JPS61187410U - - Google Patents

Info

Publication number
JPS61187410U
JPS61187410U JP7040385U JP7040385U JPS61187410U JP S61187410 U JPS61187410 U JP S61187410U JP 7040385 U JP7040385 U JP 7040385U JP 7040385 U JP7040385 U JP 7040385U JP S61187410 U JPS61187410 U JP S61187410U
Authority
JP
Japan
Prior art keywords
axis
plane
movable
along
reference plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7040385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544726Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985070403U priority Critical patent/JPH0544726Y2/ja
Publication of JPS61187410U publication Critical patent/JPS61187410U/ja
Application granted granted Critical
Publication of JPH0544726Y2 publication Critical patent/JPH0544726Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1985070403U 1985-05-13 1985-05-13 Expired - Lifetime JPH0544726Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (enrdf_load_stackoverflow) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (enrdf_load_stackoverflow) 1985-05-13 1985-05-13

Publications (2)

Publication Number Publication Date
JPS61187410U true JPS61187410U (enrdf_load_stackoverflow) 1986-11-21
JPH0544726Y2 JPH0544726Y2 (enrdf_load_stackoverflow) 1993-11-15

Family

ID=30606951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985070403U Expired - Lifetime JPH0544726Y2 (enrdf_load_stackoverflow) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPH0544726Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431095Y1 (enrdf_load_stackoverflow) * 1966-04-11 1968-01-19
JPS5890101A (ja) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd 三次元測定機

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431095Y1 (enrdf_load_stackoverflow) * 1966-04-11 1968-01-19
JPS5890101A (ja) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd 三次元測定機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法

Also Published As

Publication number Publication date
JPH0544726Y2 (enrdf_load_stackoverflow) 1993-11-15

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