JPH0334232U - - Google Patents
Info
- Publication number
- JPH0334232U JPH0334232U JP9388689U JP9388689U JPH0334232U JP H0334232 U JPH0334232 U JP H0334232U JP 9388689 U JP9388689 U JP 9388689U JP 9388689 U JP9388689 U JP 9388689U JP H0334232 U JPH0334232 U JP H0334232U
- Authority
- JP
- Japan
- Prior art keywords
- selection filter
- wavelength
- mercury lamp
- wavelength selection
- monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052753 mercury Inorganic materials 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 claims description 2
- 230000005856 abnormality Effects 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
Landscapes
- Control Of Exposure In Printing And Copying (AREA)
Description
第１図は本案実施例の概略図、第２図は波長選
択フイルタを装着した回転盤を示す図、第３図は
露光光の波長スペクトルを示す図である。
１……水銀ランプ、２……楕円面鏡、３……回
転盤、４……インテグレータ、５……モータ、６
……第一平面鏡、７……第二平面鏡、８……コン
デンサレンズ、９……レテイクル、１０……入射
瞳、１１……縮小レンズ、１２……ウエハ、１３
……集光レンズ、１４……光フアイバ、１５……
分光光度計、１６……回転盤制御装置、１７……
波長選択フイルタ。
FIG. 1 is a schematic diagram of an embodiment of the present invention, FIG. 2 is a diagram showing a rotary disk equipped with a wavelength selection filter, and FIG. 3 is a diagram showing the wavelength spectrum of exposure light. 1...Mercury lamp, 2...Elliptical mirror, 3...Rotary disk, 4...Integrator, 5...Motor, 6
...First plane mirror, 7...Second plane mirror, 8...Condenser lens, 9...Reticle, 10...Entrance pupil, 11...Reducing lens, 12...Wafer, 13
... Condensing lens, 14 ... Optical fiber, 15 ...
Spectrophotometer, 16... Turntable control device, 17...
Wavelength selection filter.
Claims (1)
、これにより、水銀ランプ及び、波長選択フイル
タの異常を感知し、自動で、これらのうち、一方
又は、両方を交換する機能を有することを特徴と
する縮小投影露光装置。 It has a function of monitoring the wavelength spectrum of exposure light, thereby detecting abnormalities in the mercury lamp and the wavelength selection filter, and automatically replacing one or both of them. Reduction projection exposure equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9388689U JPH0334232U (en) | 1989-08-11 | 1989-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9388689U JPH0334232U (en) | 1989-08-11 | 1989-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0334232U true JPH0334232U (en) | 1991-04-04 |
Family
ID=31643246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9388689U Pending JPH0334232U (en) | 1989-08-11 | 1989-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334232U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020016758A (en) * | 2018-07-25 | 2020-01-30 | 株式会社オーク製作所 | Ultraviolet ray irradiation device |
-
1989
- 1989-08-11 JP JP9388689U patent/JPH0334232U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020016758A (en) * | 2018-07-25 | 2020-01-30 | 株式会社オーク製作所 | Ultraviolet ray irradiation device |
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