JPH0375529U - - Google Patents
Info
- Publication number
- JPH0375529U JPH0375529U JP13535389U JP13535389U JPH0375529U JP H0375529 U JPH0375529 U JP H0375529U JP 13535389 U JP13535389 U JP 13535389U JP 13535389 U JP13535389 U JP 13535389U JP H0375529 U JPH0375529 U JP H0375529U
- Authority
- JP
- Japan
- Prior art keywords
- wavelength
- exposure
- exposure apparatus
- laminated lens
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 1
Description
第1図はこの考案の一実施例である露光装置の
概略構成を示す説明図、第2図は第1図に設けら
れたフイルタの波長−透過率の特性を示す特性曲
線図である。
図中、1……ランプ、2……楕円集光鏡、3,
6……平面鏡、4……フイルタ、5……インテグ
レータレンズ、7……コンデンサレンズ、8……
マスク、9……貼合わせレンズ、10……ワーク
。
FIG. 1 is an explanatory diagram showing the schematic structure of an exposure apparatus which is an embodiment of the invention, and FIG. 2 is a characteristic curve diagram showing the wavelength-transmittance characteristic of the filter provided in FIG. 1. In the figure, 1... lamp, 2... elliptical condensing mirror, 3,
6...Plane mirror, 4...Filter, 5...Integrator lens, 7...Condenser lens, 8...
Mask, 9...Laminated lens, 10...Work.
Claims (1)
むランプと、貼合わせレンズとを具備した露光装
置において、前記ランプと貼合わせレンズとの間
の光路上に、露光波長よりも短い所定の波長以下
の光を反射または吸収するフイルタが設けられて
なることを特徴とする露光装置。 In an exposure apparatus equipped with a lamp whose emitted light component includes deep ultraviolet rays shorter than the exposure wavelength, and a laminated lens, an ultraviolet ray having a predetermined wavelength or less shorter than the exposure wavelength is placed on the optical path between the lamp and the laminated lens. An exposure apparatus comprising a filter that reflects or absorbs light.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13535389U JPH0375529U (en) | 1989-11-24 | 1989-11-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13535389U JPH0375529U (en) | 1989-11-24 | 1989-11-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0375529U true JPH0375529U (en) | 1991-07-29 |
Family
ID=31682624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13535389U Pending JPH0375529U (en) | 1989-11-24 | 1989-11-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0375529U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015018972A (en) * | 2013-07-11 | 2015-01-29 | キヤノン株式会社 | Imprint apparatus and method for manufacturing article |
JP2018205682A (en) * | 2017-06-06 | 2018-12-27 | 株式会社オーク製作所 | Exposure apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6139517A (en) * | 1984-07-30 | 1986-02-25 | Hitachi Ltd | Lighting device |
-
1989
- 1989-11-24 JP JP13535389U patent/JPH0375529U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6139517A (en) * | 1984-07-30 | 1986-02-25 | Hitachi Ltd | Lighting device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015018972A (en) * | 2013-07-11 | 2015-01-29 | キヤノン株式会社 | Imprint apparatus and method for manufacturing article |
US9625837B2 (en) | 2013-07-11 | 2017-04-18 | Canon Kabushiki Kaisha | Imprint apparatus and method of manufacturing article |
JP2018205682A (en) * | 2017-06-06 | 2018-12-27 | 株式会社オーク製作所 | Exposure apparatus |
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