JPS6413722U - - Google Patents
Info
- Publication number
- JPS6413722U JPS6413722U JP11015187U JP11015187U JPS6413722U JP S6413722 U JPS6413722 U JP S6413722U JP 11015187 U JP11015187 U JP 11015187U JP 11015187 U JP11015187 U JP 11015187U JP S6413722 U JPS6413722 U JP S6413722U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- concentration detector
- gas concentration
- supply line
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11015187U JPS6413722U (it) | 1987-07-17 | 1987-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11015187U JPS6413722U (it) | 1987-07-17 | 1987-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413722U true JPS6413722U (it) | 1989-01-24 |
Family
ID=31347044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11015187U Pending JPS6413722U (it) | 1987-07-17 | 1987-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413722U (it) |
-
1987
- 1987-07-17 JP JP11015187U patent/JPS6413722U/ja active Pending