JPS6118874B2 - - Google Patents

Info

Publication number
JPS6118874B2
JPS6118874B2 JP53138952A JP13895278A JPS6118874B2 JP S6118874 B2 JPS6118874 B2 JP S6118874B2 JP 53138952 A JP53138952 A JP 53138952A JP 13895278 A JP13895278 A JP 13895278A JP S6118874 B2 JPS6118874 B2 JP S6118874B2
Authority
JP
Japan
Prior art keywords
type
mesa
layer
semiconductor layer
junction capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53138952A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5565481A (en
Inventor
Masahiro Kuroda
Kenji Kanema
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP13895278A priority Critical patent/JPS5565481A/ja
Publication of JPS5565481A publication Critical patent/JPS5565481A/ja
Publication of JPS6118874B2 publication Critical patent/JPS6118874B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP13895278A 1978-11-13 1978-11-13 Manufacture of high-frequency diode Granted JPS5565481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13895278A JPS5565481A (en) 1978-11-13 1978-11-13 Manufacture of high-frequency diode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13895278A JPS5565481A (en) 1978-11-13 1978-11-13 Manufacture of high-frequency diode

Publications (2)

Publication Number Publication Date
JPS5565481A JPS5565481A (en) 1980-05-16
JPS6118874B2 true JPS6118874B2 (enExample) 1986-05-14

Family

ID=15233986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13895278A Granted JPS5565481A (en) 1978-11-13 1978-11-13 Manufacture of high-frequency diode

Country Status (1)

Country Link
JP (1) JPS5565481A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI241028B (en) * 2002-03-08 2005-10-01 Sanken Electric Co Ltd Semiconductor device and its manufacturing method
JP2005340484A (ja) * 2004-05-27 2005-12-08 Renesas Technology Corp 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPS5565481A (en) 1980-05-16

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