JPS61202468U - - Google Patents
Info
- Publication number
- JPS61202468U JPS61202468U JP8457085U JP8457085U JPS61202468U JP S61202468 U JPS61202468 U JP S61202468U JP 8457085 U JP8457085 U JP 8457085U JP 8457085 U JP8457085 U JP 8457085U JP S61202468 U JPS61202468 U JP S61202468U
- Authority
- JP
- Japan
- Prior art keywords
- bubbler
- liquid
- temperature
- heat medium
- conveyance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 230000008016 vaporization Effects 0.000 claims description 4
- 238000009834 vaporization Methods 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8457085U JPS61202468U (it) | 1985-06-06 | 1985-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8457085U JPS61202468U (it) | 1985-06-06 | 1985-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202468U true JPS61202468U (it) | 1986-12-19 |
Family
ID=30634199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8457085U Pending JPS61202468U (it) | 1985-06-06 | 1985-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202468U (it) |
-
1985
- 1985-06-06 JP JP8457085U patent/JPS61202468U/ja active Pending
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