JPS61185698A - Turbo molecular pump - Google Patents
Turbo molecular pumpInfo
- Publication number
- JPS61185698A JPS61185698A JP60024525A JP2452585A JPS61185698A JP S61185698 A JPS61185698 A JP S61185698A JP 60024525 A JP60024525 A JP 60024525A JP 2452585 A JP2452585 A JP 2452585A JP S61185698 A JPS61185698 A JP S61185698A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- rotor
- permanent magnet
- molecular pump
- rotor shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
- F16C39/06—Relieving load on bearings using magnetic means
- F16C39/063—Permanent magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はロータに取付けられた動翼とケーシングに取付
けられた静置とがロータの軸方向に交互に配設されてい
るターボ分子ポンプの改良に関するものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a turbo molecular pump in which moving blades attached to a rotor and stationary blades attached to a casing are arranged alternately in the axial direction of the rotor. It is about improvement.
（従来の技術）
従来の前記ターボ分子ポンプを第２図によシ説明すると
、（１）がケーシング、（２）が同ケーシング（１）に
設けた吸気口、（３）が同ケーシング（１）に設けた排
気口、（４）が同ケーシング（１）に取付けた静翼、（
５）がロータ（６）に取付けた動翼で、同動Ｊｉ！（５
）と上記静翼（４）とがロータ（６）の回転軸（力方向
に交互に配設されている。また（８）が同回転軸（力の
周シに配設したステータで、同ステータ（８）と上記回
転軸（力との間には、ロータ（６）を高速回転させるた
めに上部軸受としてのボールベアリング（１１０）と下
部軸受としてのボールベアリング（１１１）とモータ（
１３）とが設けられている。なお回転軸（力には、上・
下軸受としてのボールベアリング（１１０）及び（１１
１）へ潤滑油（１２）を供給するために油供給孔（９）
が設けられている。また上記モータ（１３）は、回転軸
（力に装着された円筒状のモータ・ロータ（１３α）と
ステータ（８）に装着された円筒状のモータ・ステータ
（１３ｂ）とによシ構成され、これらが回転軸（７）と
同心に配置されている。以上のターボ分子ポンプで、動
翼（５）と回転軸（力とをもつロータ（６）がモータ（
１３）によシ高速回転すると、気体分子が矢印Ａ１→Ａ
２方向に流れて、吸気口（２）が高真空に、排気口（３
）が低真空になる。(Prior Art) To explain the conventional turbo molecular pump with reference to FIG. 2, (1) is the casing, (2) is the intake port provided in the casing (1), and (3) is the casing (1). ), the exhaust port (4) is the stator vane attached to the same casing (1), (
5) is the rotor blade attached to the rotor (6), and the rotor Ji! (5
) and the stator blades (4) are arranged alternately in the rotation axis of the rotor (6) (in the force direction). Between the stator (8) and the rotating shaft (force), there are a ball bearing (110) as an upper bearing, a ball bearing (111) as a lower bearing, and a motor (
13) is provided. Note that the rotation axis (force includes upper and
Ball bearings (110) and (11) as lower bearings
Oil supply hole (9) to supply lubricating oil (12) to 1)
is provided. The motor (13) is composed of a cylindrical motor rotor (13α) attached to a rotating shaft (force) and a cylindrical motor stator (13b) attached to a stator (8), These are arranged concentrically with the rotating shaft (7).In the above turbo molecular pump, the rotor (6) with the rotor blades (5) and the rotating shaft (power) is connected to the motor (
13) When rotating at high speed, gas molecules move from arrow A1 to A
It flows in two directions, with the intake port (2) being in high vacuum and the exhaust port (3) being in high vacuum.
) becomes a low vacuum.
（発明が解決しようとする問題点）
前記第２図に示すターボ分子ポンプでは、長期間運転す
ると、ボールベアリング（１１０）（１１１）が劣化す
るので、ポンプを分解して、これらを交換する必要があ
る。特に排気性能を向上させるために高速化しようとす
る場合、油供給孔（９）を通しての潤滑油（１１２）の
供給、潤滑では、劣化が著しい。(Problems to be Solved by the Invention) In the turbo molecular pump shown in FIG. 2, the ball bearings (110) and (111) deteriorate when operated for a long period of time, so it is necessary to disassemble the pump and replace them. There is. Particularly when attempting to increase the speed in order to improve exhaust performance, the supply of lubricating oil (112) and lubrication through the oil supply hole (9) causes significant deterioration.
また潤滑油（１１２）は、循環する間に蒸発するため、
補給が必要である。それに加えて、被真空排気容器の排
気後、ターボ分子ポンプの運転を停止すると、潤滑油（
１２）が被真空排気容器内に逆拡散してしまう可能性が
ある。また上・下軸受がボールベアリングであるために
、振動や騒音が大きくて、用途が制限される上Ｋ、軸受
損失が大きくて、電気代（ランニングコスト）が高くな
るという欠点があった。Also, since the lubricating oil (112) evaporates during circulation,
Replenishment is required. In addition, if the operation of the turbomolecular pump is stopped after the evacuated container is evacuated, the lubricating oil (
12) may back-diffuse into the evacuated container. In addition, since the upper and lower bearings are ball bearings, they generate large vibrations and noise, which limits their applications, and also have the drawbacks of high bearing loss and high electricity costs (running costs).
本発明は前記の問題点に対処するもので、ロータに取付
けられた動翼とケーシングに取付けられた静翼とがロー
タの軸方向に交互に配設されているターボ分子ポンプに
おいて、前記ケーシング内の低真空側で前記ロータ軸の
上部を永久磁石をもつ磁気軸受により、同ロータ軸の下
部をロータ軸方向に負荷能力のあるすベシ軸受により、
回転可能に支持したことを特徴とするターボ分子ポンプ
に係シ、その目的とする処は、軸受の交換頻度を少なく
できる。適用範囲を拡大できる。ランニングコストを低
減できる。被真空排気容器への逆拡散を防止できる。さ
らに吸気側で高真空を得られる改良されたターボ分子ポ
ンプを供する点にある。The present invention addresses the above-mentioned problems, and provides a turbo-molecular pump in which moving blades attached to a rotor and stator vanes attached to a casing are arranged alternately in the axial direction of the rotor. On the low vacuum side of the rotor shaft, the upper part of the rotor shaft is mounted by a magnetic bearing with a permanent magnet, and the lower part of the rotor shaft is mounted by a flat bearing capable of carrying loads in the rotor axial direction.
The present invention relates to a turbomolecular pump that is rotatably supported, and its purpose is to reduce the frequency of bearing replacement. The scope of application can be expanded. Running costs can be reduced. Back-diffusion into the evacuated container can be prevented. Another object of the present invention is to provide an improved turbomolecular pump that can obtain a high vacuum on the intake side.
（問題点を解決するための手段）
本発明は前記のようにロータに取付けられた動翼とケー
シングに取付けられた静翼とがロータの軸方向に交互に
配設されているターボ分子ポンプにおいて、前記ケーシ
ング内の低真空側で前記ロータ軸の上部を永久磁石をも
つ磁気軸受により、同ロータ軸の下部をロータ軸方向に
負荷能力のあるすべ）軸受により、回転可能に支持して
お）、上部軸受が非接触であるため、劣化することがな
くて、ポンプを分解して交換する必要が全くない。(Means for Solving the Problems) The present invention provides a turbo molecular pump in which moving blades attached to the rotor and stationary blades attached to the casing are arranged alternately in the axial direction of the rotor as described above. , the upper part of the rotor shaft is rotatably supported on the low vacuum side of the casing by a magnetic bearing having a permanent magnet, and the lower part of the rotor shaft is rotatably supported by a bearing capable of carrying loads in the rotor axial direction. Since the upper bearing is non-contact, it will not deteriorate and there is no need to disassemble and replace the pump.
また下部軸受も、通常の運転状態では、はとんど劣化す
ることがなく、ポンプを分解して交換する頻度は、ボー
ルベアリングに比較し遥かに小さくて、軸受の交換頻度
が少なくなる。また振動や騒音が微少であシ、撮動を嫌
う装置への取シ付けや騒音を嫌う場所での使用が可能で
、適用範囲が拡大される。また軸受損失が少なくて、ラ
ンニングコストが低減する。また潤滑油を循環させる必
要がないため、高粘度の潤滑油、即ち、蒸発量の極めて
小さい潤滑油を使用できて、潤滑油の補給をほとんど必
要とせず、被真空排気容器内への逆拡散もない。また上
・下部軸受等のようにガスを吸着し易い構成部品の全て
を排気（低真空）側に配置できて、吸気側で高真空が達
成される。The lower bearing also hardly deteriorates under normal operating conditions, and the frequency of disassembling and replacing the pump is much less than that of ball bearings, which reduces the frequency of bearing replacement. In addition, since the vibration and noise are minimal, it can be installed in devices that do not like photography or can be used in places that do not like noise, expanding the range of applications. Also, bearing loss is small, reducing running costs. In addition, since there is no need to circulate lubricating oil, it is possible to use high-viscosity lubricating oil, that is, lubricating oil with extremely low evaporation, and almost no replenishment of lubricating oil is required. Nor. Furthermore, all the components that easily absorb gas, such as the upper and lower bearings, can be placed on the exhaust (low vacuum) side, and high vacuum can be achieved on the intake side.
（実施例）
次に本発明のターボ分子ポンプを第１図に示す一実施例
によシ説明すると、（１）がケーシング、（２）が同ケ
ーシング（１）に設けた吸気口、（３）が同ケーシング
（１）に設けた排気口、（４）が同ケーシング（１）に
取付けた静翼、（５）がロータ（６）に取付けた動翼で
、同動翼（５）と上記静翼（４）とがロータ（６）の回
転軸（７）方向に交互に配設されている。また（８）が
同回転軸（力の周シに配設したステータで、同ステータ
（８）と上記回転軸（力との間の上部には、ロータ（６
）を高速回転させるために、永久磁石を用いた磁気軸受
（１０）Ａｔ上記回転軸（力の下方に負荷能力のあるす
ベシ軸受（１１）が、それぞれ配設されている。上記磁
気軸受（１０）は、ロータ（６）側の永久磁石（１０α
）とステータ（８）側の永久磁石（１０ｂ）とよシなシ
、これらが吸引するように配置され、永久磁石（１０α
）は磁石ホルダ（１４）により、永久磁石（１０ｂ）は
ステータ（８）により、保持されている。またすベシ軸
受（１１）は、ロータ（６）の回転軸（力に装着された
回転軸（１１α）と軸受支持部材（１５）に保持された
軸受器ＱｘＡ）とよシなシ、回転軸（１１α）の先端部
と軸受器（ＩＩＡ）とが潤滑油（１２）を介して接触す
るように構成され、ロータ（６）の回転軸（力の軸方向
及び軸直角方向の負荷能力を有する例えばスパイラルグ
ループベアリング等の動圧型軸受を使用している。なお
潤滑油α２には、蒸発量の極めて小さい（一般に粘度が
大きい）ものを使用する。(Example) Next, the turbomolecular pump of the present invention will be explained using an example shown in FIG. ) is the exhaust port provided in the same casing (1), (4) is the stationary blade attached to the same casing (1), (5) is the rotor blade attached to the rotor (6), and the rotor blade (5) and The stator vanes (4) are alternately arranged in the direction of the rotation axis (7) of the rotor (6). In addition, (8) is a stator disposed around the rotating shaft (power), and the rotor (6
), a magnetic bearing (10) using a permanent magnet and a flat bearing (11) with a load capacity are arranged below the rotating shaft (force). 10) is a permanent magnet (10α) on the rotor (6) side.
) and the permanent magnet (10b) on the stator (8) side are arranged so that they are attracted to each other, and the permanent magnet (10α
) is held by a magnet holder (14), and the permanent magnet (10b) is held by a stator (8). The bearing (11) is similar to the rotating shaft of the rotor (6) (the rotating shaft (11α) attached to the force and the bearing QxA held by the bearing support member (15)), and the rotating shaft The tip of the rotor (11α) and the bearing (IIA) are configured so as to be in contact with each other via the lubricating oil (12), For example, a hydrodynamic bearing such as a spiral group bearing is used.As the lubricating oil α2, one with an extremely small amount of evaporation (generally having a high viscosity) is used.
（作用） 次に前記第１図のターボ分子ポンプの作用を説明する。(effect) Next, the operation of the turbo molecular pump shown in FIG. 1 will be explained.
ロータ（６）側の永久磁石（１０α）とステータ（８）
側の永久磁石（ＩＯｂ）との磁気中心が同心に保持され
、またロータ（６）の回転中心がステータ（８）の軸心
と同心に保持されて、磁気軸受（１０）が上部軸受の機
能を具えることになる。またすべり軸受（１１）の軸受
皿（ｌｌｊ）は軸受支持部材（１５）によシステータ（
８）の軸心と同心に保持されて、適切なばね及びダンピ
ングを与えられておシ、軸方向にはロータ（６）の荷重
等に、軸直角方向には回転振動に対する負荷能力を具え
ている。また同すベシ軸受（１１）の回転軸（１１ｃＬ
）の先端部には溝が設けられ、これが回転軸の回転によ
）潤滑油（１２）を軸受皿（１１ｂ）内へ円滑に導入し
て、負荷能力を保つようにしており、同軸受皿（１１ｂ
）を含むすベシ軸受（１１）が下部軸受の機能を具える
ことになる。Permanent magnet (10α) on rotor (6) side and stator (8)
The magnetic center of the side permanent magnet (IOb) is held concentrically, and the rotation center of the rotor (6) is held concentrically with the axis of the stator (8), so that the magnetic bearing (10) functions as an upper bearing. It will be equipped with. In addition, the bearing plate (llj) of the sliding bearing (11) is attached to the system stator (11) by the bearing support member (15).
It is held concentrically with the axis of the rotor (6) and given appropriate spring and damping, and has a load capacity for the load of the rotor (6) in the axial direction and rotational vibration in the direction perpendicular to the axis. There is. In addition, the rotating shaft (11cL) of the same bearing (11)
) is provided with a groove at its tip, which smoothly introduces the lubricating oil (12) into the bearing plate (11b) as the rotating shaft rotates to maintain the load capacity. 11b
) will have the function of a lower bearing.
（発明の効果）
本発明は前記のようにロータに取付けられた動翼とケー
シングに取付けられた静翼とがロータの軸方向に交互に
配設されているターボ分子ポンプにおいて、前記ケーシ
ング内の低真空側で前記ロータ軸の上部を永久磁石をも
つ磁気軸受により、同ロータ軸の下部をロータ軸方向に
負荷能力のあるすベシ軸受により、回転可能に支持して
おシ、上部軸受が非接触であるため、劣化することがな
くて、ポンプを分解して交換する必要が全くない。(Effects of the Invention) The present invention provides a turbo molecular pump in which moving blades attached to the rotor and stationary blades attached to the casing are arranged alternately in the axial direction of the rotor, as described above. On the low vacuum side, the upper part of the rotor shaft is rotatably supported by a magnetic bearing with a permanent magnet, and the lower part of the rotor shaft is rotatably supported by a flat bearing with a load capacity in the rotor axial direction. Since it is a contact type, it does not deteriorate and there is no need to disassemble and replace the pump.
また下部軸受も、通常の運転状態では、はとんど劣化す
ることがなく、ポンプを分解して交換する頻度は、ボー
ルベアリングに比較し遥かに小さくて、軸受の交換頻度
を少なく：ｃきる。また振動や騒音が微少であシ、振動
を嫌う装置への取シ付けや騒音を嫌う場所での使用が可
能で、適用範囲を拡大できる。また軸受損失が少なくて
、２ンニングコストを低減できる。また潤滑油を循環さ
せる必要がないため、高粘度の潤滑油、即ち、蒸発量の
極めて小さい潤滑油を使用できて、潤滑油の補給をほと
んど必要とせず、被真空排気容器内への逆拡散を防止で
きる。また上・下部軸受等のようにガスを吸着し易い構
成部品の全てを排気（低真空）側に配置できて、°吸気
側で高真空を達成できる効果がある。The lower bearing also hardly deteriorates under normal operating conditions, and the frequency of disassembling and replacing the pump is much less than that of ball bearings, which reduces the frequency of bearing replacement. . In addition, it produces very little vibration and noise, so it can be installed in devices that do not like vibrations, and can be used in places that do not like noise, expanding the range of applications. Furthermore, bearing loss is small, and second running costs can be reduced. In addition, since there is no need to circulate lubricating oil, it is possible to use high-viscosity lubricating oil, that is, lubricating oil with extremely low evaporation, and almost no replenishment of lubricating oil is required. can be prevented. Additionally, all the components that easily absorb gas, such as the upper and lower bearings, can be placed on the exhaust (low vacuum) side, which has the effect of achieving high vacuum on the intake side.
以上本発明を実施例について説明したが、勿論本発明は
このような実施例にだけ局限されるものではなく、本発
明の精神を逸脱しない範囲内で種々の設計の改変を施し
うるものである。例えば、第１図に示す実施例では、上
部の磁気軸受（１０）の吸引力がロータ（６）の荷重と
同じ方向で、下部のすべり軸受（１１）の軸方向負荷を
増加させるように構成しておシ、この場合には、ロータ
（６）の重量が軽くても、上部の磁気軸受（１０）の軸
直角方向のばね及びダンピングを大きくとれて、回転系
の振動安定に有利であるが、第２図の実施例の場合には
、ロータ（６）の重量が重くて、下部のすべり軸受（１
１）の軸方向荷重を上部の磁気軸受（１０）の吸引力に
よυ軽減しようとする際に有効である。Although the present invention has been described above with reference to embodiments, it goes without saying that the present invention is not limited to such embodiments, and that various design modifications can be made without departing from the spirit of the present invention. . For example, in the embodiment shown in FIG. 1, the attractive force of the upper magnetic bearing (10) is configured to increase the axial load of the lower plain bearing (11) in the same direction as the load of the rotor (6). In this case, even if the weight of the rotor (6) is light, the spring and damping in the direction perpendicular to the axis of the upper magnetic bearing (10) can be large, which is advantageous for stabilizing vibrations in the rotating system. However, in the case of the embodiment shown in Fig. 2, the weight of the rotor (6) is so heavy that the lower sliding bearing (1
This is effective when trying to reduce the axial load of 1) by υ by the attractive force of the upper magnetic bearing (10).
第１図は本発明に係るターボ分子ポンプの一実施例を示
す縦断側面図、第２図は他の実施例を示す縦断側面図、
第３図は従来のターボ分子ポンプを示す縦断側面図であ
る。
（１）・・−ケーシング、（４）・・・静翼、（５）・
・・動翼、（６）・・・ロータ、（７）・−・ロータ軸
、（１０）・・・磁気軸受、（１１）・・・すべり軸受
。
復代理人弁理士岡本重文
外２名FIG. 1 is a longitudinal side view showing one embodiment of a turbomolecular pump according to the present invention, FIG. 2 is a longitudinal side view showing another embodiment,
FIG. 3 is a longitudinal sectional side view showing a conventional turbomolecular pump. (1)...Casing, (4)... Stator blade, (5)...
... Moving blade, (6) ... Rotor, (7) ... Rotor shaft, (10) ... Magnetic bearing, (11) ... Sliding bearing. Sub-representative patent attorney Shigefumi Okamoto and two others
Claims (1)
静翼とがロータの軸方向に交互に配設されているターボ
分子ポンプにおいて、前記ケーシング内の低真空側で前
記ロータ軸の上部を永久磁石をもつ磁気軸受により、同
ロータ軸の下部をロータ軸方向に負荷能力のあるすべり
軸受により、回転可能に支持したことを特徴とするター
ボ分子ポンプ。In a turbo-molecular pump in which moving blades attached to a rotor and stationary blades attached to a casing are arranged alternately in the axial direction of the rotor, the upper part of the rotor shaft is attached to a permanent magnet on the low vacuum side in the casing. A turbo-molecular pump characterized in that the lower part of the rotor shaft is rotatably supported by a sliding bearing having a load capacity in the rotor axial direction by a magnetic bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60024525A JPH0670440B2 (en) | 1985-02-13 | 1985-02-13 | Turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60024525A JPH0670440B2 (en) | 1985-02-13 | 1985-02-13 | Turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61185698A true JPS61185698A (en) | 1986-08-19 |
| JPH0670440B2 JPH0670440B2 (en) | 1994-09-07 |
Family
ID=12140568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60024525A Expired - Fee Related JPH0670440B2 (en) | 1985-02-13 | 1985-02-13 | Turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0670440B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63124897A (en) * | 1986-11-14 | 1988-05-28 | Mitsubishi Electric Corp | Turbo molecular pump device |
| US6784580B2 (en) * | 2000-03-28 | 2004-08-31 | Ibiden Co., Ltd. | Motor and pressure generating apparatus incorporating the motor |
| WO2010020341A1 (en) * | 2008-08-18 | 2010-02-25 | Daimler Ag | Compressor and method for operating a compressor and fuel cell unit having a compressor |
-
1985
- 1985-02-13 JP JP60024525A patent/JPH0670440B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63124897A (en) * | 1986-11-14 | 1988-05-28 | Mitsubishi Electric Corp | Turbo molecular pump device |
| US6784580B2 (en) * | 2000-03-28 | 2004-08-31 | Ibiden Co., Ltd. | Motor and pressure generating apparatus incorporating the motor |
| WO2010020341A1 (en) * | 2008-08-18 | 2010-02-25 | Daimler Ag | Compressor and method for operating a compressor and fuel cell unit having a compressor |
| US8882458B2 (en) | 2008-08-18 | 2014-11-11 | Daimler Ag | Compressor and method for operating a compressor and fuel cell device with a compressor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0670440B2 (en) | 1994-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5588754A (en) | Backup bearings for extreme speed touch down applications | |
| JP3723593B2 (en) | Friction pump | |
| JPS62261696A (en) | Turbo-molecular pumping plant | |
| CN106451894A (en) | High-speed permanent magnet motor using aerodynamic pressure foil bearings for supporting | |
| US9212665B2 (en) | Planetary-type auxiliary bearing for a hydrostatic primary bearing | |
| JPS61185698A (en) | Turbo molecular pump | |
| JPS5973624A (en) | Bearing apparatus for turbo charger | |
| EP0477924B1 (en) | Turbo vacuum pump | |
| JP2002332990A (en) | Turbo-type rotating machine | |
| JPS62111194A (en) | Turbo molecular pump | |
| JPH0431692A (en) | Bearing device for vacuum pump | |
| KR101449528B1 (en) | Rotor Damper using Magnet | |
| JPH04231699A (en) | High speed rotary type vacuum pump | |
| KR100853658B1 (en) | A compressor | |
| JP2022552208A (en) | Vacuum pump with axial magnetic bearings and gas foil radial bearings | |
| JP2563097Y2 (en) | Turbo molecular pump | |
| CN211623803U (en) | Thrust bearing assembly and air compressor | |
| JPH0749039Y2 (en) | Turbo molecular pump | |
| JPS61185697A (en) | Turbo molecular pump | |
| JPS61132797A (en) | Bearing unit for turbo molecular pump | |
| SU866654A1 (en) | Electric fan | |
| JPS61215494A (en) | Turbo molecular pump | |
| JPS63255597A (en) | Molecular turbopump | |
| JPH0436094A (en) | Vacuum pump | |
| JPS63259192A (en) | Turbo molecular pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |