JPS61187410U - - Google Patents
Info
- Publication number
- JPS61187410U JPS61187410U JP7040385U JP7040385U JPS61187410U JP S61187410 U JPS61187410 U JP S61187410U JP 7040385 U JP7040385 U JP 7040385U JP 7040385 U JP7040385 U JP 7040385U JP S61187410 U JPS61187410 U JP S61187410U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- plane
- movable
- along
- reference plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985070403U JPH0544726Y2 (tr) | 1985-05-13 | 1985-05-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985070403U JPH0544726Y2 (tr) | 1985-05-13 | 1985-05-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61187410U true JPS61187410U (tr) | 1986-11-21 |
JPH0544726Y2 JPH0544726Y2 (tr) | 1993-11-15 |
Family
ID=30606951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985070403U Expired - Lifetime JPH0544726Y2 (tr) | 1985-05-13 | 1985-05-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0544726Y2 (tr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008082703A (ja) * | 2006-09-25 | 2008-04-10 | Olympus Corp | 基板検査装置および基板検査方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS431095Y1 (tr) * | 1966-04-11 | 1968-01-19 | ||
JPS5890101A (ja) * | 1981-11-25 | 1983-05-28 | Mitsutoyo Mfg Co Ltd | 三次元測定機 |
-
1985
- 1985-05-13 JP JP1985070403U patent/JPH0544726Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS431095Y1 (tr) * | 1966-04-11 | 1968-01-19 | ||
JPS5890101A (ja) * | 1981-11-25 | 1983-05-28 | Mitsutoyo Mfg Co Ltd | 三次元測定機 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008082703A (ja) * | 2006-09-25 | 2008-04-10 | Olympus Corp | 基板検査装置および基板検査方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0544726Y2 (tr) | 1993-11-15 |
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