JPS61188352U - - Google Patents

Info

Publication number
JPS61188352U
JPS61188352U JP7232885U JP7232885U JPS61188352U JP S61188352 U JPS61188352 U JP S61188352U JP 7232885 U JP7232885 U JP 7232885U JP 7232885 U JP7232885 U JP 7232885U JP S61188352 U JPS61188352 U JP S61188352U
Authority
JP
Japan
Prior art keywords
sample
heating
ashes
plasma
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7232885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7232885U priority Critical patent/JPS61188352U/ja
Publication of JPS61188352U publication Critical patent/JPS61188352U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP7232885U 1985-05-17 1985-05-17 Pending JPS61188352U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7232885U JPS61188352U (US20030199744A1-20031023-C00003.png) 1985-05-17 1985-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7232885U JPS61188352U (US20030199744A1-20031023-C00003.png) 1985-05-17 1985-05-17

Publications (1)

Publication Number Publication Date
JPS61188352U true JPS61188352U (US20030199744A1-20031023-C00003.png) 1986-11-25

Family

ID=30610642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7232885U Pending JPS61188352U (US20030199744A1-20031023-C00003.png) 1985-05-17 1985-05-17

Country Status (1)

Country Link
JP (1) JPS61188352U (US20030199744A1-20031023-C00003.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01234841A (ja) * 1988-03-16 1989-09-20 Fujitsu Ltd パターン形成方法
JPH02191959A (ja) * 1989-01-20 1990-07-27 Fujitsu Ltd レジストパターンの形成方法
JPH02228486A (ja) * 1989-03-01 1990-09-11 Nippon Telegr & Teleph Corp <Ntt> エッチング方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01234841A (ja) * 1988-03-16 1989-09-20 Fujitsu Ltd パターン形成方法
JPH02191959A (ja) * 1989-01-20 1990-07-27 Fujitsu Ltd レジストパターンの形成方法
JPH02228486A (ja) * 1989-03-01 1990-09-11 Nippon Telegr & Teleph Corp <Ntt> エッチング方法

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