JPH02102719U - - Google Patents
Info
- Publication number
- JPH02102719U JPH02102719U JP989089U JP989089U JPH02102719U JP H02102719 U JPH02102719 U JP H02102719U JP 989089 U JP989089 U JP 989089U JP 989089 U JP989089 U JP 989089U JP H02102719 U JPH02102719 U JP H02102719U
- Authority
- JP
- Japan
- Prior art keywords
- original image
- reduction
- illumination
- exposure apparatus
- projection exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
Description
第１図は本案の一実施例の縮小投影露光装置を
示す図である。
１……水銀ランプ、２……楕円鏡、３……多光
束発生部材、４……コンデンサレンズ群、５……
縮小レンズ、６……縮小レンズ入射瞳、７……レ
テイクル、８……ハーフミラー、９……入射光、
１０……反射光。
FIG. 1 is a diagram showing a reduction projection exposure apparatus according to an embodiment of the present invention. 1...Mercury lamp, 2...Elliptical mirror, 3...Multi-luminous flux generating member, 4...Condenser lens group, 5...
Reduction lens, 6... Reduction lens entrance pupil, 7... Reticle, 8... Half mirror, 9... Incident light,
10...Reflected light.
Claims (1)
り成る縮小投影露光装置において、原画と照明装
置の間に多重反射を防ぐハーフミラーを設けたこ
とを特徴とする縮小投影露光装置。 A reduction projection exposure apparatus comprising an original image, a device for transmitting illumination thereof, and a reduction lens, characterized in that a half mirror for preventing multiple reflections is provided between the original image and the illumination device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989089U JPH02102719U (en) | 1989-02-01 | 1989-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989089U JPH02102719U (en) | 1989-02-01 | 1989-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102719U true JPH02102719U (en) | 1990-08-15 |
Family
ID=31217034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP989089U Pending JPH02102719U (en) | 1989-02-01 | 1989-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102719U (en) |
-
1989
- 1989-02-01 JP JP989089U patent/JPH02102719U/ja active Pending
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