JPS61195047U - - Google Patents

Info

Publication number
JPS61195047U
JPS61195047U JP7915985U JP7915985U JPS61195047U JP S61195047 U JPS61195047 U JP S61195047U JP 7915985 U JP7915985 U JP 7915985U JP 7915985 U JP7915985 U JP 7915985U JP S61195047 U JPS61195047 U JP S61195047U
Authority
JP
Japan
Prior art keywords
metal container
microwaves
microwave
thin film
injected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7915985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7915985U priority Critical patent/JPS61195047U/ja
Publication of JPS61195047U publication Critical patent/JPS61195047U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
JP7915985U 1985-05-27 1985-05-27 Pending JPS61195047U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7915985U JPS61195047U (US20090163788A1-20090625-C00002.png) 1985-05-27 1985-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7915985U JPS61195047U (US20090163788A1-20090625-C00002.png) 1985-05-27 1985-05-27

Publications (1)

Publication Number Publication Date
JPS61195047U true JPS61195047U (US20090163788A1-20090625-C00002.png) 1986-12-04

Family

ID=30623810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7915985U Pending JPS61195047U (US20090163788A1-20090625-C00002.png) 1985-05-27 1985-05-27

Country Status (1)

Country Link
JP (1) JPS61195047U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01275748A (ja) * 1988-04-28 1989-11-06 Nippon Telegr & Teleph Corp <Ntt> プラズマ生成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01275748A (ja) * 1988-04-28 1989-11-06 Nippon Telegr & Teleph Corp <Ntt> プラズマ生成装置

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