JPS61187410U - - Google Patents

Info

Publication number
JPS61187410U
JPS61187410U JP7040385U JP7040385U JPS61187410U JP S61187410 U JPS61187410 U JP S61187410U JP 7040385 U JP7040385 U JP 7040385U JP 7040385 U JP7040385 U JP 7040385U JP S61187410 U JPS61187410 U JP S61187410U
Authority
JP
Japan
Prior art keywords
axis
plane
movable
along
reference plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7040385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544726Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985070403U priority Critical patent/JPH0544726Y2/ja
Publication of JPS61187410U publication Critical patent/JPS61187410U/ja
Application granted granted Critical
Publication of JPH0544726Y2 publication Critical patent/JPH0544726Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1985070403U 1985-05-13 1985-05-13 Expired - Lifetime JPH0544726Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (enExample) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (enExample) 1985-05-13 1985-05-13

Publications (2)

Publication Number Publication Date
JPS61187410U true JPS61187410U (enExample) 1986-11-21
JPH0544726Y2 JPH0544726Y2 (enExample) 1993-11-15

Family

ID=30606951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985070403U Expired - Lifetime JPH0544726Y2 (enExample) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPH0544726Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431095Y1 (enExample) * 1966-04-11 1968-01-19
JPS5890101A (ja) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd 三次元測定機

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431095Y1 (enExample) * 1966-04-11 1968-01-19
JPS5890101A (ja) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd 三次元測定機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法

Also Published As

Publication number Publication date
JPH0544726Y2 (enExample) 1993-11-15

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