JPS61207035U - - Google Patents

Info

Publication number
JPS61207035U
JPS61207035U JP9236085U JP9236085U JPS61207035U JP S61207035 U JPS61207035 U JP S61207035U JP 9236085 U JP9236085 U JP 9236085U JP 9236085 U JP9236085 U JP 9236085U JP S61207035 U JPS61207035 U JP S61207035U
Authority
JP
Japan
Prior art keywords
wafer
wafer mounting
vacuum
pin
pins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9236085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9236085U priority Critical patent/JPS61207035U/ja
Publication of JPS61207035U publication Critical patent/JPS61207035U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP9236085U 1985-06-17 1985-06-17 Pending JPS61207035U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9236085U JPS61207035U (es) 1985-06-17 1985-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9236085U JPS61207035U (es) 1985-06-17 1985-06-17

Publications (1)

Publication Number Publication Date
JPS61207035U true JPS61207035U (es) 1986-12-27

Family

ID=30649088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9236085U Pending JPS61207035U (es) 1985-06-17 1985-06-17

Country Status (1)

Country Link
JP (1) JPS61207035U (es)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142829A (ja) * 1986-12-05 1988-06-15 Nippon Telegr & Teleph Corp <Ntt> 基板吸着固定装置
JPS63244643A (ja) * 1987-03-30 1988-10-12 Tokyo Electron Ltd プローブ装置
JPS63308336A (ja) * 1987-06-10 1988-12-15 Tokyo Electron Ltd 載置体機構
JPS6424440A (en) * 1987-07-21 1989-01-26 Canon Kk Device for transferring and positioning flat-platelike object
WO2003075343A1 (en) * 2002-03-05 2003-09-12 Sharp Kabushiki Kaisha Method for holding substrate in vacuum, method for manufacturing liquid crystal display device, and device for holding substrate
JP2006294793A (ja) * 2005-04-08 2006-10-26 Canon Inc ステージ装置および露光装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142829A (ja) * 1986-12-05 1988-06-15 Nippon Telegr & Teleph Corp <Ntt> 基板吸着固定装置
JPS63244643A (ja) * 1987-03-30 1988-10-12 Tokyo Electron Ltd プローブ装置
JPS63308336A (ja) * 1987-06-10 1988-12-15 Tokyo Electron Ltd 載置体機構
JPS6424440A (en) * 1987-07-21 1989-01-26 Canon Kk Device for transferring and positioning flat-platelike object
WO2003075343A1 (en) * 2002-03-05 2003-09-12 Sharp Kabushiki Kaisha Method for holding substrate in vacuum, method for manufacturing liquid crystal display device, and device for holding substrate
JP2006294793A (ja) * 2005-04-08 2006-10-26 Canon Inc ステージ装置および露光装置
JP4673117B2 (ja) * 2005-04-08 2011-04-20 キヤノン株式会社 ステージ装置および露光装置

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