JPS61193358A - Light source - Google Patents

Light source

Info

Publication number
JPS61193358A
JPS61193358A JP3284585A JP3284585A JPS61193358A JP S61193358 A JPS61193358 A JP S61193358A JP 3284585 A JP3284585 A JP 3284585A JP 3284585 A JP3284585 A JP 3284585A JP S61193358 A JPS61193358 A JP S61193358A
Authority
JP
Japan
Prior art keywords
bulb
generated
sealed gas
laser
spectrum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3284585A
Inventor
Yasue Sato
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP3284585A priority Critical patent/JPS61193358A/en
Publication of JPS61193358A publication Critical patent/JPS61193358A/en
Application status is Pending legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field

Abstract

PURPOSE:To obtain a light source of a long service life with little change in the luminous intensity and the spectrum with the passage of time, by plasma- radiating a sealed gas excited by laser beams in a bulb. CONSTITUTION:Laser beams from a laser radiator 1 are formed into an adequate beam form through optical system members 2 and 3, transmitted through the laser passage, and focused by a focusing optical member 4 to a focus point in a bulb 5. At the focus in the bulb, an electromagnetic field is generated which is strong enough to excite the sealed gas discharged, and a high temperature plasma of the sealed gas generated by a discharge radiates spectra including ultraviolet rays and infrared rays. Since this system has no electrode in the bulb, no change of luminous intensity or spectrum from the evaporation or spattering of the electrode is generated, and a long service life can be obtained.
JP3284585A 1985-02-22 1985-02-22 Light source Pending JPS61193358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3284585A JPS61193358A (en) 1985-02-22 1985-02-22 Light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3284585A JPS61193358A (en) 1985-02-22 1985-02-22 Light source

Publications (1)

Publication Number Publication Date
JPS61193358A true JPS61193358A (en) 1986-08-27

Family

ID=12370159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3284585A Pending JPS61193358A (en) 1985-02-22 1985-02-22 Light source

Country Status (1)

Country Link
JP (1) JPS61193358A (en)

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007120521A2 (en) * 2006-03-31 2007-10-25 Energetiq Technology, Inc. Lazer-driven light source
WO2010002766A3 (en) * 2008-07-02 2010-03-04 Energetiq Technology, Inc. Energy-driven, e.g. laser-driven, light source
EP2172962A1 (en) * 2008-10-02 2010-04-07 Ushio Denki Kabushiki Kaisha Exposure device
EP2202778A2 (en) 2008-12-27 2010-06-30 Ushio Denki Kabushiki Kaisha Light source
EP2202780A2 (en) 2008-12-27 2010-06-30 Ushio Denki Kabushiki Kaisha Light source device
JP2010157443A (en) * 2008-12-27 2010-07-15 Ushio Inc Light source device
JP2010157625A (en) * 2008-12-27 2010-07-15 Ushio Inc Exposure apparatus
JP2010171219A (en) * 2009-01-23 2010-08-05 Ushio Inc Light source equipment and aligner including the same
CN101866819A (en) * 2009-04-15 2010-10-20 优志旺电机株式会社 Laser driven light source
EP2280408A2 (en) 2009-07-30 2011-02-02 Ushiodenki Kabushiki Kaisha Light source device
JP2011049513A (en) * 2009-07-30 2011-03-10 Ushio Inc The light source device
WO2011100322A3 (en) * 2010-02-09 2011-10-13 Energetiq Technology, Inc. Laser-driven light source
JP2012164538A (en) * 2011-02-08 2012-08-30 Ushio Inc Discharge lamp device
DE102011113681A1 (en) 2011-09-20 2013-03-21 Heraeus Noblelight Gmbh Lamp unit for generation of optical radiation, has discharge chamber containing filling gas, ignition source for generating plasma zone within discharge chamber and laser for providing energy to plasma zone by laser beam
JP2014075608A (en) * 2013-12-26 2014-04-24 Ushio Inc Light source device
JP2014526119A (en) * 2011-06-29 2014-10-02 ケーエルエー−テンカー コーポレイション Optical pumping for plasma maintenance
CN104460186A (en) * 2014-11-28 2015-03-25 中国人民大学 High-brightness pulse white-light source exciting system
JP2015531966A (en) * 2012-08-08 2015-11-05 ケーエルエー−テンカー コーポレイション Laser maintain plasma tube containing water
US9576785B2 (en) 2015-05-14 2017-02-21 Excelitas Technologies Corp. Electrodeless single CW laser driven xenon lamp
US9741553B2 (en) 2014-05-15 2017-08-22 Excelitas Technologies Corp. Elliptical and dual parabolic laser driven sealed beam lamps
US9748086B2 (en) 2014-05-15 2017-08-29 Excelitas Technologies Corp. Laser driven sealed beam lamp
US9865447B2 (en) 2016-03-28 2018-01-09 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source
US9984865B2 (en) 2013-12-06 2018-05-29 Hamamatsu Photonics K.K. Light-emitting sealed body
US10008378B2 (en) 2015-05-14 2018-06-26 Excelitas Technologies Corp. Laser driven sealed beam lamp with improved stability
US10057973B2 (en) 2015-05-14 2018-08-21 Excelitas Technologies Corp. Electrodeless single low power CW laser driven plasma lamp
US10078167B2 (en) 2013-09-20 2018-09-18 Asml Netherlands B.V. Laser-operated light source
US10109473B1 (en) 2018-01-26 2018-10-23 Excelitas Technologies Corp. Mechanically sealed tube for laser sustained plasma lamp and production method for same

Cited By (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7786455B2 (en) 2006-03-31 2010-08-31 Energetiq Technology, Inc. Laser-driven light source
WO2007120521A3 (en) * 2006-03-31 2008-03-06 Energetiq Technology Inc Lazer-driven light source
US7435982B2 (en) 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
JP2009532829A (en) * 2006-03-31 2009-09-10 エナジェティック・テクノロジー・インコーポレーテッド Of the laser drive source
GB2450045B (en) * 2006-03-31 2012-04-04 Energetiq Technology Inc Laser driven light source
US8525138B2 (en) 2006-03-31 2013-09-03 Energetiq Technology, Inc. Laser-driven light source
US7989786B2 (en) 2006-03-31 2011-08-02 Energetiq Technology, Inc. Laser-driven light source
WO2007120521A2 (en) * 2006-03-31 2007-10-25 Energetiq Technology, Inc. Lazer-driven light source
US8969841B2 (en) 2006-03-31 2015-03-03 Energetiq Technology, Inc. Light source for generating light from a laser sustained plasma in a above-atmospheric pressure chamber
US9185786B2 (en) 2006-03-31 2015-11-10 Energetiq Technology, Inc. Laser-driven light source
US9609732B2 (en) 2006-03-31 2017-03-28 Energetiq Technology, Inc. Laser-driven light source for generating light from a plasma in an pressurized chamber
US9048000B2 (en) 2006-03-31 2015-06-02 Energetiq Technology, Inc. High brightness laser-driven light source
US8309943B2 (en) 2006-03-31 2012-11-13 Energetiq Technology, Inc. Laser-driven light source
JP2012230924A (en) * 2006-03-31 2012-11-22 Energetic Technology Inc Laser-driven light source and method
WO2010002766A3 (en) * 2008-07-02 2010-03-04 Energetiq Technology, Inc. Energy-driven, e.g. laser-driven, light source
CN101713928A (en) * 2008-10-02 2010-05-26 优志旺电机株式会社 Exposure apparatus
US8253926B2 (en) 2008-10-02 2012-08-28 Ushio Denki Kabushiki Kaisha Exposure device
EP2172962A1 (en) * 2008-10-02 2010-04-07 Ushio Denki Kabushiki Kaisha Exposure device
US20100085549A1 (en) * 2008-10-02 2010-04-08 Ushiodenki Kabushiki Kaisha Exposure device
JP2010087388A (en) * 2008-10-02 2010-04-15 Ushio Inc Aligner
JP2010170112A (en) * 2008-12-27 2010-08-05 Ushio Inc Light source device
US8651701B2 (en) 2008-12-27 2014-02-18 Ushio Denki Kabushiki Kaisha Light source device
EP2202778A2 (en) 2008-12-27 2010-06-30 Ushio Denki Kabushiki Kaisha Light source
EP2202780A2 (en) 2008-12-27 2010-06-30 Ushio Denki Kabushiki Kaisha Light source device
JP2010157443A (en) * 2008-12-27 2010-07-15 Ushio Inc Light source device
KR101278425B1 (en) * 2008-12-27 2013-06-24 에너제틱 테크놀로지 아이엔씨. Light source apparatus
EP2202779A3 (en) * 2008-12-27 2011-11-23 Ushio Denki Kabushiki Kaisha Light source
EP2202780A3 (en) * 2008-12-27 2012-02-29 Ushio Denki Kabushiki Kaisha Light source device
JP2010157625A (en) * 2008-12-27 2010-07-15 Ushio Inc Exposure apparatus
US8182127B2 (en) 2008-12-27 2012-05-22 Ushio Denki Kabushiki Kaisha Light source
JP2010171219A (en) * 2009-01-23 2010-08-05 Ushio Inc Light source equipment and aligner including the same
JP2011119200A (en) * 2009-04-15 2011-06-16 Ushio Inc Laser-driven light source
CN101866819A (en) * 2009-04-15 2010-10-20 优志旺电机株式会社 Laser driven light source
US8242695B2 (en) 2009-04-15 2012-08-14 Ushio Denki Kabushiki Kaisha Laser driven light source
EP2280408A2 (en) 2009-07-30 2011-02-02 Ushiodenki Kabushiki Kaisha Light source device
US8369374B2 (en) 2009-07-30 2013-02-05 Ushio Denki Kabushiki Kaisha Light source device
JP2011035039A (en) * 2009-07-30 2011-02-17 Ushio Inc The light source device
JP2011049513A (en) * 2009-07-30 2011-03-10 Ushio Inc The light source device
EP2312615A2 (en) 2009-10-13 2011-04-20 Ushio Denki Kabushiki Kaisha Light source device
EP2312615A3 (en) * 2009-10-13 2011-09-14 Ushio Denki Kabushiki Kaisha Light source device
CN102043346A (en) * 2009-10-13 2011-05-04 优志旺电机株式会社 Light source apparatus
US8288947B2 (en) 2009-10-13 2012-10-16 Ushio Denki Kabushiki Kaisha Light source device
WO2011100322A3 (en) * 2010-02-09 2011-10-13 Energetiq Technology, Inc. Laser-driven light source
JP2012164538A (en) * 2011-02-08 2012-08-30 Ushio Inc Discharge lamp device
JP2014526119A (en) * 2011-06-29 2014-10-02 ケーエルエー−テンカー コーポレイション Optical pumping for plasma maintenance
DE102011113681A1 (en) 2011-09-20 2013-03-21 Heraeus Noblelight Gmbh Lamp unit for generation of optical radiation, has discharge chamber containing filling gas, ignition source for generating plasma zone within discharge chamber and laser for providing energy to plasma zone by laser beam
JP2015531966A (en) * 2012-08-08 2015-11-05 ケーエルエー−テンカー コーポレイション Laser maintain plasma tube containing water
US10078167B2 (en) 2013-09-20 2018-09-18 Asml Netherlands B.V. Laser-operated light source
US9984865B2 (en) 2013-12-06 2018-05-29 Hamamatsu Photonics K.K. Light-emitting sealed body
JP2014075608A (en) * 2013-12-26 2014-04-24 Ushio Inc Light source device
US9922814B2 (en) 2014-05-15 2018-03-20 Excelitas Technologies Corp. Apparatus and a method for operating a sealed beam lamp containing an ionizable medium
US9741553B2 (en) 2014-05-15 2017-08-22 Excelitas Technologies Corp. Elliptical and dual parabolic laser driven sealed beam lamps
US9748086B2 (en) 2014-05-15 2017-08-29 Excelitas Technologies Corp. Laser driven sealed beam lamp
CN104460186A (en) * 2014-11-28 2015-03-25 中国人民大学 High-brightness pulse white-light source exciting system
US9576785B2 (en) 2015-05-14 2017-02-21 Excelitas Technologies Corp. Electrodeless single CW laser driven xenon lamp
US10008378B2 (en) 2015-05-14 2018-06-26 Excelitas Technologies Corp. Laser driven sealed beam lamp with improved stability
US10057973B2 (en) 2015-05-14 2018-08-21 Excelitas Technologies Corp. Electrodeless single low power CW laser driven plasma lamp
US10032619B2 (en) 2016-03-28 2018-07-24 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source
US9865447B2 (en) 2016-03-28 2018-01-09 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source
US10109473B1 (en) 2018-01-26 2018-10-23 Excelitas Technologies Corp. Mechanically sealed tube for laser sustained plasma lamp and production method for same

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