JPS61192589U - - Google Patents

Info

Publication number
JPS61192589U
JPS61192589U JP7801785U JP7801785U JPS61192589U JP S61192589 U JPS61192589 U JP S61192589U JP 7801785 U JP7801785 U JP 7801785U JP 7801785 U JP7801785 U JP 7801785U JP S61192589 U JPS61192589 U JP S61192589U
Authority
JP
Japan
Prior art keywords
screw compressor
vacuum pump
vacuum
lubricated screw
exhausts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7801785U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7801785U priority Critical patent/JPS61192589U/ja
Publication of JPS61192589U publication Critical patent/JPS61192589U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る装置の一実施例を示す説
明図。第２図は他実施例を示す説明図。 １…無潤滑式ねじ圧縮機、７…補助真空ポンプ
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 吸気ガスを大気圧迄圧縮して排気せしめる真空
    ポンプの前段に無潤滑式ねじ圧縮機１を設けて、
    該無潤滑式ねじ圧縮機１を中高真空域の真空ポン
    プとして使用してなることを特徴とする真空装置
    。
JP7801785U 1985-05-24 1985-05-24 Pending JPS61192589U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7801785U JPS61192589U (ja) 1985-05-24 1985-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7801785U JPS61192589U (ja) 1985-05-24 1985-05-24

Publications (1)

Publication Number Publication Date
JPS61192589U true JPS61192589U (ja) 1986-11-29

Family

ID=30621615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7801785U Pending JPS61192589U (ja) 1985-05-24 1985-05-24

Country Status (1)

Country Link
JP (1) JPS61192589U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142293A (ja) * 2012-01-06 2013-07-22 Ebara Corp 真空排気システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142293A (ja) * 2012-01-06 2013-07-22 Ebara Corp 真空排気システム

Similar Documents

Publication Publication Date Title
JPS61192589U (ja)
JPS5922976U (ja) 燃料ポンプ
JPS61140191U (ja)
JPH0321583U (ja)
JPS6456597U (ja)
JPS639485U (ja)
JPS6227648U (ja)
JPS6422836U (ja)
JPS6394326U (ja)
JPS6447994U (ja)
JPS6358864U (ja)
JPH0452554U (ja)
JPS63162935U (ja)
JPH02118181U (ja)
JPS6247784U (ja)
JPH01141997U (ja)
JPS6191071U (ja)
JPS62195031U (ja)
JPS61181812U (ja)
JPH01111188U (ja)
JPS6195968U (ja)
JPS63200697U (ja)
JPS62113863U (ja)
JPS60173684U (ja) 携帯用エア−ポンプ
JPH0163788U (ja)