JPS61194841A - Substrate heating column - Google Patents
Substrate heating columnInfo
- Publication number
- JPS61194841A JPS61194841A JP3598885A JP3598885A JPS61194841A JP S61194841 A JPS61194841 A JP S61194841A JP 3598885 A JP3598885 A JP 3598885A JP 3598885 A JP3598885 A JP 3598885A JP S61194841 A JPS61194841 A JP S61194841A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heat
- heat column
- heating
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Die Bonding (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は混成回路の形成に用いる基板加熱ヒートカラ
ムに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) This invention relates to a substrate heating heat column for use in forming hybrid circuits.
(従来の技術)
従来通常の混成回路を形成するに当り、チップポンダの
均一に加熱した基板ヒートカラム上に混成回路の基板と
なる例えばアルミナ基板或いはべりリア基板を載置し、
これを一定期間加熱昇温して基板上にトランジスタとか
電界効果トランジスタ(FET)とかの能動部品や、抵
抗とかコンデンサとかの受動部品の半田付けを行ってい
た。(Prior Art) Conventionally, when forming a normal hybrid circuit, a substrate of the hybrid circuit, such as an alumina substrate or a berrier substrate, is placed on a uniformly heated substrate heat column of a chipponder.
This was heated for a certain period of time to raise the temperature, and active components such as transistors and field effect transistors (FETs), as well as passive components such as resistors and capacitors, were soldered onto the substrate.
ところで、近年、マイクロ波用混成回路が作られるよう
になり、この混成回路の使用周波数がマイクロ波帯に近
づくにつれて、この混成回路の製法も能動素子をパッケ
ージに入れてから混成回路に実装する方法から、トラン
ジスタやFET等の能動部品をパッケージに収納せずに
裸のままの状態で混成回路に直接ダイスポンディングす
る方法へと変ってきている。By the way, in recent years, hybrid circuits for microwaves have been created, and as the frequency of use of these hybrid circuits approaches the microwave band, the method of manufacturing these hybrid circuits has changed to a method in which active elements are packaged and then mounted in the hybrid circuit. This has led to a shift to a method in which active components such as transistors and FETs are directly die-bonded onto hybrid circuits in a bare state without being housed in a package.
(発明が解決しようとする問題点)
しかしながら、従来の基板加熱ヒートカラムはス(板金
体を均一に加熱する一部材からなる構造となっている。(Problems to be Solved by the Invention) However, conventional substrate heating heat columns have a structure consisting of a single member that uniformly heats a sheet metal body.
これがため、混成回路の基板上に各種のチップを実装す
る必要がある場合には、高温で実装出来る部品から搭載
し、順次に低温で実装出来る部品へと移る方法を取って
いるため、実装する部品の必要な温度を、その実装の都
度、調整しなければならず、操作が煩雑となっていた。For this reason, when it is necessary to mount various chips on a hybrid circuit board, we mount them first, starting with parts that can be mounted at high temperatures, and then move on to parts that can be mounted at low temperatures. The necessary temperature of the component must be adjusted each time it is mounted, making the operation complicated.
さらに、この従来方法では、一台のチップポンダの基板
ヒートカラムを一つの温度にしか設定出来ない場合には
、実装する部品に必要な温度毎に例えば低温及び高温毎
に専用のチップポンダが必要となり、不経済であった。Furthermore, in this conventional method, if the substrate heat column of one chipponder can only be set to one temperature, a dedicated chipponder is required for each temperature required for the component to be mounted, for example, for each low temperature and high temperature. It was uneconomical.
従って、この発明の目的は基板ヒートカラムに二つの温
度設定が可能となるように構成した当該基板ヒートカラ
ムを提供することにある。Accordingly, an object of the present invention is to provide a substrate heat column configured so that two temperature settings are possible for the substrate heat column.
(問題点を解決するための手段)
この目的の達成を図るため、この発明によれば、第1図
(A)及び(B)に示すように、混成回路の形成に用い
る基板加熱ヒートカラム1において、第一ヒートカラム
部2と、この第一ヒートカラム部2とは断熱部3により
熱的に分離された第二ヒートカラム部4と、この第一ヒ
ートカラム部2を第一温度に加熱する第一加熱手段5と
、この第二ヒートカラム4を第二温度に加熱する第二加
熱手段6とを具えることを特徴とする。(Means for solving the problem) In order to achieve this object, according to the present invention, as shown in FIGS. 1(A) and (B), a substrate heating heat column 1 used for forming a hybrid circuit. , a first heat column part 2 and a second heat column part 4 which is thermally separated from the first heat column part 2 by a heat insulating part 3 and a second heat column part 4 which is heated to a first temperature. It is characterized by comprising a first heating means 5 for heating the second heat column 4 to a second temperature, and a second heating means 6 for heating the second heat column 4 to a second temperature.
(作用)
このように構成すれば、一台のチップポンダの基板ヒー
トカラム1において、例えば第一ヒートカラム部2を低
温領域とし、第二ヒートカラム部4を高温領域と使い分
けて温度設定することが出来るので、温度条件が異なる
二種類の部品を実装する場合であっても1部品種類毎の
温度調整を行わずに済み、しかも、異なる種類の部品毎
に専用のチップポンダを設けなくても済むという利点が
ある。(Function) With this configuration, in the substrate heat column 1 of one chipponder, it is possible to set the temperature by using the first heat column section 2 as a low temperature region and the second heat column section 4 as a high temperature region, for example. This eliminates the need to adjust the temperature for each type of component even when mounting two types of components with different temperature conditions, and also eliminates the need to install a dedicated chipponder for each different type of component. There are advantages.
(実施例) 以下、図面を参照して、この発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the drawings.
第1図(A)はこの発明の基板ヒートカラムの要部を概
略的に示す平面図であり、同図CB)は(A)図のIt
−II縁線上取って示した概略的な断面図である。これ
ら図はこの発明が理解出来る程度に概略的に示しである
にすぎず、従って各構成成分の寸法、形状及び配置関係
は図示例に限定されるものではない。FIG. 1(A) is a plan view schematically showing the main part of the substrate heat column of the present invention, and FIG.
-II is a schematic cross-sectional view taken along the edge line. These drawings are only schematic illustrations to the extent that the present invention can be understood, and therefore, the dimensions, shapes, and arrangement relationships of each component are not limited to the illustrated examples.
第1図(A)において、lは基板加熱ヒートカラムで、
このヒートカラム1を周辺部と中央部とに二分割し、周
辺部を第一温度領域を形成する第一ヒートカラム部2と
し、中央部を第二温度領域を形成する第二ヒートカラム
部4とした構造となっている。3はこれら第一及び第二
ヒートカラム部2及び4を熱的に分離するための断熱部
(図中斜線を付して示す)で、従来一般に用いられてい
る例えばアスベストのような断熱材で形成することが出
来る。In FIG. 1(A), l is a substrate heating heat column,
This heat column 1 is divided into two parts, a peripheral part and a central part, the peripheral part is a first heat column part 2 forming a first temperature region, and the central part is a second heat column part 4 forming a second temperature region. The structure is as follows. Reference numeral 3 denotes a heat insulating part (shown with diagonal lines in the figure) for thermally separating the first and second heat column parts 2 and 4, and is made of a conventionally commonly used heat insulating material such as asbestos. can be formed.
第1図(B)は第1図(A)の■−■線上での断面図で
、5は第一ヒートカラム部2を第一温度例えば低温に設
定するための第一加熱手段であり、6は第二ヒートカラ
ム部4を第二温度例えば高温に設定するための第二加熱
手段である。これら温度手段5及び6をこれらヒートカ
ラム部を直接または間接的に加熱する任意好適な手段で
形成することが出来る。FIG. 1(B) is a sectional view taken along the line ■-■ in FIG. 1(A), and 5 is a first heating means for setting the first heat column part 2 to a first temperature, for example, a low temperature; Reference numeral 6 denotes a second heating means for setting the second heat column section 4 to a second temperature, for example, a high temperature. These temperature means 5 and 6 can be formed by any suitable means for directly or indirectly heating these heat column sections.
このような構成において、例えば中心部の第二ヒートカ
ラム部4上で金の熱圧着を必要とする部品を実装する場
合には、この部分4を400 ”Oに加熱し、また1周
辺部の第一ヒートカラム部を200℃程度に加熱して、
そこでは半田付けにより部品を実装することが出来る。In such a configuration, for example, when mounting a component that requires thermocompression bonding of gold on the second heat column section 4 at the center, this section 4 is heated to 400"O, and the first peripheral section is heated to 400" O. Heating the first heat column part to about 200°C,
There, components can be mounted by soldering.
この発明は上述した実施例のみ限定させるものではない
0例えば、第一及び第二温度領域の区分は逆の配置とし
ても良く、また、温度領域を三個以上設ける場合もこの
発明を拡張して用いるにす ′ぎず、従って、その場合
もこの発明の範囲に含まれる。This invention is not limited to the above-mentioned embodiments. For example, the first and second temperature regions may be arranged in reverse, or the invention may be expanded to provide three or more temperature regions. Therefore, such cases are also within the scope of the present invention.
また、この温度領域の第1図(A)に対応する平面的形
状は、図示例に限定されず、所要に応じて種々の形状に
設定することが出来る。Further, the planar shape of this temperature region corresponding to FIG. 1(A) is not limited to the illustrated example, and can be set to various shapes as required.
(発明の効果)
上述した説明からも明らかなように、この発明の構成に
よれば、一台のチップポンダの一個の基板ヒートカラム
を高温及び低温の二つの温度領域に確実に区分すること
が出来るので、温度条件の異なる二種類の部品を混成回
路に搭載する場合、同一の4温度分割された基板ヒート
コラム上で順次に組立て出来る。(Effects of the Invention) As is clear from the above explanation, according to the configuration of the present invention, one substrate heat column of one chipponder can be reliably divided into two temperature regions, high temperature and low temperature. Therefore, when two types of components with different temperature conditions are mounted on a hybrid circuit, they can be assembled sequentially on the same substrate heat column divided into four temperatures.
従って、従来のような温度調整の必要がなく、実装操作
が簡単なつ容易となる。Therefore, there is no need for temperature adjustment as in the conventional case, and the mounting operation becomes simple and easy.
さらに、この発明によれば、−個の基板ヒートカラムで
温度条件の異なる部品の実装を連続的に行うことが出来
るので、従来の場合と比べて経済性の点で優れている。Further, according to the present invention, it is possible to continuously mount components having different temperature conditions using - number of substrate heat columns, which is superior in terms of economy compared to the conventional case.
第1図(A)はこの発明の基板ヒートカラムの一実施例
の要部を概略的に示す平面図、
第1図(B)は第1図(A)の11線上で取って示した
路線的断面図である。
l・・・基板ヒートカラム、2・・・第一ヒートカラム
部3・・・断熱部、 4・・・第二ヒートカ
ラム部5・・・第一加熱手段、 6・・・第二加熱手
段。
特許出願人 沖電気工業株式会社第1図
f、基板ヒートカラム
2、第一ヒートnツム幹
j−断熱部
4:Vニヒートカクム(?
5;纂−カーら午ト徒
6−蔓二tro鯰午季ンFIG. 1(A) is a plan view schematically showing a main part of an embodiment of the substrate heat column of the present invention, and FIG. 1(B) is a line taken on line 11 of FIG. 1(A). FIG. l... Substrate heat column, 2... First heat column section 3... Heat insulation section, 4... Second heat column section 5... First heating means, 6... Second heating means . Patent applicant: Oki Electric Industry Co., Ltd. Figure 1 f, substrate heat column 2, first heat n tsumu stem j - insulation part 4: V ni heat kakum (? 5; season
Claims (1)
て、第一ヒートカラム部と、該第一ヒートカラム部とは
断熱部により熱的に分離された第二ヒートカラム部と、
前記第一ヒートカラム部を第一温度に加熱する第一加熱
手段と、前記第二ヒートカラムを第二温度に加熱する第
二加熱手段とを具えることを特徴とする基板ヒートカラ
ム。In a substrate heating heat column used for forming a hybrid circuit, a first heat column section; a second heat column section thermally separated from the first heat column section by a heat insulating section;
A substrate heat column comprising: a first heating means for heating the first heat column part to a first temperature; and a second heating means for heating the second heat column to a second temperature.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3598885A JPS61194841A (en) | 1985-02-25 | 1985-02-25 | Substrate heating column |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3598885A JPS61194841A (en) | 1985-02-25 | 1985-02-25 | Substrate heating column |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61194841A true JPS61194841A (en) | 1986-08-29 |
Family
ID=12457232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3598885A Pending JPS61194841A (en) | 1985-02-25 | 1985-02-25 | Substrate heating column |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61194841A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05229380A (en) * | 1992-02-20 | 1993-09-07 | Ikeda Bussan Co Ltd | Safety device for vehicle seat |
-
1985
- 1985-02-25 JP JP3598885A patent/JPS61194841A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05229380A (en) * | 1992-02-20 | 1993-09-07 | Ikeda Bussan Co Ltd | Safety device for vehicle seat |
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