JPS61197102A - Manufacture of object having fine groove - Google Patents

Manufacture of object having fine groove

Info

Publication number
JPS61197102A
JPS61197102A JP3749585A JP3749585A JPS61197102A JP S61197102 A JPS61197102 A JP S61197102A JP 3749585 A JP3749585 A JP 3749585A JP 3749585 A JP3749585 A JP 3749585A JP S61197102 A JPS61197102 A JP S61197102A
Authority
JP
Japan
Prior art keywords
disc
fine grooves
tool
cutting tool
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3749585A
Other languages
Japanese (ja)
Other versions
JP2935234B2 (en
Inventor
Katsunobu Ueda
上田　勝宣
Mitsuo Sumiya
住谷　充夫
Hiroshi Amano
啓 天野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12499105&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS61197102(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60037495A priority Critical patent/JP2935234B2/en
Publication of JPS61197102A publication Critical patent/JPS61197102A/en
Application granted granted Critical
Publication of JP2935234B2 publication Critical patent/JP2935234B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Turning (AREA)

Abstract

PURPOSE:To provide a plurality of concentric fine grooves to be engraved, by using a diamond cutting tool, while it is rotated around the rotating axial line crossing at a right angle with a machined surface, to cut the machined surface. CONSTITUTION:A disc 1, whose one front 2 is polished, is coaxially secured to a chuck of a CNC lathe, and the disc 1, rotating its main spindle in the direction of an arrow head 3 in the drawing, is engraved by a diamond cutting tool 4 by face milling. The tool 4 diagonally cuts in the direction of an arrow head 6 the front 2 of the disc 1 rotated at a high speed, and the direction of the arrow head 6 crosses with a rotating axial line 7 of the disc 1. And the tool 4, after it is fed to a predetermined groove width W, is moved in the direction of an arrow head 8 in the drawing departing from the disc 1, here a feed distance is set to a predetermined value per one rotating of the disc 1. In this way, circular fine grooves 9 of groove depth D with the section being a right- angled isosceles triangle are formed, subsequently, the tool 4, repeatedly being moved along a moving locus 10, concentrically engraves the fine grooves 9....

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、例えば深さ１〜２μｍの同心円状微細溝を有
する物体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for manufacturing an object having concentric fine grooves, for example, 1 to 2 μm deep.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来において、深さ１〜２μｍの微細溝を刻設するには
、（１）フォトリソグラフィー法、（Ｉ）電子ビームに
よる直接描画する方法、（■１）ななめイオン加工法、
・Ｖ）ルーリングエンジンに取付けられたダイヤモンド
バイトによる方法、などが用いられている。Conventionally, in order to carve fine grooves with a depth of 1 to 2 μm, the following methods have been used: (1) photolithography method, (I) direct writing method using an electron beam, (■1) diagonal ion processing method,
・V) A method using a diamond bit attached to a ruling engine is used.

しかしながら、上記（１）　、　（１）　、　（１１０
の方法は、現在研究段階にあシ、実用上多くの問題をも
っている。However, the above (1), (1), (110
This method is currently in the research stage and has many practical problems.

他方、ルーリングエンジンを用いる方法は、ダイヤモン
ドバイトのバニシングによシ溝形成を行うものである。On the other hand, in the method using a ruling engine, grooves are formed by burnishing with a diamond cutting tool.

よって、第６図に示すように、溝（６）・・・のピッチ
０と深さ０との比騨は、０．１〜０．２が限界とされて
いる。よって、従来においてはピッチ［Ｆ］に比べて浅
い溝に）・・・しか形成することができない。しかも、
ルーリングエンジンによる加工では、直線状の溝しか刻
設することができず、円形の微細溝の加工は不可能であ
る難点をもっている。Therefore, as shown in FIG. 6, the ratio between pitch 0 and depth 0 of the grooves (6) is limited to 0.1 to 0.2. Therefore, conventionally, it is only possible to form grooves that are shallower than the pitch [F]. Moreover,
Machining using a ruling engine has the disadvantage that only linear grooves can be carved, and circular micro-grooves cannot be formed.

〔発明の目的〕[Purpose of the invention]

本発明は、上記実施例を勘案してなされたもので、同心
円状の微細溝を有する物体の製造方法を提供することを
目的とする。The present invention has been made in consideration of the above embodiments, and an object of the present invention is to provide a method for manufacturing an object having concentric fine grooves.

〔発明の概要〕[Summary of the invention]

物体をその被加工面に直交する回転軸線のまわりに回転
させながら、ダイヤモンド切削工具を被加工面に切込ま
せて、深さ５μｍ以下の微細溝を５００μｍ以下のピッ
チで同心的に複数本刻設させたものである。While rotating the object around the axis of rotation perpendicular to the surface to be machined, a diamond cutting tool is cut into the surface to be machined, thereby cutting multiple fine grooves with a depth of 5 μm or less concentrically at a pitch of 500 μm or less. It was set up.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を図面を参照して詳述する。 Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

まず、第１図に示すような円柱をなす円盤（１）を例え
ば鋼索材を旋削加工により形成する。ついで円盤（１）
の一方の正面（２）をラッピング及びボリシングにより
表面あらさが最大高さＲｍａｘＯ１０１μｍとなるよう
に研磨加工する。ついで、この円盤（１）を分解能０．
１μｍを有するＣ　Ｎ　Ｃ（Ｃｏｔｎｐｕｔｅｒ　Ｎｕ
ｍｅｒｉｃａｌ（：ｏｎｔｒｏｌ　）旋盤のチャック（
図示せず）に同軸に固着させる。ついで、チャックが連
結している主軸（図示せず）を矢印（３）方向に毎分１
０００回転で回転させ、第２図に示すようなダイヤモン
ド切削工具（４）Ｋよう正面削ｊ７　（８ｕｒｆａｃｉ
ｎｇ）によシ刻設する。すなわち、切削工具（４）は、
刃先角εがお度に設定されている。また、すくい面（５
）に直交する面と二つの逃げ面とがなす逃げ角αは、４
．５度に設定されている。さらに、この切削工具（４）
のノーズ半径は０．１μｍ以下に設定されている。そし
て、切削工具（４）を、切削点における回軸軌跡の接線
方向がすくい面（５）と直交するように調整する。つい
で第３図に示すように、高速回転している円盤（１）の
主面（２ンに対して矢印（６）方向に斜めに切削工具（
４）を切込ます。この矢印（６）方向は１円盤（１）の
回転軸線（７）と交差するように設定されている。そし
て、所定の溝幅（Ｗ）（例えば１．６μｍ）送ったのち
、円盤（１）から離間する矢印（８）方向（回転軸線（
７）と平行）に切削工具（４）を動かす。このときの送
シ量は、円盤（１）の１回転につき例えば０．５μｍに
設定する。かくして、断面が２等辺直角三角形をなし溝
深さＤが１．６μｍの円形微細溝（９）が形成される。First, a cylindrical disk (1) as shown in FIG. 1 is formed by turning a steel cable material, for example. Then the disk (1)
The front surface (2) of one side is polished by lapping and boring so that the surface roughness becomes a maximum height RmaxO of 101 μm. Next, this disk (1) is set to a resolution of 0.
C N C (Cotnputer Nu
merical (:ontrol) lathe chuck (
(not shown) coaxially. Then, the main shaft (not shown) to which the chuck is connected is rotated at 1 minute per minute in the direction of arrow (3).
Rotate at 000 rpm and cut the face with a diamond cutting tool (4)K as shown in Figure 2.
ng). That is, the cutting tool (4) is
The cutting edge angle ε is set in degrees. Also, the rake face (5
) is orthogonal to the plane and the two flanks. The clearance angle α is 4.
．． It is set at 5 degrees. Furthermore, this cutting tool (4)
The nose radius of is set to 0.1 μm or less. Then, the cutting tool (4) is adjusted so that the tangential direction of the rotation locus at the cutting point is perpendicular to the rake face (5). Next, as shown in Fig. 3, a cutting tool (
4) Cut. The direction of this arrow (6) is set to intersect the rotational axis (7) of one disk (1). After feeding a predetermined groove width (W) (for example, 1.6 μm), the groove is moved away from the disk (1) in the direction of the arrow (8) (rotation axis (
Move the cutting tool (4) parallel to 7). The amount of feed at this time is set to, for example, 0.5 μm per rotation of the disk (1). In this way, a circular fine groove (9) having an isosceles right triangle cross section and a groove depth D of 1.6 μm is formed.

ついで、前と同様にして移動軌跡（ｉｔ）Ｋ沿って切削
工具（４）を繰返し動かし、微細溝（９）・・・を同心
的に、かつ、相互に隣接させて刻設する。その結果、回
転軸線（７）を含む断面形状が鋸歯状の微細溝（９）・
・・が形成される。Then, in the same manner as before, the cutting tool (4) is repeatedly moved along the movement trajectory (it) K to form fine grooves (9) concentrically and adjacent to each other. As a result, a fine groove (9) with a serrated cross-sectional shape including the rotation axis (7) is formed.
... is formed.

このように、この実施例においては、切れ刃をｏ、ｏｏ
ｉμｍオーダ程度にまで非常に鋭利に研磨することので
きるダイヤモンド切削工具（４）により切削加工するよ
うＫしているので、同心状かつ隣接した円形微細溝（９
）・・・の高精度加工が可能となる。また、ダイヤモン
ド切削工具（４）は、円盤（１）の材質である銅に対し
て切シくずを生じにくいことも加工精度の向上に寄与し
ている。さらに、ルーリングエンジンを用いた場合のバ
ニシング仕上げ（Ｂｕｒｎｉｓｈｉｎｇ　）と異なシ、
この実施例によれば溝深さと溝幅との比耽Ｗが大きな微
細溝の形成が可能となる。よって、この実施例によれば
、所望形状の鋸歯状円形微細溝が刻設された物体を得る
ことができる。In this way, in this embodiment, the cutting edges are o, oo
Since the cutting process is performed using a diamond cutting tool (4) that can be sharpened very sharply to the order of iμm, concentric and adjacent circular fine grooves (9
)... becomes possible with high precision machining. Furthermore, the fact that the diamond cutting tool (4) is less likely to produce chips on copper, which is the material of the disc (1), also contributes to improved machining accuracy. Furthermore, there are different types of burnishing when using a ruling engine.
According to this embodiment, it is possible to form fine grooves with a large ratio W between groove depth and groove width. Therefore, according to this embodiment, it is possible to obtain an object in which serrated circular fine grooves of a desired shape are carved.

なお、上記実施例に限ることなく、第４図に示すように
、一本の溝（９）を刻設する際に、円盤（１）の回転軸
線（７）Ｋ平行な方向ａ１１にのみ切削工具（５）を往
復動させ、主切れ刃αのによシ微細溝（９）の傾斜面ａ
３を創成するようにしてもよい。そして、一本の溝（９
）の形成が終了すると、１ピツチずつ主面（２）の径方
向（矢印α４方向）に動かし、１ピツチごとに間欠的に
矢印αυ方向に切削工具（５）を往復動させて、溝（９
）・・・を形成させる。この方法によれば、傾斜面０の
表面あらさを上記実施例よシも向上させることができる
利点をもっている。さらにまた、上記実施例の微細溝（
９）・・・の断面形状は、鋸歯状であるが、第５図に示
すようＫＶ字状溝α９・・・の形成にも本発明を適用で
きる。さらに、微細溝を有する物体の材質としては、銅
に限ることなく、鋼、アルミニウム等の金属あるいはプ
ラスチックなど他の材質でもよい。さらに、物体に形成
される微細溝は、深さが５μｍ以下、かつピッチが５０
０μｍ以下の範囲であれば１本発明の格別の効果を奏す
ることができる０また、この場合、ピッチを一定にする
のでなく、たとえば外周部から中心にいくにつれて次第
にピッチが大きくなるように設定してもよい。さらに、
ダイヤモンド切削工具の形状は、必要に応じて適宜変更
してよい。たとえば先端がＵ字状の切削工具を選択する
ことＫよυ、Ｕ字溝を形成してもよい。さらにまた、微
細溝が形成される面は平面に限ることなく、凸球面、凹
球面、非球面等の曲面でもよい。It should be noted that, without being limited to the above embodiment, as shown in FIG. By reciprocating the tool (5), the inclined surface a of the fine groove (9) is cut across the main cutting edge α.
3 may be created. And one groove (9
) is completed, move the main surface (2) one pitch at a time in the radial direction (direction of arrow α4), and reciprocate the cutting tool (5) in the direction of arrow αυ intermittently for each pitch to form the groove ( 9
) to form... This method has the advantage that the surface roughness of the inclined surface 0 can be improved compared to the above embodiment. Furthermore, the fine grooves (
Although the cross-sectional shape of 9) is serrated, the present invention can also be applied to the formation of the KV-shaped groove α9 as shown in FIG. Further, the material of the object having the fine grooves is not limited to copper, and may be other metals such as steel and aluminum, or plastic. Furthermore, the fine grooves formed on the object have a depth of 5 μm or less and a pitch of 50 μm.
If the range is 0 μm or less, the special effects of the present invention can be achieved.In addition, in this case, the pitch is not set constant, but is set so that it gradually increases from the outer periphery to the center. It's okay. moreover,
The shape of the diamond cutting tool may be changed as necessary. For example, by selecting a cutting tool with a U-shaped tip, a U-shaped groove may be formed. Furthermore, the surface on which the fine grooves are formed is not limited to a flat surface, and may be a curved surface such as a convex spherical surface, a concave spherical surface, or an aspherical surface.

〔発明の効果〕〔Effect of the invention〕

本発明の微細溝を有する物体の製造方法は、同心状円形
溝をダイヤモンド切削工具によシ形成するようにしたの
で、溝の加工精度が高くなる。また、溝幅と構深さとの
比の許容範囲が拡大し、溝の断面形状に制約されること
がほとんどなくなる。In the method of manufacturing an object having fine grooves according to the present invention, the concentric circular grooves are formed using a diamond cutting tool, so that the processing accuracy of the grooves is increased. Furthermore, the permissible range of the ratio of groove width to structure depth is expanded, and there is almost no restriction on the cross-sectional shape of the groove.

よって、微細溝を有する物体の品質及び歩留を顕著に向
上させることができる。Therefore, the quality and yield of objects having fine grooves can be significantly improved.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の一実施例の微細溝を有する物体の製造
方法における正面切削を示す斜視図、第２図は同じくダ
イヤモンド切削工具の要部を示す図、第３図は同じくダ
イヤモンド切削工具の移動軌跡を示す図、第４図は本発
明の他の実施例におけるダイヤモンド切削工具の移動軌
跡を示す図、第５図は本発明の他の実施例において形成
された溝形状の断面図、第６図は従来法による微細溝の
断面図である。FIG. 1 is a perspective view showing front cutting in a method for manufacturing an object having microgrooves according to an embodiment of the present invention, FIG. 2 is a diagram showing the main parts of a diamond cutting tool, and FIG. 3 is a diagram showing the same diamond cutting tool. FIG. 4 is a diagram showing a movement trajectory of a diamond cutting tool in another embodiment of the present invention, FIG. 5 is a cross-sectional view of a groove shape formed in another embodiment of the present invention, FIG. 6 is a sectional view of a fine groove formed by a conventional method.

Claims (3)

【特許請求の範囲】[Claims] （１）物体に被加工面を形成する工程と、上記物体の被
加工面に直交する回転軸線のまわりに上記物体を回転さ
せる工程と、回転中の上記物体の被加工面にダイヤモン
ド切削工具を切込ませ深さ５μｍ以下の円形微細溝を５
００μｍ以下のピッチで同心的に複数本形成する工程と
を具備することを特徴とする微細溝を有する物体の製造
方法。(1) A step of forming a workpiece surface on an object, a step of rotating the object around a rotation axis perpendicular to the workpiece surface of the object, and a step of applying a diamond cutting tool to the workpiece surface of the rotating object. Cut 5 circular fine grooves with a depth of 5 μm or less.
A method for manufacturing an object having fine grooves, comprising the step of forming a plurality of fine grooves concentrically at a pitch of 00 μm or less. （２）被加工面は平面であることを特徴とする特許請求
の範囲第１項記載の微細溝を有する物体の製造方法。(2) A method for manufacturing an object having fine grooves according to claim 1, wherein the surface to be processed is a flat surface. （３）被加工面は曲面であることを特徴とする特許請求
の範囲第１項記載の微細溝を有する物体の製造方法。(3) The method for manufacturing an object having fine grooves according to claim 1, wherein the surface to be processed is a curved surface.
JP60037495A 1985-02-28 1985-02-28 Groove cutting method Expired - Lifetime JP2935234B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60037495A JP2935234B2 (en) 1985-02-28 1985-02-28 Groove cutting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60037495A JP2935234B2 (en) 1985-02-28 1985-02-28 Groove cutting method

Publications (2)

Publication Number Publication Date
JPS61197102A true JPS61197102A (en) 1986-09-01
JP2935234B2 JP2935234B2 (en) 1999-08-16

Family

ID=12499105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60037495A Expired - Lifetime JP2935234B2 (en) 1985-02-28 1985-02-28 Groove cutting method

Country Status (1)

Country Link
JP (1) JP2935234B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5048382A (en) * 1989-08-23 1991-09-17 Mar Don Corporation Method for making elastomeric sealing device
US6276244B1 (en) 1998-11-19 2001-08-21 Visteon Global Technologies, Inc. Cutting tool for forming parallel grooves in a tubular member
WO2007098725A1 (en) * 2006-03-01 2007-09-07 Felsomat Gmbh & Co. Kg Process for the manufacture of rotationally symmetrical areas on a workpiece

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108555315B (en) * 2018-04-20 2019-09-20 湖北钱潮精密件有限公司 A kind of vertical numerical controlled lathe groove processing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57163001A (en) * 1981-02-27 1982-10-07 Rca Corp Method of mechanically forming groove to disk for grinding stylus and cutting-stylus used for said method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57163001A (en) * 1981-02-27 1982-10-07 Rca Corp Method of mechanically forming groove to disk for grinding stylus and cutting-stylus used for said method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5048382A (en) * 1989-08-23 1991-09-17 Mar Don Corporation Method for making elastomeric sealing device
US6276244B1 (en) 1998-11-19 2001-08-21 Visteon Global Technologies, Inc. Cutting tool for forming parallel grooves in a tubular member
WO2007098725A1 (en) * 2006-03-01 2007-09-07 Felsomat Gmbh & Co. Kg Process for the manufacture of rotationally symmetrical areas on a workpiece

Also Published As

Publication number Publication date
JP2935234B2 (en) 1999-08-16

Similar Documents

Publication Publication Date Title
EP0531299B1 (en) Method of grinding the surfaces of cutting blades and grinding wheel therefor
KR960013172B1 (en) Method for machining a workpiece by end-face cutting tool
US3212405A (en) Method for cutting internal spherical surfaces
JP3249081B2 (en) Diffraction surface shape and optical element manufacturing method
JPH0129641B2 (en)
JP2006198743A (en) Small-diameter rotary tool, and method of cutting workpiece formed of high-hardness material
EP1330339B1 (en) Method and apparatus for making a cutting tool having a plurality of margins
EP1322448B1 (en) Method and apparatus for making a cutting tool having a flute
GB2134824A (en) Method and a device for producing threaded sections of threading tools
JPS61197102A (en) Manufacture of object having fine groove
US5241794A (en) Grinding wheel for cutting blades
JP5980360B1 (en) Milling tools
JP2005212030A (en) Method of manufacturing metal mold for ring band optical element
JP2006289871A (en) Method for manufacturing ring zone optical element and method for manufacturing mold for ring zone optical element
JP2002307210A (en) Single crystal diamond cutting tool and its manufacturing method
JP2002361510A (en) Milling method of fine recessed surface and its device
JPH07124813A (en) Forming method of fresnel shape
JPS6263055A (en) Surface grinding method
RU2133656C1 (en) Method for turning spherical surfaces of openings
SU1316756A1 (en) Cutting tool
JPS6156805A (en) Curved surface machining method
RU1815010C (en) Method of machining spheric surfaces of complex-shaped openings
SU1060446A1 (en) Grinding wheel dressing method
JPS60172402A (en) Spherical surface processing machine
JPS61197101A (en) Forming method of groove

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term