JPH01259533A - Illuminating optic device - Google Patents

Illuminating optic device

Info

Publication number
JPH01259533A
JPH01259533A JP63088453A JP8845388A JPH01259533A JP H01259533 A JPH01259533 A JP H01259533A JP 63088453 A JP63088453 A JP 63088453A JP 8845388 A JP8845388 A JP 8845388A JP H01259533 A JPH01259533 A JP H01259533A
Authority
JP
Japan
Prior art keywords
optical integrator
etc
rocked
rocking
allows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63088453A
Other versions
JP2662562B2 (en
Inventor
Yutaka Ichihara
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP63088453A priority Critical patent/JP2662562B2/en
Publication of JPH01259533A publication Critical patent/JPH01259533A/en
Priority claimed from US07/780,850 external-priority patent/US5307207A/en
Application granted granted Critical
Publication of JP2662562B2 publication Critical patent/JP2662562B2/en
Anticipated expiration legal-status Critical
Application status is Expired - Fee Related legal-status Critical

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70058Mask illumination systems
    • G03F7/70075Homogenization of illumination intensity in the mask plane, by using an integrator, e.g. fly's eye lenses, facet mirrors, glass rods, by using a diffusive optical element or by beam deflection

Abstract

PURPOSE: To eliminate exposure nonuniformity due to interference fringes produced in an exposed area on a wafer by providing a first rocking means which allows light entering a second optical integrator to be rocked at least one- dimensionally.
CONSTITUTION: A rocking means (a first scanning mirror-17, etc.) which allows light flux inciding a second optical integrator to be rocked at least in one direction (one dimension) is provided between a first-stage optical integrator (a fly eye lens 3, a single rod, or an optical fiber flux) and a second-stage optical integrator (a fly eye lens 5, etc.). Thus, the optical integrator is configures in two stages to allow illumination distribution on an object to be illuminated to be uniform and speckle pattern (interference fringe) to be smoothed satisfactorily by rocking a scanning mirror 17. It allows a uniform illumination light without any ghost, speckle, etc., to be obtained.
COPYRIGHT: (C)1989,JPO&Japio
JP63088453A 1988-04-11 1988-04-11 Exposure apparatus Expired - Fee Related JP2662562B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63088453A JP2662562B2 (en) 1988-04-11 1988-04-11 Exposure apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63088453A JP2662562B2 (en) 1988-04-11 1988-04-11 Exposure apparatus
US07/780,850 US5307207A (en) 1988-03-16 1991-10-23 Illuminating optical apparatus

Publications (2)

Publication Number Publication Date
JPH01259533A true JPH01259533A (en) 1989-10-17
JP2662562B2 JP2662562B2 (en) 1997-10-15

Family

ID=13943218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63088453A Expired - Fee Related JP2662562B2 (en) 1988-04-11 1988-04-11 Exposure apparatus

Country Status (1)

Country Link
JP (1) JP2662562B2 (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5534970A (en) * 1993-06-11 1996-07-09 Nikon Corporation Scanning exposure apparatus
US6235438B1 (en) 1997-10-07 2001-05-22 Nikon Corporation Projection exposure method and apparatus
US6522386B1 (en) 1997-07-24 2003-02-18 Nikon Corporation Exposure apparatus having projection optical system with aberration correction element
JP2006295068A (en) * 2005-04-14 2006-10-26 Sony Corp Irradiator
USRE39846E1 (en) 1992-11-05 2007-09-18 Nikon Corporation Illumination optical apparatus and scanning exposure apparatus
US7277155B2 (en) 1991-03-05 2007-10-02 Renesas Technology Corp. Exposure apparatus and method
JP2008277616A (en) * 2007-05-01 2008-11-13 Gigaphoton Inc Discharge exciting laser device for exposure
JP2009288608A (en) * 2008-05-30 2009-12-10 Toppan Printing Co Ltd Method for manufacturing optical component, and color filter
WO2010090190A1 (en) * 2009-02-03 2010-08-12 株式会社ブイ・テクノロジー Laser exposure device
CN103309139A (en) * 2012-03-09 2013-09-18 索尼公司 Illuminating unit and display
JP2013213896A (en) * 2012-04-02 2013-10-17 Sony Corp Illumination device and display apparatus
US9467670B2 (en) 2013-01-23 2016-10-11 Mitsubishi Electric Corporation Projection display device
WO2017029729A1 (en) * 2015-08-19 2017-02-23 ギガフォトン株式会社 Laser device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147708A (en) * 1982-02-26 1983-09-02 Nippon Kogaku Kk <Nikon> Optical device for illumination
JPS61188517A (en) * 1985-02-18 1986-08-22 Canon Inc Illuminating optical system
JPS61212816A (en) * 1985-03-18 1986-09-20 Canon Inc Lighting equipment
JPS61188152U (en) * 1985-05-15 1986-11-22
JPS62231924A (en) * 1986-04-02 1987-10-12 Hitachi Ltd Exposure lighting device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147708A (en) * 1982-02-26 1983-09-02 Nippon Kogaku Kk <Nikon> Optical device for illumination
JPS61188517A (en) * 1985-02-18 1986-08-22 Canon Inc Illuminating optical system
JPS61212816A (en) * 1985-03-18 1986-09-20 Canon Inc Lighting equipment
JPS61188152U (en) * 1985-05-15 1986-11-22
JPS62231924A (en) * 1986-04-02 1987-10-12 Hitachi Ltd Exposure lighting device

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7604925B2 (en) 1991-03-05 2009-10-20 Renesas Technology Corporation Exposure apparatus and method
US7598020B2 (en) 1991-03-05 2009-10-06 Renesas Technology Corporation Exposure apparatus and method
US7277155B2 (en) 1991-03-05 2007-10-02 Renesas Technology Corp. Exposure apparatus and method
USRE39846E1 (en) 1992-11-05 2007-09-18 Nikon Corporation Illumination optical apparatus and scanning exposure apparatus
USRE37309E1 (en) * 1993-06-11 2001-08-07 Nikon Corporation Scanning exposure apparatus
US5534970A (en) * 1993-06-11 1996-07-09 Nikon Corporation Scanning exposure apparatus
US6522386B1 (en) 1997-07-24 2003-02-18 Nikon Corporation Exposure apparatus having projection optical system with aberration correction element
US6522390B2 (en) 1997-10-07 2003-02-18 Nikon Corporation Projection exposure method and apparatus
US6235438B1 (en) 1997-10-07 2001-05-22 Nikon Corporation Projection exposure method and apparatus
JP2006295068A (en) * 2005-04-14 2006-10-26 Sony Corp Irradiator
JP2008277616A (en) * 2007-05-01 2008-11-13 Gigaphoton Inc Discharge exciting laser device for exposure
JP2009288608A (en) * 2008-05-30 2009-12-10 Toppan Printing Co Ltd Method for manufacturing optical component, and color filter
WO2010090190A1 (en) * 2009-02-03 2010-08-12 株式会社ブイ・テクノロジー Laser exposure device
JP2010182731A (en) * 2009-02-03 2010-08-19 Toppan Printing Co Ltd Laser exposure device
CN103309139A (en) * 2012-03-09 2013-09-18 索尼公司 Illuminating unit and display
JP2013186366A (en) * 2012-03-09 2013-09-19 Sony Corp Illuminating unit and display
JP2013213896A (en) * 2012-04-02 2013-10-17 Sony Corp Illumination device and display apparatus
US9347626B2 (en) 2012-04-02 2016-05-24 Sony Corporation Illumination device including uniformization optical member including a plurality of unit cells and display unit including the illumination device
US9467670B2 (en) 2013-01-23 2016-10-11 Mitsubishi Electric Corporation Projection display device
WO2017029729A1 (en) * 2015-08-19 2017-02-23 ギガフォトン株式会社 Laser device

Also Published As

Publication number Publication date
JP2662562B2 (en) 1997-10-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees