to be distributed vertically from above to below the object to be cleaned 9 on the tray 12.
, 3, 4, 5, 7.8 does not contaminate the object to be cleaned 9 on the tray 2, and the clean air A is individually supplied to each device 2, 3, 4, 5, 7.8. It is configured to flow through the entire cleaning device 1 more efficiently than the system in which the water is sent to 7.8.

In this embodiment, as shown in FIG. 8, a fan 19 for feeding is provided on the unloader 8 side of the cleaning device 1, and
As shown in FIG. 4, a discharge fan 20 is provided on the loader 2 side.

〔Effect of the invention〕

As mentioned above, wet cleaning equipment and dry cleaning equipment are installed side by side,
By performing continuous cleaning processing while the items to be cleaned are placed on the transport tray, dust caused by a mixture of organic and inorganic substances can be efficiently cleaned, and an inspection can be automatically performed at the end of the cleaning line. Accordingly, a highly reliable cleaning effect can be obtained for cleaning objects to be cleaned, especially semiconductor parts and the like.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an overview of the entire cleaning apparatus of the present invention, the cleaning route for objects to be cleaned, and the flow path of clean nitrogen gas, and FIG. 2 is a diagram showing each device in the cleaning apparatus shown in FIG. floor plan,
FIG. 3 is a perspective view of the cleaning device conveyance tray, FIG. 4 is a side view showing the arrangement of the loader, wet ultrasonic cleaning device, and showering device, and FIG. 5 is a side view showing the arrangement of the showering conveyor and slider. , Fig. 6 is a side view showing the arrangement inside the scrubber device, Fig. 7 is a side view showing the arrangement of the electromagnetic wave irradiation type cleaning device and the rotating arm, and Fig. 8 is a side view showing the arrangement of the inspection unit and the unloader. , FIG. 9 is a side view of the support base. DESCRIPTION OF SYMBOLS 1... Cleaning device, 2... Loader, 3... Wet ultrasonic cleaning device, 4... Showering device, 5... Scrubber device, 6... Electromagnetic wave irradiation type cleaning device, 7. ...Inspection unit, 8...Unloader, 9...Object to be cleaned,
12...tray.

Claims (1)

[Claims] 1. Removing dust attached to an object to be cleaned using a liquid 1.
Cleaning can be achieved by installing multiple types of wet cleaning equipment and a dry cleaning equipment that removes dust attached to objects to be cleaned using ozone under heating, and by incorporating means for transporting objects to be cleaned for each of the cleaning devices. configure the line,
A cleaning device comprising an inspection unit for inspecting the cleaning result of the object to be cleaned at an end of the cleaning line. 2. Claim 1, characterized in that the inspection unit is one in which the support stand is moved outside the cleaning line so that detailed inspection can be carried out outside the cleaning line. The cleaning device described.