JPS61205049U - - Google Patents
Info
- Publication number
- JPS61205049U JPS61205049U JP8933085U JP8933085U JPS61205049U JP S61205049 U JPS61205049 U JP S61205049U JP 8933085 U JP8933085 U JP 8933085U JP 8933085 U JP8933085 U JP 8933085U JP S61205049 U JPS61205049 U JP S61205049U
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- base
- sensor
- diaphragm portion
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000008188 pellet Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8933085U JPS61205049U (no) | 1985-06-13 | 1985-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8933085U JPS61205049U (no) | 1985-06-13 | 1985-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61205049U true JPS61205049U (no) | 1986-12-24 |
Family
ID=30643301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8933085U Pending JPS61205049U (no) | 1985-06-13 | 1985-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61205049U (no) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
| JPS54144187A (en) * | 1978-04-29 | 1979-11-10 | Hitachi Ltd | Semiconductor pressure converter |
| JPS5821131A (ja) * | 1981-07-29 | 1983-02-07 | Toshiba Corp | 半導体圧力センサ |
-
1985
- 1985-06-13 JP JP8933085U patent/JPS61205049U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
| JPS54144187A (en) * | 1978-04-29 | 1979-11-10 | Hitachi Ltd | Semiconductor pressure converter |
| JPS5821131A (ja) * | 1981-07-29 | 1983-02-07 | Toshiba Corp | 半導体圧力センサ |