JPS61199040U - - Google Patents
Info
- Publication number
- JPS61199040U JPS61199040U JP8091285U JP8091285U JPS61199040U JP S61199040 U JPS61199040 U JP S61199040U JP 8091285 U JP8091285 U JP 8091285U JP 8091285 U JP8091285 U JP 8091285U JP S61199040 U JPS61199040 U JP S61199040U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- laser light
- laser beam
- light source
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 238000001259 photo etching Methods 0.000 claims 3
- 238000005530 etching Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 230000001443 photoexcitation Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8091285U JPS61199040U (enrdf_load_stackoverflow) | 1985-05-31 | 1985-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8091285U JPS61199040U (enrdf_load_stackoverflow) | 1985-05-31 | 1985-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199040U true JPS61199040U (enrdf_load_stackoverflow) | 1986-12-12 |
Family
ID=30627207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8091285U Pending JPS61199040U (enrdf_load_stackoverflow) | 1985-05-31 | 1985-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199040U (enrdf_load_stackoverflow) |
-
1985
- 1985-05-31 JP JP8091285U patent/JPS61199040U/ja active Pending
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