JPS61188354U - - Google Patents

Info

Publication number
JPS61188354U
JPS61188354U JP7279985U JP7279985U JPS61188354U JP S61188354 U JPS61188354 U JP S61188354U JP 7279985 U JP7279985 U JP 7279985U JP 7279985 U JP7279985 U JP 7279985U JP S61188354 U JPS61188354 U JP S61188354U
Authority
JP
Japan
Prior art keywords
cradle
semiconductor wafer
turntable
grooves
support body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7279985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316278Y2 (US20030204162A1-20031030-M00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7279985U priority Critical patent/JPH0316278Y2/ja
Publication of JPS61188354U publication Critical patent/JPS61188354U/ja
Application granted granted Critical
Publication of JPH0316278Y2 publication Critical patent/JPH0316278Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP7279985U 1985-05-16 1985-05-16 Expired JPH0316278Y2 (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7279985U JPH0316278Y2 (US20030204162A1-20031030-M00001.png) 1985-05-16 1985-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7279985U JPH0316278Y2 (US20030204162A1-20031030-M00001.png) 1985-05-16 1985-05-16

Publications (2)

Publication Number Publication Date
JPS61188354U true JPS61188354U (US20030204162A1-20031030-M00001.png) 1986-11-25
JPH0316278Y2 JPH0316278Y2 (US20030204162A1-20031030-M00001.png) 1991-04-08

Family

ID=30611551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7279985U Expired JPH0316278Y2 (US20030204162A1-20031030-M00001.png) 1985-05-16 1985-05-16

Country Status (1)

Country Link
JP (1) JPH0316278Y2 (US20030204162A1-20031030-M00001.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06112186A (ja) * 1992-09-25 1994-04-22 Dainippon Screen Mfg Co Ltd 横軸回転式基板乾燥装置
JP2001144038A (ja) * 1999-11-16 2001-05-25 Tokyo Electron Ltd 基板処理装置および基板処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06112186A (ja) * 1992-09-25 1994-04-22 Dainippon Screen Mfg Co Ltd 横軸回転式基板乾燥装置
JP2001144038A (ja) * 1999-11-16 2001-05-25 Tokyo Electron Ltd 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
JPH0316278Y2 (US20030204162A1-20031030-M00001.png) 1991-04-08

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