CN104460186A - High-brightness pulse white-light source exciting system - Google Patents
High-brightness pulse white-light source exciting system Download PDFInfo
- Publication number
- CN104460186A CN104460186A CN201410707874.0A CN201410707874A CN104460186A CN 104460186 A CN104460186 A CN 104460186A CN 201410707874 A CN201410707874 A CN 201410707874A CN 104460186 A CN104460186 A CN 104460186A
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- light
- lens group
- pulse
- white
- activating system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
- G03B15/02—Illuminating scene
- G03B15/03—Combinations of cameras with lighting apparatus; Flash units
- G03B15/05—Combinations of cameras with electronic flash apparatus; Electronic flash units
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
The invention discloses a high-brightness pulse white-light source exciting system. A focusing lens assembly and an air chamber are sequentially arranged on a light path of laser pulses output by a nanosecond-pulse laser. The laser pulses are focused into the air chamber through the focusing lens assembly, light emitted by generated plasma flame is collected by an optical collecting device, and a high-brightness pulse white-light source is obtained. The collected white light of the high-brightness pulse white-light source exciting system can be used for spectral analysis, imaging, illumination, photoetching, transfer printing and other fields. The high-brightness pulse white-light source exciting system achieves white light output which is short in pulse time, high in instantaneous strength, stable in time and spectral property, and wide in spectral region.
Description
Technical field
The present invention relates to a kind of high brightness pulse white-light light source activation system, belong to broad spectrum light source field.
Background technology
The light-pulse generator (also known as high brightness pulse white-light light source) of wide spectral range high strength high brightness is with a wide range of applications at the numerous areas of spectral analysis, imaging and illumination and photoetching and transfer printing.The main points of high brightness pulse white-light light source are as the term suggests be the pulse of moment high strength, and the white light of wide spectral range exports.
Conventional high brightness pulse white-light light source is Xe flashlamp, its principle is that the spark plasma discharge that produces of high-voltage great-current is luminous, and the complicated and diversified quasi-molecule excited state that the white light emission of its wide spectral is formed under plasmoid from the xenon of high pressure is luminous.The burst length Chang Suiqi embody rule of this light source and have a wide range of change.Flashlamp for photo illumination is example, and long (more than the 100 millimeters) discharge energy of fixed its fluorescent tube of studio flashlamp is large, but lighting maintaining time (single pulse is discharged completely) can reach more than 10 milliseconds.Its fluorescent tube of flashlamp installing built-in or separate portable is on cameras short, and discharge energy is little, and its lighting maintaining time is generally about millisecond.Probe source in spectral technique commonly uses high pressure short arc Xe flashlamp.Common model (the L7685 model for Japanese Bin Song company) its electrical discharge arc spacing is at 3 ~ 4 millimeters, and the halfwidth of LED pulse is about 10 microseconds, and monopulse luminous energy is about 1 joule.
The moment high brightness characteristic of high brightness pulse white-light light source needs higher peak power on the one hand, needs the shorter burst length on the other hand.Based on the Xe flashlamp of gas discharge luminescence due to the restriction of powered excitation principle, the performance of two aspects is all subject to certain restrictions.First be that the effect being subject to repelling between electronics due to discharge current density can not be too large; Secondly regular situation is subject to capacitance and discharge current co-controlling lower discharge time, and under requiring high brightness to obtain situation, discharge time can not be too short.The technology such as flashlamp obtains discharge time can by switching tube, thyratron shorten, but the energy of pulsed illumination also shortens to some extent simultaneously, and obtain capacitance characteristic due to Circuits System self, and discharge time also can not infinitely shorten, and is difficult to reach nanosecond order.
The fundamental purpose of illumination or spectrum dynamics probe source that high brightness pulse white-light light source is used for Fast Process is in order to " solidifying " object of observation " action ".Therefore the key point that peak power chopped pulse time are development of new high brightness pulse white-light light sources is improved.The burst length of nanosecond order is the light source technology feature detecting numerous physical-chemical reaction or throw light on be badly in need of to the object of high-speed motion change, although nanosecond laser can both meet the demands on burst length and brightness, its good monochromaticity as detection and become obvious shortcoming during lighting source.
Summary of the invention
The object of this invention is to provide a kind of high brightness pulse white-light light source activation system, activating system of the present invention can realize that the burst length is short, instantaneous strength is high, the output of time and spectrum property is stablized and spectral range is wide white light source.
High brightness pulse white-light light source activation system provided by the present invention, in the light path of the laser pulse that nanosecoud pulse laser exports, sets gradually focus lens group and air chamber; Described laser pulse focuses in described air chamber through described focus lens group, and the light that the plasma flame of generation sends is collected through optical collection device, obtains high brightness pulse white-light light source.
In described activating system, described air chamber is bulb or the chamber being filled with at least one optical window;
Inert gas is filled with as at least one in xenon, halogen and mercury in described bulb and described chamber.
In described activating system, the wavelength of described laser pulse is any one or its combination in following wave band:
266nm, 355nm, 527nm, 532nm, 1054nm and 1064nm are concrete different according to the type difference of enforcement nanosecoud pulse laser;
The pulsewidth of described laser pulse is for being hundreds of psec extremely hundreds of nanosecond;
Operating air pressure in described air chamber can be several between hundred atmospheric pressure.
In described activating system, described focus lens group can be following any one:
1) convex lens or convex lens group;
2) combination of a concave mirror or a concave mirror and plane mirror;
3) combination of convex lens and catoptron.
In described activating system, before described focus lens group, be provided with extender lens group;
Described extender lens group comprises the concave mirror and convex lens that set gradually;
The present invention is by described extender lens group, and the object first carrying out expanding laggard line focusing is to increase and focuses on drift angle, thus the thermal lensing effect that reduction is caused by the high light intensity of focus, reduce focus and plasma torch size.Also by shortening focal length and reducing air chamber size, can reduce to expand multiple and maybe need not expand according to demand.
In described activating system, the effective relative aperture (F number) of described focus lens group is not more than 2.
In activating system of the present invention, plasma flame size can be reduced by adopting to use non-spherical lens and cover in focus lens group further near methods such as the regions of primary optical axis.
In described activating system, described optical collection device can be following any one:
1) convex lens
2) a convex lens group;
3) concave mirror or concave mirror group;
4) combination of concave mirror and convex lens.
In described activating system, the primary optical axis of the light path of the light that the primary optical axis of described optical collection device and described plasma flame send is 0 degree or 90 degree, namely carries out subtend collection or lateral collection respectively.
In described activating system, described optical collection device can comprise at least one tablet filter, and described optical filter includes but not limited to the resistance of medium film strips optical filter, deielectric-coating bandpass filter, the long pass filter of coloured glass, coloured glass neutral colour filter, metal coating neutral colour filter etc.
High brightness pulse white-light light source activation system of the present invention, the near-infrared laser pulse utilizing nanosecond laser to export, by light beam integer with converge in luminophor-as in high pressure Xe air chamber, form the high density plasma Discharge illuminating of moment, because this plasma is produced by laser excitation/induction, image current bombardment is not limited like that for its concentration, can reach higher density in moment.Simultaneously due to the characteristic of Laser Focusing, luminous point yardstick can control in micron dimension, improves brightness (with cd/m on the one hand
2meter) avoid on the other hand the self-absorption that large luminophor causes.The white light sent can carry out side direction or subtend is collected.White light after collection may be used for spectral analysis, imaging and illumination and the numerous areas such as photoetching and transfer printing.Activating system of the present invention is short in achieving the burst length, and instantaneous strength is high, and time and spectrum property are stablized, and the white light that spectral range is wide exports.
Accompanying drawing explanation
Fig. 1 is one of light path schematic diagram of activating system of the present invention.
Fig. 2 is the light path schematic diagram two of activating system of the present invention.
Fig. 3 is the schematic diagram of the type of focusing in activating system of the present invention.
Fig. 4 is one of schematic diagram of collection mode in activating system of the present invention.
Fig. 5 is the schematic diagram two of collection mode in activating system of the present invention.
Fig. 6 is the schematic diagram three of collection mode in activating system of the present invention.
In figure, each mark is as follows:
1 laser pulse, 2 extender lens groups, 3 condenser lenses, 4 air chambers, 5 collecting lens groups, the eccentric paraboloidal mirror of 6 collecting lens I, 7 collecting lens II, 8,9 spherical mirrors.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described, but the present invention is not limited to following examples.
As shown in Figure 1, for a kind of high brightness pulse white-light light source activation system provided by the invention, in the light path of the laser pulse 1 that nanosecoud pulse laser exports, fix extender lens group 2, condenser lens 3 and air chamber 4 (high pressure xenon lamp bulb) successively, and ensure that laser spot is arranged in air chamber 4.Laser pulse 1 line focus lens 3 focus in air chamber 4, the light that the plasma flame produced sends is collected through collecting lens group 5, obtain high brightness pulse white-light light source, and the central axis upright of collecting lens group 5 is in laser optical path direction, and laser spot is made to be positioned at a focus place of lens combination.
As shown in Figure 2, for another kind of high brightness pulse white-light light source activation system provided by the invention, in this activating system, laser pulse 1, extender lens group 2, condenser lens 3 are consistent with arranging in activating system shown in same Fig. 1 of air chamber 4 (high pressure xenon lamp bulb), and difference is: the central axis of collecting lens group 5 and laser optical path center superposition.In the activating system shown in Fig. 2, need in collecting lens group 5, increase a slice or multi-disc Excitation Filter with High, to eliminate the impact of the excitation pulse laser collected; Or by blocking the laser of condenser lens 3 immediate vicinity and using the collecting lens of suitable size and focal length, the impact of excitation pulse laser can be avoided.
In the activating system shown in Fig. 1 and Fig. 2, extender lens group 2 specifically can be the optical device combination shown in Fig. 3: as shown in dotted line frame in Fig. 3, be made up of short focus concavees lens and long-focus convex lens, use short focus aspheric surface convex lens as condenser lens 3 again, the laser after expanding is assembled in air inlet chamber 4 (high pressure xenon lamp bulb) with large drift angle.
In the activating system shown in Fig. 1 and Fig. 2, collecting lens group 5 specifically can be the combination of the optical device shown in Fig. 4: as shown in dotted line frame in Fig. 4, be made up of two convex lens, laser spot and white light luminous point are positioned in the focus of collecting lens I 6, and sample or aperture diaphragm are placed in the focus of collecting lens II 7.
In the activating system shown in Fig. 1 and Fig. 2, collecting lens group 5 specifically also can be the combination of optical device as shown in Figure 5: combine (also can be combined by two eccentric paraboloidal mirrors) by an eccentric paraboloidal mirror and convex lens and form, laser spot is positioned in the focus of an eccentric paraboloidal mirror 8, and sample or aperture diaphragm are placed in the focus of another convex lens (or eccentric paraboloidal mirror).
As shown in Figure 6, when using lateral collection, can install a spherical mirror 9 additional at air chamber 4 and the side of collecting light path symmetry, the centre of sphere is positioned at laser spot place, can in order to improve the collection efficiency of white light.
Claims (9)
1. high brightness pulse white-light light source activation system, is characterized in that: in the light path of the laser pulse that nanosecoud pulse laser exports, set gradually focus lens group and air chamber; Described laser pulse focuses in described air chamber through described focus lens group, and the light that the plasma flame of generation sends is collected through optical collection device, obtains high brightness pulse white-light light source.
2. activating system according to claim 1, is characterized in that: described air chamber is bulb or the chamber being filled with at least one optical window;
At least one in inert gas, halogen and mercury is filled with in described bulb and described chamber.
3. activating system according to claim 1 and 2, is characterized in that: the wavelength of described laser pulse is any one or its combination in following wave band:
266nm, 355nm, 527nm, 532nm, 1054nm and 1064nm.
4. the activating system according to any one of claim 1-3, is characterized in that: described focus lens group be following any one:
1) convex lens or convex lens group;
2) combination of a concave mirror or a concave mirror and plane mirror;
3) combination of convex lens and catoptron.
5. the activating system according to any one of claim 1-4, is characterized in that: be provided with extender lens group before described focus lens group;
Described extender lens group comprises the concavees lens and convex lens that set gradually.
6. activating system according to claim 5, is characterized in that: the effective relative aperture of described focus lens group is not more than 2.
7. the activating system according to any one of claim 1-6, is characterized in that: described optical collection device be following any one:
1) convex lens
2) a convex lens group;
3) concave mirror or concave mirror group;
4) combination of concave mirror and convex lens.
8. the activating system according to any one of claim 1-7, is characterized in that: the primary optical axis of the light path of the light that the primary optical axis of described optical collection device and described plasma flame send is 0 degree or 90 degree.
9. the activating system according to any one of claim 1-8, is characterized in that: described optical collection device comprises at least one tablet filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410707874.0A CN104460186A (en) | 2014-11-28 | 2014-11-28 | High-brightness pulse white-light source exciting system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410707874.0A CN104460186A (en) | 2014-11-28 | 2014-11-28 | High-brightness pulse white-light source exciting system |
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| Publication Number | Publication Date |
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| CN104460186A true CN104460186A (en) | 2015-03-25 |
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| CN201410707874.0A Pending CN104460186A (en) | 2014-11-28 | 2014-11-28 | High-brightness pulse white-light source exciting system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108353490A (en) * | 2015-09-28 | 2018-07-31 | 科磊股份有限公司 | System and method for the plasma lighting that laser maintains |
| CN111724695A (en) * | 2019-03-20 | 2020-09-29 | 青岛海信移动通信技术股份有限公司 | Display device |
| CN113670581A (en) * | 2021-07-30 | 2021-11-19 | 重庆邮电大学 | Transient absorption test system and method for optical element |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61193358A (en) * | 1985-02-22 | 1986-08-27 | Canon Inc | Light source |
| CN102043346A (en) * | 2009-10-13 | 2011-05-04 | 优志旺电机株式会社 | Light source apparatus |
| CN202433090U (en) * | 2012-01-19 | 2012-09-12 | 北京卓立汉光仪器有限公司 | Monochromatic source system |
| TW201403658A (en) * | 2012-06-12 | 2014-01-16 | Asml Netherlands Bv | Photon source, metrology apparatus, lithographic system and device manufacturing method |
-
2014
- 2014-11-28 CN CN201410707874.0A patent/CN104460186A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61193358A (en) * | 1985-02-22 | 1986-08-27 | Canon Inc | Light source |
| CN102043346A (en) * | 2009-10-13 | 2011-05-04 | 优志旺电机株式会社 | Light source apparatus |
| CN202433090U (en) * | 2012-01-19 | 2012-09-12 | 北京卓立汉光仪器有限公司 | Monochromatic source system |
| TW201403658A (en) * | 2012-06-12 | 2014-01-16 | Asml Netherlands Bv | Photon source, metrology apparatus, lithographic system and device manufacturing method |
Non-Patent Citations (1)
| Title |
|---|
| SVEN E ET AL.: "Incoherent broad-band cavity-enhanced absorption spectroscopy", 《CHEMICAL PHYSICS LETTERS》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108353490A (en) * | 2015-09-28 | 2018-07-31 | 科磊股份有限公司 | System and method for the plasma lighting that laser maintains |
| CN108353490B (en) * | 2015-09-28 | 2020-08-04 | 科磊股份有限公司 | System and method for laser sustained plasma illumination |
| CN111724695A (en) * | 2019-03-20 | 2020-09-29 | 青岛海信移动通信技术股份有限公司 | Display device |
| CN113670581A (en) * | 2021-07-30 | 2021-11-19 | 重庆邮电大学 | Transient absorption test system and method for optical element |
| CN113670581B (en) * | 2021-07-30 | 2022-07-22 | 重庆邮电大学 | Transient absorption test system and method for optical element |
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Application publication date: 20150325 |