JPS6120137B2 - - Google Patents

Info

Publication number
JPS6120137B2
JPS6120137B2 JP60019685A JP1968585A JPS6120137B2 JP S6120137 B2 JPS6120137 B2 JP S6120137B2 JP 60019685 A JP60019685 A JP 60019685A JP 1968585 A JP1968585 A JP 1968585A JP S6120137 B2 JPS6120137 B2 JP S6120137B2
Authority
JP
Japan
Prior art keywords
bonding
chip
tool
semiconductor integrated
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60019685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS611032A (ja
Inventor
Katsuyuki Kawase
Juji Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Kaijo Denki Co Ltd
Original Assignee
Kaijo Denki Co Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Denki Co Ltd, Nippon Electric Co Ltd filed Critical Kaijo Denki Co Ltd
Priority to JP60019685A priority Critical patent/JPS611032A/ja
Publication of JPS611032A publication Critical patent/JPS611032A/ja
Publication of JPS6120137B2 publication Critical patent/JPS6120137B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W72/07141—

Landscapes

  • Wire Bonding (AREA)
JP60019685A 1985-02-04 1985-02-04 ボンデイング装置 Granted JPS611032A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60019685A JPS611032A (ja) 1985-02-04 1985-02-04 ボンデイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60019685A JPS611032A (ja) 1985-02-04 1985-02-04 ボンデイング装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP12673676A Division JPS5351968A (en) 1976-10-21 1976-10-21 Bonding unit

Publications (2)

Publication Number Publication Date
JPS611032A JPS611032A (ja) 1986-01-07
JPS6120137B2 true JPS6120137B2 (member.php) 1986-05-21

Family

ID=12006088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60019685A Granted JPS611032A (ja) 1985-02-04 1985-02-04 ボンデイング装置

Country Status (1)

Country Link
JP (1) JPS611032A (member.php)

Also Published As

Publication number Publication date
JPS611032A (ja) 1986-01-07

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