JPS6454220A - Small laminar flowmeter - Google Patents

Small laminar flowmeter

Info

Publication number
JPS6454220A
JPS6454220A JP21008487A JP21008487A JPS6454220A JP S6454220 A JPS6454220 A JP S6454220A JP 21008487 A JP21008487 A JP 21008487A JP 21008487 A JP21008487 A JP 21008487A JP S6454220 A JPS6454220 A JP S6454220A
Authority
JP
Japan
Prior art keywords
flowmeter
capillary
flow rate
passage
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21008487A
Other languages
Japanese (ja)
Other versions
JPH07119636B2 (en
Inventor
Akira Miyake
Hiroshi Oki
Isao Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62210084A priority Critical patent/JPH07119636B2/en
Publication of JPS6454220A publication Critical patent/JPS6454220A/en
Publication of JPH07119636B2 publication Critical patent/JPH07119636B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Volume Flow (AREA)

Abstract

PURPOSE:To suppress the axial enlargement of a laminar flowmeter along a pipe, by using a capillary bend with an inlet approaching an outlet in the flowmeter. CONSTITUTION:A fluid flowing into an inlet chamber 2 enters into a capillary passage 1 at a groove end 4 and reaches an outlet chamber 3 passing through the other groove end 5 by way of a spiral passage. When the fluid passing through the capillary passage is laminar, a differential pressure equivalent to a drop in pressure is generated corresponding to a flow rate of the fluid. A diaphragm 6 for measuring the differential pressure is distorted and the resulting distortion is monitored as electrical signal. When a valve of the signal and the flow rate are inspected previously, the flow rate can be measured immediately. This enables miniaturization of the apparatus as compared with the flowmeter using a straight capillary tube by bending the shape of the capillary passage 1 spirally.
JP62210084A 1987-08-26 1987-08-26 Flowmeter Expired - Lifetime JPH07119636B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62210084A JPH07119636B2 (en) 1987-08-26 1987-08-26 Flowmeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62210084A JPH07119636B2 (en) 1987-08-26 1987-08-26 Flowmeter

Publications (2)

Publication Number Publication Date
JPS6454220A true JPS6454220A (en) 1989-03-01
JPH07119636B2 JPH07119636B2 (en) 1995-12-20

Family

ID=16583553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62210084A Expired - Lifetime JPH07119636B2 (en) 1987-08-26 1987-08-26 Flowmeter

Country Status (1)

Country Link
JP (1) JPH07119636B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0525320U (en) * 1991-09-14 1993-04-02 株式会社エステツク Laminar flow element
JPH06137914A (en) * 1992-10-27 1994-05-20 Yazaki Corp Flow rate measuring apparatus
JP2005539329A (en) * 2002-09-17 2005-12-22 エクシジェント テクノロジーズ， エルエルシー Flow control system
JP2009020124A (en) * 2008-10-27 2009-01-29 Horiba Stec Co Ltd Differential pressure flowmeter
CN111307228A (en) * 2020-02-26 2020-06-19 中国计量大学 Modular pressure level difference type laminar flow sensing element

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735718A (en) * 1980-08-12 1982-02-26 Citizen Watch Co Ltd Rectifying element
JPS57139819U (en) * 1981-02-26 1982-09-01
JPS5974327U (en) * 1982-11-10 1984-05-19 大倉電気株式会社 Diversion mechanism
JPS6130716A (en) * 1984-07-24 1986-02-13 Yamatake Honeywell Co Ltd Apparatus for measuring flow amount of gas
JPS61184921U (en) * 1985-05-09 1986-11-18

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735718A (en) * 1980-08-12 1982-02-26 Citizen Watch Co Ltd Rectifying element
JPS57139819U (en) * 1981-02-26 1982-09-01
JPS5974327U (en) * 1982-11-10 1984-05-19 大倉電気株式会社 Diversion mechanism
JPS6130716A (en) * 1984-07-24 1986-02-13 Yamatake Honeywell Co Ltd Apparatus for measuring flow amount of gas
JPS61184921U (en) * 1985-05-09 1986-11-18

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0525320U (en) * 1991-09-14 1993-04-02 株式会社エステツク Laminar flow element
JPH06137914A (en) * 1992-10-27 1994-05-20 Yazaki Corp Flow rate measuring apparatus
JP2005539329A (en) * 2002-09-17 2005-12-22 エクシジェント テクノロジーズ， エルエルシー Flow control system
JP4854197B2 (en) * 2002-09-17 2012-01-18 エービー サイエックス エルエルシー Flow control method and flow control device
JP2009020124A (en) * 2008-10-27 2009-01-29 Horiba Stec Co Ltd Differential pressure flowmeter
CN111307228A (en) * 2020-02-26 2020-06-19 中国计量大学 Modular pressure level difference type laminar flow sensing element
CN111307228B (en) * 2020-02-26 2022-03-18 中国计量大学 Modular pressure level difference type laminar flow sensing element

Also Published As

Publication number Publication date
JPH07119636B2 (en) 1995-12-20

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