JPS61123532U - - Google Patents
Info
- Publication number
- JPS61123532U JPS61123532U JP787685U JP787685U JPS61123532U JP S61123532 U JPS61123532 U JP S61123532U JP 787685 U JP787685 U JP 787685U JP 787685 U JP787685 U JP 787685U JP S61123532 U JPS61123532 U JP S61123532U
- Authority
- JP
- Japan
- Prior art keywords
- vaporization
- vaporization chamber
- main body
- coupled
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008016 vaporization Effects 0.000 claims description 7
- 238000009834 vaporization Methods 0.000 claims description 7
- 239000006200 vaporizer Substances 0.000 claims description 4
- 238000010790 dilution Methods 0.000 claims description 3
- 239000012895 dilution Substances 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787685U JPS61123532U (it) | 1985-01-22 | 1985-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787685U JPS61123532U (it) | 1985-01-22 | 1985-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123532U true JPS61123532U (it) | 1986-08-04 |
Family
ID=30486634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP787685U Pending JPS61123532U (it) | 1985-01-22 | 1985-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123532U (it) |
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1985
- 1985-01-22 JP JP787685U patent/JPS61123532U/ja active Pending