JPS61184921U - - Google Patents
Info
- Publication number
- JPS61184921U JPS61184921U JP6860685U JP6860685U JPS61184921U JP S61184921 U JPS61184921 U JP S61184921U JP 6860685 U JP6860685 U JP 6860685U JP 6860685 U JP6860685 U JP 6860685U JP S61184921 U JPS61184921 U JP S61184921U
- Authority
- JP
- Japan
- Prior art keywords
- laminar flow
- recess
- flow element
- lid
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
第１図は、本考案による層流型流量計の一実施
例を説明するための要部断面構成図、第２図は、
平面図、第３図は、側面図、第４図は、本考案に
よる層流型流量計に使用して好適な溝板の一例を
示す斜視図である。
１……層流型流量計本体、２……蓋体、３……
溝板、４……押え板、５……Ｏリング、６……ビ
ス、７……ボルト、８……導管、９……差圧計、
１０，１１……継手。
FIG. 1 is a cross-sectional configuration diagram of essential parts for explaining an embodiment of a laminar flow meter according to the present invention, and FIG.
FIG. 3 is a plan view, FIG. 3 is a side view, and FIG. 4 is a perspective view showing an example of a groove plate suitable for use in a laminar flow meter according to the present invention. 1... Laminar flow meter body, 2... Lid body, 3...
Groove plate, 4... Holding plate, 5... O ring, 6... Screw, 7... Bolt, 8... Conduit, 9... Differential pressure gauge,
10, 11...Joint.
Claims (1)
孔と、該貫通孔の何れかに連通する流入口及び流
出口とを一体的に配設した本体、該本体の上記凹
陥部を気密に冠着する蓋体、上記凹陥部に挿入さ
れる寸法で前記貫通孔と対応連通する開口部をも
ち、該開口部間を被測定流体の層流条件を満足す
る寸法をもつ一定断面形状の平行した複数溝で連
通する同一形状の溝板を積層した層流エレメント
、該層流エレメントの開口部と連通する差圧検出
器からなり、前記層流エレメントは前記凹陥部に
挿入されるごとく前記蓋体内面で固着され、前記
差圧検出器が該蓋体上面に配設されていることを
特徴とする層流型流量計。 A main body integrally provided with a recess, a plurality of through holes penetrating the bottom surface of the recess, and an inlet and an outlet communicating with any of the through holes, the recess of the main body being airtight. A cap is attached to the cap, and has an opening that is sized to be inserted into the recess and corresponds to and communicates with the through hole. The laminar flow element is composed of a laminar flow element made of stacked groove plates of the same shape that communicate with each other through a plurality of grooves, and a differential pressure detector that communicates with the opening of the laminar flow element, and the laminar flow element is inserted into the recessed part of the lid. A laminar flow type flowmeter, characterized in that the lid is fixed on the inner surface of the body, and the differential pressure detector is disposed on the upper surface of the lid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6860685U JPH0222647Y2 (en) | 1985-05-09 | 1985-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6860685U JPH0222647Y2 (en) | 1985-05-09 | 1985-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61184921U true JPS61184921U (en) | 1986-11-18 |
| JPH0222647Y2 JPH0222647Y2 (en) | 1990-06-19 |
Family
ID=30603503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6860685U Expired JPH0222647Y2 (en) | 1985-05-09 | 1985-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222647Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6454220A (en) * | 1987-08-26 | 1989-03-01 | Hitachi Ltd | Small laminar flowmeter |
| JP2017191090A (en) * | 2016-04-07 | 2017-10-19 | 日立金属株式会社 | Bypass unit, base for flowmeter, base for flow rate controller, flowmeter, and flow rate controller |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3597527B2 (en) * | 2003-05-19 | 2004-12-08 | シーケーディ株式会社 | Thermal flow meter |
| JP5808537B2 (en) * | 2009-10-01 | 2015-11-10 | 株式会社堀場エステック | Flow measurement mechanism and mass flow controller |
-
1985
- 1985-05-09 JP JP6860685U patent/JPH0222647Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6454220A (en) * | 1987-08-26 | 1989-03-01 | Hitachi Ltd | Small laminar flowmeter |
| JP2017191090A (en) * | 2016-04-07 | 2017-10-19 | 日立金属株式会社 | Bypass unit, base for flowmeter, base for flow rate controller, flowmeter, and flow rate controller |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0222647Y2 (en) | 1990-06-19 |