JPS6119922B2 - - Google Patents

Info

Publication number
JPS6119922B2
JPS6119922B2 JP1120682A JP1120682A JPS6119922B2 JP S6119922 B2 JPS6119922 B2 JP S6119922B2 JP 1120682 A JP1120682 A JP 1120682A JP 1120682 A JP1120682 A JP 1120682A JP S6119922 B2 JPS6119922 B2 JP S6119922B2
Authority
JP
Japan
Prior art keywords
light source
light
image
lens
lens group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1120682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57168215A (en
Inventor
Mutsuhiko Matsura
Fumi Hayashida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP1120682A priority Critical patent/JPS57168215A/ja
Publication of JPS57168215A publication Critical patent/JPS57168215A/ja
Publication of JPS6119922B2 publication Critical patent/JPS6119922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G01C3/08—Use of electric radiation detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
JP1120682A 1982-01-27 1982-01-27 Optical system having constant magnification and variable image position Granted JPS57168215A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1120682A JPS57168215A (en) 1982-01-27 1982-01-27 Optical system having constant magnification and variable image position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1120682A JPS57168215A (en) 1982-01-27 1982-01-27 Optical system having constant magnification and variable image position

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP1347075A Division JPS5814602B2 (ja) 1975-02-03 1975-02-03 ケイジヨウソクテイソウチヨウコウガクケイ

Publications (2)

Publication Number Publication Date
JPS57168215A JPS57168215A (en) 1982-10-16
JPS6119922B2 true JPS6119922B2 (OSRAM) 1986-05-20

Family

ID=11771534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1120682A Granted JPS57168215A (en) 1982-01-27 1982-01-27 Optical system having constant magnification and variable image position

Country Status (1)

Country Link
JP (1) JPS57168215A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0652170B2 (ja) * 1986-02-25 1994-07-06 株式会社オカダ 光結像式非接触位置測定装置

Also Published As

Publication number Publication date
JPS57168215A (en) 1982-10-16

Similar Documents

Publication Publication Date Title
US6577405B2 (en) Phase profilometry system with telecentric projector
EP1571414B1 (en) Apparatus and method for surface contour measurement
US6233043B1 (en) Position detection technique applied to proximity exposure
US6741082B2 (en) Distance information obtaining apparatus and distance information obtaining method
US20020051128A1 (en) Distance measuring apparatus and distance measuring method
US4748333A (en) Surface displacement sensor with opening angle control
US4829193A (en) Projection optical apparatus with focusing and alignment of reticle and wafer marks
KR880008043A (ko) 비접촉 자동 초점위치 맞춤방법 및 장치.
JPH0743110A (ja) 二段検出式非接触位置決め装置
US6396589B1 (en) Apparatus and method for measuring three-dimensional shape of object
JPH10339616A (ja) 物体形状の非接触測定装置および方法
JPS6119922B2 (OSRAM)
US4831272A (en) Apparatus for aligning a reticle mark and substrate mark
EP1202074B1 (en) Distance measuring apparatus and distance measuring method
JPH10267624A (ja) 三次元形状測定装置
JPS5814602B2 (ja) ケイジヨウソクテイソウチヨウコウガクケイ
JPH07332954A (ja) 変位傾斜測定方法および装置
JPH07311117A (ja) 多眼レンズ位置測定装置
JP2003161610A (ja) 光学式測定装置
RU2156434C2 (ru) Оптико-электронный преобразователь для бесконтактного измерения линейного перемещения и (или) диаметра
JP2672771B2 (ja) 貫通孔の内径測定装置
JPH0552517A (ja) スペツクル変位計
JP2546317B2 (ja) 位置合わせ装置
JPH01304339A (ja) 屈折角測定装置
JP3101582B2 (ja) 斜光軸光学系を用いた位置検出装置及び方法