JPS61184921U - - Google Patents
Info
- Publication number
- JPS61184921U JPS61184921U JP6860685U JP6860685U JPS61184921U JP S61184921 U JPS61184921 U JP S61184921U JP 6860685 U JP6860685 U JP 6860685U JP 6860685 U JP6860685 U JP 6860685U JP S61184921 U JPS61184921 U JP S61184921U
- Authority
- JP
- Japan
- Prior art keywords
- laminar flow
- recess
- flow element
- lid
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6860685U JPH0222647Y2 (https=) | 1985-05-09 | 1985-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6860685U JPH0222647Y2 (https=) | 1985-05-09 | 1985-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61184921U true JPS61184921U (https=) | 1986-11-18 |
| JPH0222647Y2 JPH0222647Y2 (https=) | 1990-06-19 |
Family
ID=30603503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6860685U Expired JPH0222647Y2 (https=) | 1985-05-09 | 1985-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222647Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6454220A (en) * | 1987-08-26 | 1989-03-01 | Hitachi Ltd | Small laminar flowmeter |
| JP2017191090A (ja) * | 2016-04-07 | 2017-10-19 | 日立金属株式会社 | バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3597527B2 (ja) * | 2003-05-19 | 2004-12-08 | シーケーディ株式会社 | 熱式流量計 |
| JP5808537B2 (ja) * | 2009-10-01 | 2015-11-10 | 株式会社堀場エステック | 流量測定機構及びマスフローコントローラ |
-
1985
- 1985-05-09 JP JP6860685U patent/JPH0222647Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6454220A (en) * | 1987-08-26 | 1989-03-01 | Hitachi Ltd | Small laminar flowmeter |
| JP2017191090A (ja) * | 2016-04-07 | 2017-10-19 | 日立金属株式会社 | バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0222647Y2 (https=) | 1990-06-19 |