JPS61188152U - - Google Patents

Info

Publication number
JPS61188152U
JPS61188152U JP7074785U JP7074785U JPS61188152U JP S61188152 U JPS61188152 U JP S61188152U JP 7074785 U JP7074785 U JP 7074785U JP 7074785 U JP7074785 U JP 7074785U JP S61188152 U JPS61188152 U JP S61188152U
Authority
JP
Japan
Prior art keywords
light source
light
integrator
optical axis
irradiated object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7074785U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7074785U priority Critical patent/JPS61188152U/ja
Publication of JPS61188152U publication Critical patent/JPS61188152U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Light Sources And Details Of Projection-Printing Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例の基本構成を示す説明図、第２
図Ａ及びＢは従来例の照度分布と輝度分布の説明
図、第３図は本考案実施例の説明図、第４図Ａ及
びＢは本考案実施例の照度分布と輝度分布の説明
図、第５図は第１インテグレーターと第２インテ
グレーターの関係説明図、第６図Ａ及びＢは各イ
ンテグレーターに入射する輝度分布の説明図であ
る。 １……光源、２……楕円集光鏡、３……インテ
グレーター、３１……第１インテグレーター、３
２……第２インテグレーター、３１ａ，３２ａ…
…レンズ素子、４……被照射物、５……コンデン
サーレンズ、６……原画、７……縮小レンズ、Ｌ
……光軸。 Fig. 1 is an explanatory diagram showing the basic configuration of a conventional example;
Figures A and B are explanatory diagrams of the illuminance distribution and brightness distribution of the conventional example, Figure 3 is an explanatory diagram of the embodiment of the present invention, and Figures 4 A and B are explanatory diagrams of the illuminance distribution and luminance distribution of the embodiment of the present invention, FIG. 5 is an explanatory diagram of the relationship between the first integrator and the second integrator, and FIGS. 6A and 6B are explanatory diagrams of the luminance distribution incident on each integrator. 1...Light source, 2...Elliptical condenser mirror, 3...Integrator, 31...First integrator, 3
2...Second integrator, 31a, 32a...
... Lens element, 4 ... Irradiated object, 5 ... Condenser lens, 6 ... Original image, 7 ... Reduction lens, L
……optical axis.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 光源と、この光源を取り囲むよう配置された楕
円集光鏡と、光軸上に直列に配置された２個のイ
ンテグレーターを含み、光源よりの光を被照射物
に投射する光学機構とよりなる光照射装置。 A light consisting of an optical mechanism that includes a light source, an elliptical condensing mirror arranged to surround the light source, and two integrators arranged in series on the optical axis, and projects the light from the light source onto the irradiated object. Irradiation device.
JP7074785U 1985-05-15 1985-05-15 Pending JPS61188152U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7074785U JPS61188152U (en) 1985-05-15 1985-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7074785U JPS61188152U (en) 1985-05-15 1985-05-15

Publications (1)

Publication Number Publication Date
JPS61188152U true JPS61188152U (en) 1986-11-22

Family

ID=30607610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7074785U Pending JPS61188152U (en) 1985-05-15 1985-05-15

Country Status (1)

Country Link
JP (1) JPS61188152U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01152411A (en) * 1987-09-17 1989-06-14 Olympus Optical Co Ltd Illuminating optical system for semiconductor exposing device
JPH01259533A (en) * 1988-04-11 1989-10-17 Nikon Corp Illuminating optic device
WO2014188746A1 (en) * 2013-05-20 2014-11-27 山下電装株式会社 Solar simulator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850510A (en) * 1981-09-21 1983-03-25 Mikasa Kk Illumination optical system of integrated circuit pattern transfer device
JPS5850511A (en) * 1981-09-21 1983-03-25 Mikasa Kk Illumination optical system of integrated circuit pattern transfer device
JPS60102737A (en) * 1983-11-10 1985-06-06 Canon Inc Shutter device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850510A (en) * 1981-09-21 1983-03-25 Mikasa Kk Illumination optical system of integrated circuit pattern transfer device
JPS5850511A (en) * 1981-09-21 1983-03-25 Mikasa Kk Illumination optical system of integrated circuit pattern transfer device
JPS60102737A (en) * 1983-11-10 1985-06-06 Canon Inc Shutter device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01152411A (en) * 1987-09-17 1989-06-14 Olympus Optical Co Ltd Illuminating optical system for semiconductor exposing device
JPH01259533A (en) * 1988-04-11 1989-10-17 Nikon Corp Illuminating optic device
WO2014188746A1 (en) * 2013-05-20 2014-11-27 山下電装株式会社 Solar simulator

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