JP2017191090A - Bypass unit, base for flowmeter, base for flow rate controller, flowmeter, and flow rate controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique capable of forming an accurate bypass flow pass and simplifying an assembling step of a flowmeter and a flow rate controller.SOLUTION: A bypass unit 101 includes: a bypass part 110 which is a plate-like member; and a pair of outside connection parts 120 which is a pair of plate-like members each laminated on two principal planes of the bypass part. The bypass part is constituted of one first member 111 or a laminated body of the first member. The first member is a thin plate-like member formed with a first introduction hole 111a, first lead-out hole 111b and grooves 111c communicating therebetween. The outside connection part is formed with a second introduction hole and a second lead-out hole. The bypass unit is configured to airtightly communicate between the first introduction hole and the second introduction hole and to airtightly communicate between the first lead-out hole and the second lead-out hole.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a bypass unit, a base for a flow meter, a base for a flow control device, a flow meter, and a flow control device. More specifically, the present invention relates to a bypass unit, a flow meter base, and a flow rate control device base in which a main flow path through which a fluid whose flow rate is to be measured and a bypass interposed in the main flow path are integrally formed. , A flow meter, and a flow control device.

  In this technical field, a flow meter including a so-called “bypass” as a resistor provided in a main flow path of fluid is known. The bypass in the thermal flow sensor functions as a laminar flow element that determines a flow dividing ratio between the sensor tube that communicates the upstream side and the downstream side of the bypass in the main channel and the main channel. The bypass in the differential pressure type flow sensor functions as a differential pressure generating means for generating a pressure difference between the upstream side and the downstream side of the bypass in the main flow path.

  As a typical bypass structure, for example, a structure in which a plurality of capillaries (capillary tubes) are bundled in parallel with each other (see, for example, Patent Document 1), a communication path from a through hole formed in the center toward the outer periphery A structure in which a plurality of discs formed with a plurality of circular plates are laminated in the axial direction (see, for example, Patent Document 2), and a multilayered structure in which a corrugated plate and a flat thin plate are stacked and wound in a spiral shape ( For example, see Patent Documents 3 and 4.).

  However, when the bypass having the above structure is manufactured with general processing accuracy, the variation in the cross-sectional area of the entire flow path in the bypass (hereinafter sometimes referred to as “bypass flow path”) increases. There is an increased risk that accurate flow measurement will be difficult. That is, in the manufacture of the bypass having the above-described structure, an advanced manufacturing technique capable of achieving extremely high processing accuracy is required. As a result, there is a problem in that if a bypass having high dimensional accuracy is manufactured to achieve high measurement accuracy, the manufacturing cost increases.

  Furthermore, a predetermined number of thin plates (etching plates) in which a large number of pores having the same shape and arrangement are formed are laminated by row bonding or diffusion bonding in a state where the positions (phases) of these pores are matched. In addition, bypasses (laminar flow elements) manufactured by unitization are also known (see, for example, Patent Documents 5 and 6).

  However, since the length of the bypass flow path in the bypass is proportional to the number of stacked etching plates, when trying to form a long bypass flow path, the positions (phases) of the pores of many etching plates were matched. Must be joined in state. As a result, there are problems that the production efficiency is deteriorated and the defect rate is increased. Further, in order to form a large number of pores in the etching plate with high dimensional accuracy, an advanced manufacturing technique capable of achieving extremely high processing accuracy is required. Therefore, even in the bypass described above, there is a problem that manufacturing cost is increased if a bypass having high dimensional accuracy is manufactured to achieve high measurement accuracy.

JP 2005-534007 A Japanese Patent Publication No. 54-3743 (Japanese Patent Laid-Open No. 50-2968) Japanese Utility Model Publication No. 4-45925 JP 2009-192220 A Japanese Patent Publication No.1-40300 JP 2001-336958 A

  As described above, in the technical field, there is still a demand for a new technique that can form a bypass flow path with high dimensional accuracy while suppressing an increase in manufacturing cost.

  On the other hand, there is also a problem that the process of assembling the bypass according to the prior art (hereinafter sometimes referred to as “conventional bypass”) as a flow meter or a flow control device is complicated. For example, in the assembly process of the flowmeter, for any conventional bypass, fluid is introduced from the introduction path and the bypass flow path in which the bypass is accommodated in the accommodating portion formed in the flow meter base and the fluid flows into the bypass flow path. It is necessary to hermetically connect the outlet passage to be discharged and the bypass passage.

  Further, it is necessary to connect a sensor tube in the thermal flow sensor and a pressure sensor in the differential pressure flow sensor to the upstream and downstream flow paths of the bypass in an airtight manner. In addition to the above, in the assembly process of the flow rate control device, it is necessary to connect a flow rate control valve for increasing or decreasing the flow rate of the fluid flowing through the flow path to the flow path upstream or downstream of the flow meter. In this specification, “airtight” means, for example, “a plurality of members are joined together without a gap so that fluid does not leak between these members”.

  In order to hermetically connect various components constituting the flow meter or the flow control device and the conventional bypass as described above, for example, in the base for the flow meter or the base for the flow control device, a flow path is provided as necessary. Therefore, it is necessary to form a branch or to have a packing interposed in the connecting portion. As a result, the process of gathering conventional bypasses as flow meters or flow control devices is complicated.

  The present invention has been made in view of the above problems, and it is possible to form a bypass flow path with high dimensional accuracy, and to simplify a process of collecting bypasses as a flow meter and / or a flow control device. One objective is to provide the technology that enables it.

  As a result of diligent research, the present inventor has laminated a thin plate-like member in which a groove forming a bypass flow channel and a through hole communicating with the groove are stacked, thereby allowing a main flow channel through which a fluid to be measured for flow rate flows and It has been found that a bypass unit, a flow meter base, and a flow control device base in which a bypass interposed in the main flow path is integrally formed can be manufactured with high accuracy and easily. Furthermore, the present inventor can manufacture a flow meter and / or a flow control device according to such a bypass unit, a flow meter base, and a flow control device base without complicating the assembly process. I found out that I can do it.

  That is, the bypass unit according to the present invention (hereinafter sometimes referred to as “the present invention bypass unit”) is laminated on each of two main surfaces of the bypass part, which is a plate-like member, and the bypass part. And a pair of external connection portions that are a pair of plate-like members.

  The bypass portion includes a first introduction hole that is at least one through hole having a predetermined size and a predetermined shape, a first lead hole that is at least one through hole having a predetermined size and a predetermined shape, and One first member which is a thin plate-like member in which at least one groove communicating the first introduction hole and the first lead-out hole is formed. Alternatively, the bypass portion includes two or more such that the first introduction holes of the adjacent first members communicate with each other in an airtight manner and the first outlet holes of the adjacent first members communicate with each other in an airtight manner. The first member is laminated.

  A second introduction hole which is at least one through hole having a predetermined size and a predetermined shape is formed in any one of the pair of external connection portions, and any one of the pair of external connection portions is formed. Is formed with a second outlet hole which is at least one through hole having a predetermined size and a predetermined shape.

  Further, the first introduction hole formed in the first member and the second introduction hole formed in the external connection portion communicate in an airtight manner, and the first lead-out hole formed in the first member The second outlet hole formed in the external connection portion is configured to communicate in an airtight manner.

  As described above, in the bypass unit of the present invention, the bypass channel can be configured by the groove formed in the first member. Therefore, for example, a bypass channel is configured by a plurality of capillaries (capillary tubes) bundled in parallel with each other or a laminate of a predetermined number of thin plates (etching plates) in which a large number of pores having the same shape and arrangement are formed. As compared with the conventional bypass, the bypass flow path can be formed with high accuracy and ease.

  Furthermore, in the bypass unit of the present invention, the surface (bottom surface and side surface) constituting the groove formed in the first member and the external connection portion facing the groove adjacently or the main surface of the other first member A bypass flow path whose boundary is defined by a portion that hermetically closes the opening surface of the groove, and a first introduction hole and a second introduction hole as an introduction path for introducing fluid from the outside into the bypass flow path; The first lead-out hole and the second lead-out hole are integrally formed as a lead-out path for leading the fluid from the bypass flow path to the outside.

  Therefore, according to the bypass unit of the present invention, the fluid is led out from the introduction path for introducing the fluid from the outside to the individual bypass flow paths included in the bypass section and from the individual bypass flow paths included in the bypass section. Bypass to the main flow path of the fluid in the flowmeter and the flow control device, for example, without requiring a member (for example, a joint block, etc.) and a member for achieving airtightness (for example, packing). A part can be interposed. That is, according to the bypass unit of the present invention, the assembly process of the flow meter and / or flow control device can be simplified.

  In addition, as will be described in detail later, the effects achieved by the bypass unit of the present invention are the same in the base for the flow meter, the base for the flow control device, the flow meter, and the flow control device including the bypass unit of the present invention. To be achieved.

  Other objects, other features and attendant advantages of the present invention will be easily understood from the description of each embodiment and each example of the present invention described below.

It is a schematic diagram which shows the structure of the bypass unit (Example 1 bypass unit) which concerns on Example 1 of this invention. It is a schematic diagram which shows the structure of the 1st member which comprises the bypass part of Example 1 bypass unit. It is a schematic diagram which shows the structure of the 2nd member and 3rd member which comprise the bypass part of the bypass unit (Example 2 bypass unit) which concerns on Example 2 of this invention. It is a schematic diagram which shows the structure of Example 2 bypass unit. It is a schematic diagram which shows the structure of the 1st member which comprises the bypass part of the bypass unit (Example 3 bypass unit) which concerns on Example 3 of this invention. It is a schematic diagram which shows the structure of Example 3 bypass unit. It is a schematic diagram which shows the structure of the 2nd member and 3rd member which comprise the bypass part of the bypass unit (Example 4 bypass unit) which concerns on Example 4 of this invention. It is a schematic diagram which shows the structure of Example 4 bypass unit. It is a schematic diagram which shows a mode that the coupling which has a branch is connected to Example 4 bypass unit. It is a typical (a) top view, (b) side view, and (c) front view of a differential pressure type flow meter constituted by a bypass unit in Example 4 to which a joint having a branch shown in FIG. 9 is connected. It is typical sectional drawing of the differential pressure type flow meter by the cross section AA shown to (b) of FIG. It is a schematic diagram which shows the structure of the base for flowmeters (Example 5 base for flowmeters) based on Example 5 of this invention. It is a schematic diagram which shows the structure of the base for flowmeters (Example 6 base for flowmeters) based on Example 6 of this invention. It is a schematic diagram which shows the structure of the base for flow control apparatuses (Example 7 base for flow control apparatuses) which concerns on Example 7 of this invention. 7A is a schematic (a) perspective view, (b) a plan view, and (c) a cross-sectional view of a base for a flow control device. FIG. It is typical (a) side view, (b) front view, and (c) top view of the thermal flow control device (Embodiment 10 thermal flow control device) concerning Example 10 of the present invention. It is typical (a) sectional drawing and (b) partial enlarged view of Example 10 thermal type flow control apparatus by the cross section AA shown to (a) of FIG.

<< First Embodiment >>
Hereinafter, a bypass unit according to the first embodiment of the present invention (hereinafter, may be referred to as “first bypass unit”) will be described. A 1st bypass unit is a bypass unit provided with the bypass part which is a plate-shaped member, and a pair of external connection part which is a pair of plate-shaped member each laminated | stacked on the two main surfaces of the said bypass part. .

  The bypass portion includes a first introduction hole that is at least one through hole having a predetermined size and a predetermined shape, a first lead hole that is at least one through hole having a predetermined size and a predetermined shape, and One first member which is a thin plate-like member in which at least one groove communicating the first introduction hole and the first lead-out hole is formed. Alternatively, the bypass portion includes two or more such that the first introduction holes of the adjacent first members communicate with each other in an airtight manner and the first outlet holes of the adjacent first members communicate with each other in an airtight manner. The first member is laminated.

  A second introduction hole which is at least one through hole having a predetermined size and a predetermined shape is formed in any one of the pair of external connection portions, and any one of the pair of external connection portions is formed. Is formed with a second outlet hole which is at least one through hole having a predetermined size and a predetermined shape.

  Further, the first introduction hole formed in the first member and the second introduction hole formed in the external connection portion communicate in an airtight manner, and the first lead-out hole formed in the first member The second outlet hole formed in the external connection portion is configured to communicate in an airtight manner.

  As described above, in the first bypass unit, the bypass channel can be configured by the groove formed in the first member. Therefore, for example, a bypass channel is configured by a plurality of capillaries (capillary tubes) bundled in parallel with each other or a laminate of a predetermined number of thin plates (etching plates) in which a large number of pores having the same shape and arrangement are formed. As compared with the conventional bypass, the bypass flow path can be formed with high accuracy and ease.

  Furthermore, in the bypass unit of the present invention, the surface (bottom surface and side surface) constituting the groove formed in the first member and the external connection portion facing the groove adjacently or the main surface of the other first member A bypass flow path whose boundary is defined by a portion that hermetically closes the opening surface of the groove, and a first introduction hole and a second introduction hole as an introduction path for introducing fluid from the outside into the bypass flow path; The first lead-out hole and the second lead-out hole are integrally formed as a lead-out path for leading the fluid from the bypass flow path to the outside.

  Therefore, according to the bypass unit of the present invention, the fluid is led out from the introduction path for introducing the fluid from the outside to the individual bypass flow paths included in the bypass section and from the individual bypass flow paths included in the bypass section. Bypass to the main flow path of the fluid in the flowmeter and the flow control device, for example, without requiring a member (for example, a joint block, etc.) and a member for achieving airtightness (for example, packing). A part can be interposed. That is, according to the bypass unit of the present invention, the assembly process of the flow meter and / or flow control device can be simplified.

<< Second Embodiment >>
Hereinafter, a bypass unit according to the second embodiment of the present invention (hereinafter, may be referred to as “second bypass unit”) will be described. The second bypass unit has the same configuration as the first bypass unit described above except for the points listed in the following (1) to (6).

(1) The first member is configured as a laminated body in which a second member that is one thin plate-like member and a third member that is one thin plate-like member are laminated.
(2) The second member includes a third introduction hole that is at least one through hole having a predetermined size and a predetermined shape, and a first introduction hole that is at least one through hole having a predetermined size and a predetermined shape. 3 lead-out holes and a slit which is at least one through-hole having a predetermined width and a predetermined length are formed.

(3) The third member includes a fourth introduction hole that is at least one through hole having a predetermined size and a predetermined shape, and a first introduction hole that is at least one through hole having a predetermined size and a predetermined shape. 4 lead-out holes are formed.
(4) The third introduction hole of the second member and the fourth introduction hole of the third member communicate in an airtight manner to form the first introduction hole in the first member, and the second The third lead-out hole of the member and the fourth lead-out hole of the third member are in airtight communication to form the first lead-out hole in the first member.

(5) Of the both ends of the slit, the introduction end which is the end closer to the third introduction hole and the third introduction hole are configured to communicate in an airtight manner via the fourth introduction hole. The lead-out end portion, which is the end portion closer to the third lead-out hole among both ends of the slit, and the third lead-out hole are configured to communicate in an airtight manner via the fourth lead-out hole. .
(6) The opening surface of the slit formed in the second member other than the introduction end portion and the lead-out end portion is a portion where the fourth introduction hole and the fourth lead-out hole of the third member are not formed. And the groove in the first member is formed.

  When the groove is directly formed in the first member described above, it is necessary to adjust the depth of the groove to a predetermined depth, for example, by adjusting the degree of the etching process. On the other hand, in the second member, the slit can be formed by forming a through-hole corresponding to the shape of the slit in the thin plate-like second member by a method such as punching, cutting, and etching. Therefore, the depth of the groove formed by the lamination of the second member and the third member is uniquely defined by the thickness of the second member. That is, the groove can be formed with higher processing accuracy compared to the case where the groove is directly formed in the first member.

<< Third Embodiment >>
Hereinafter, a bypass unit according to a third embodiment of the present invention (hereinafter may be referred to as a “third bypass unit”) will be described. The 3rd bypass unit has the same composition as the 2nd bypass unit mentioned above except the point enumerated in the following (1) and (2).

(1) In the parallel projection onto the plane parallel to the main surface of the bypass portion, the fourth introduction hole is formed so as to overlap at least a part of the third introduction hole and the introduction end portion.
(2) In the parallel projection onto the plane parallel to the main surface of the bypass portion, the fourth lead-out hole is formed so as to overlap with at least a part of the third lead-out hole and the lead-out end portion. .

  Thus, one end (introduction end) of the slit is communicated in an airtight manner with the first introduction hole as the introduction path constituted by the adjacent third introduction hole and the fourth introduction hole, and the adjacent third lead-out hole and fourth The other end (leading end portion) of the slit can be communicated with the first leading hole as the leading path constituted by the leading hole in an airtight manner. That is, without requiring special processing and / or members, the bypass channel, the introduction channel for introducing the fluid from the outside into the bypass channel, and the fluid from the bypass channel to the outside. And a lead-out path for forming the same.

<< 4th Embodiment >>
Hereinafter, a bypass unit according to a fourth embodiment of the present invention (hereinafter, may be referred to as a “fourth bypass unit”) will be described. The shape of the groove formed in the first member included in the first to third bypass units described above is not particularly limited as long as the function as the laminar flow element and / or the differential pressure generating means is not impaired.

  On the other hand, in the fourth bypass unit, the groove is formed in a straight line in a parallel projection view onto a plane parallel to the main surface of the bypass portion. Alternatively, in the parallel projection view onto the plane parallel to the main surface of the bypass portion, the groove is formed in a spiral shape.

  Thereby, for example, the size and shape of the fourth bypass unit are designed according to the space in which the fourth bypass unit is accommodated in a device in which the fourth bypass unit is incorporated (for example, a flow meter and a flow control device). It becomes easy.

<< 5th Embodiment >>
Hereinafter, a bypass unit according to a fifth embodiment of the present invention (hereinafter may be referred to as a “fifth bypass unit”) will be described. The fifth bypass unit has the same configuration as the first to fourth bypass units described above except for the following points.

The fifth bypass unit is
An introduction pipe connection structure which is a structure for fixing the introduction pipe to the bypass unit so that the introduction pipe for introducing fluid from the outside and the second introduction hole communicate in an airtight manner;
A structure for connecting a lead-out pipe, which is a structure for fixing the lead-out pipe to the bypass unit so that the lead-out pipe for leading the fluid to the outside communicates with the second lead-out hole in an airtight manner;
Is further provided.

  According to the above configuration, the introduction pipe and the second introduction hole can be connected in an airtight manner and fixed by the introduction pipe connection structure without requiring a special jig or the like. Similarly, according to the above configuration, the lead-out pipe and the second lead-out hole can be airtightly communicated and fixed by the lead-out pipe connection structure without requiring a special jig or the like. That is, according to the above configuration, the step of interposing the bypass unit of the present invention in the main flow path of the fluid in the flow meter and / or the flow control device (an assembly step of the flow meter and / or the flow control device) can be further simplified. it can.

<< 6th Embodiment >>
The flowmeter base according to the sixth embodiment of the present invention (hereinafter, may be referred to as “sixth flowmeter base”) will be described below. The sixth flow meter base is a base for assembling the flow meters, and is a flow meter base including the above-described bypass units including the first to fifth bypass units.

  In the sixth flow meter base, any one of the pair of external connection portions has at least one through hole having a predetermined size and a predetermined shape and in airtight communication with the first introduction hole. An introduction-side branch hole is further formed, and at least one of the pair of external connection portions has a predetermined size and a predetermined shape and is in airtight communication with the first lead-out hole. A lead-out side branch hole which is a hole is further formed.

  According to this, for example, by fixing the sensor tube to the base for the flowmeter of the present invention so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube, the thermal flow meter Can be configured easily. Alternatively, the upstream pressure sensor is fixed to the base for the flowmeter of the present invention so that the detection part of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole, and the space that is in airtight communication with the outlet side branch hole. The differential pressure type flow meter can be easily configured by fixing the downstream pressure sensor to the base for the flow meter of the present invention so that the detection part of the downstream pressure sensor is exposed.

<< 7th Embodiment >>
The flowmeter base according to the seventh embodiment of the present invention (hereinafter may be referred to as “seventh flowmeter base”) will be described below. The seventh flowmeter base has the same configuration as the above-described sixth flowmeter base except for the following points.

  The seventh flow meter base is connected to the fourth member, which is a separate member having an internal space, so that the introduction side branch hole and / or the discharge side branch hole and the internal space communicate in an airtight manner. A branch connection structure which is a structure for fixing to the base is further provided.

  For example, when the thermal flow meter is configured using the seventh flow meter base, the fourth member is a sensor tube. Further, when the differential pressure type flow meter is configured by using the seventh flow meter base, the fourth member is an upstream pressure sensor and a downstream pressure sensor. In any case, according to the above configuration, the fourth member, which is a separate member having an internal space, is connected to the introduction-side branch hole and / or by the branch connection structure without requiring a special jig or the like. Or it can fix to the base for 7th flowmeters so that the outlet side branch hole and internal space may communicate airtightly. That is, the assembly process of the flow meter and / or the flow control device can be further simplified.

<< Eighth Embodiment >>
Hereinafter, a base for a flow control device according to an eighth embodiment of the present invention (hereinafter, may be referred to as “eighth flow control device base”) will be described. The eighth flow control device base is a base for assembling the flow control devices, and includes a flow meter base of the present invention including the above-described sixth flow meter base and seventh flow meter base. It is a base for equipment.

  In the eighth flow control device base, a fifth introduction hole which is at least one through hole having a predetermined size and a predetermined shape is further formed in any one of the pair of external connection portions, A fifth lead-out hole that is at least one through-hole having a predetermined size and a predetermined shape is further formed in either one of the pair of external connection portions. In addition, the at least one first member is further formed with an independent flow path that is a flow path that hermetically communicates the fifth introduction hole and the fifth lead hole and does not communicate with the groove. ing.

  According to this, for example, by fixing the sensor tube to the base for the eighth flow control device so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube, The meter can be easily configured. Alternatively, the upstream pressure sensor is fixed to the base for the eighth flow control device so that the detection portion of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole, and is in airtight communication with the outlet side branch hole. By fixing the downstream pressure sensor to the base for the flowmeter of the present invention so that the detection portion of the downstream pressure sensor is exposed to the space, the differential pressure type flowmeter can be easily configured.

  In addition, the flow control valve is fixed to the eighth flow control device base so that the second lead-out hole and the fifth introduction hole communicate with each other through the flow control valve, and the thermal flow meter or the differential pressure type is fixed. By providing a control unit that adjusts the opening of the flow control valve by controlling the actuator based on the detection value acquired by the flow meter, a flow control device that brings the fluid flow rate close to a predetermined target value is easily configured. be able to.

<< Ninth Embodiment >>
The flow control device base according to the ninth embodiment of the present invention (hereinafter, may be referred to as “the ninth flow control device base”) will be described below. The base for the ninth flow control device has the same configuration as the base for the eighth flow control device described above except for the following points.

  The base for the ninth flow control device is for fixing the flow control valve to the base for the flow control device so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow control valve. The structure further includes a valve connection structure.

  According to the above configuration, the flow control valve is configured by the valve connection structure so that the second lead-out hole and the fifth introduction hole communicate with each other through the flow control valve without requiring a special jig or the like. Can be fixed to the base for the flow control device of the present invention. That is, the assembly process of the flow rate control device can be simplified.

<< 10th Embodiment >>
Hereinafter, a thermal type flow meter according to a tenth embodiment of the present invention (hereinafter may be referred to as a “tenth thermal type flow meter”) will be described. The tenth thermal flow meter comprises a base for a flow meter of the present invention including the above-mentioned base for a sixth flow meter and a base for a seventh flow meter, a sensor tube, and a pair of sensor wires wound around the sensor tube. A detection value corresponding to the flow rate of the fluid flowing into the sensor tube through the introduction side branch hole and flowing out of the sensor tube through the lead-out side branch hole is calculated as an electric resistance value of the pair of sensor wires. It is a thermal flow meter acquired based on the difference.

  Further, the sensor tube is fixed to the flow meter base so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube.

  As described above, since the tenth thermal flow meter is assembled using the base for the flow meter of the present invention, as described above, the introduction-side branch hole and the outlet-side branch hole are disposed through the inside of the sensor tube. It can be easily configured by fixing the sensor tube to the base for the flowmeter of the present invention so as to communicate in an airtight manner. That is, the tenth thermal flow meter can be manufactured by a simplified assembly process.

<< 11th Embodiment >>
Hereinafter, a thermal type flow meter according to an eleventh embodiment of the present invention (hereinafter may be referred to as an “eleventh thermal type flow meter”) will be described. The eleventh thermal flow meter has the same configuration as the tenth thermal flow meter described above, except for the following points.

  The eleventh thermal flow meter includes the seventh flow meter base, the sensor tube as the fourth member, and a pair of sensor wires wound around the sensor tube, and the sensor tube passes through the introduction side branch hole. As a thermal flow meter that acquires a detection value corresponding to the flow rate of the fluid flowing into the interior of the sensor tube and flowing out of the sensor tube through the outlet-side branch hole based on the difference in electrical resistance between the pair of sensor wires It is configured. Furthermore, the sensor tube is fixed to the flowmeter base by the branch connection structure so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube. .

  According to the above configuration, the branch connection is performed so that the introduction side branch hole and the discharge side branch hole communicate with each other through the inside of the sensor tube as the fourth member without requiring a special jig or the like. The sensor tube can be fixed to the base for the flowmeter of the present invention depending on the structure. That is, the eleventh thermal flow meter having the above-described configuration can be manufactured by a further simplified assembly process.

<< Twelfth Embodiment >>
Hereinafter, a thermal type flow meter according to a twelfth embodiment of the present invention (hereinafter may be referred to as “a twelfth differential pressure type flow meter”) will be described. A twelfth differential pressure type flow meter includes the above-described sixth flow meter base and seventh flow meter base, the flow meter base of the present invention, an upstream pressure sensor, and a downstream pressure sensor. Based on the difference in pressure detected by the upstream pressure sensor and the downstream pressure sensor, a detection value corresponding to the flow rate of the fluid flowing in from the introduction hole and flowing out of the first outlet hole through the groove of the bypass portion is obtained. It is a differential pressure type flow meter to obtain.

  The upstream pressure sensor is fixed to the flowmeter base so that the detection portion of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole, and is airtight with the outlet side branch hole. The downstream pressure sensor is fixed to the flowmeter base so that the detection portion of the downstream pressure sensor is exposed in a communicating space.

  As described above, since the twelfth differential pressure type flow meter is assembled using the base for the flow meter of the present invention, as described above, the detection unit of the upstream pressure sensor is connected to the space communicating with the introduction side branch hole in an airtight manner. The upstream pressure sensor is fixed to the base for the flowmeter of the present invention so as to be exposed, and the downstream pressure sensor of the present invention is exposed so that the detection part of the downstream pressure sensor is exposed in a space that is airtightly communicated with the outlet branch hole. It can be easily configured by fixing to the flowmeter base. In other words, the twelfth differential pressure type flow meter can be manufactured by a simplified assembly process.

<< 13th Embodiment >>
Hereinafter, a differential pressure type flow meter according to a thirteenth embodiment of the present invention (hereinafter, may be referred to as “a thirteenth differential pressure type flow meter”) will be described. The thirteenth differential pressure type flow meter has the same configuration as the above-described twelfth differential pressure type flow meter except for the following points.

  A thirteenth differential pressure type flow meter includes the above-described seventh flow meter base, an upstream pressure sensor as the fourth member, and a downstream pressure sensor as the fourth member, and flows in from the first introduction hole. A differential pressure type that obtains a detection value corresponding to the flow rate of the fluid flowing out from the first outlet hole through the groove of the bypass portion based on a difference in pressure detected by the upstream pressure sensor and the downstream pressure sensor. It is configured as a flow meter.

  Further, the upstream pressure sensor is fixed to the flowmeter base by the branch connection structure so that the detection portion of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole. Similarly, the downstream pressure sensor is fixed to the flowmeter base by the branch connection structure so that the detection portion of the downstream pressure sensor is exposed in a space in airtight communication with the outlet branch hole. .

  According to the above configuration, for the branch connection so that the detection part of the upstream pressure sensor as the fourth member is exposed in a space in airtight communication with the introduction side branch hole without requiring a special jig or the like. Depending on the structure, the upstream pressure sensor can be fixed to the base for the flowmeter of the present invention. Similarly, according to the above configuration, without requiring a special jig or the like, the detection portion of the downstream pressure sensor as the fourth member is exposed in a space that is airtightly communicated with the outlet-side branch hole. The downstream pressure sensor can be fixed to the base for the flowmeter of the present invention by the branch connection structure. That is, the thirteenth differential pressure type flow meter having the above configuration can be manufactured by a further simplified assembly process.

<< 14th Embodiment >>
Hereinafter, a thermal flow control device according to a fourteenth embodiment of the present invention (hereinafter, may be referred to as a “fourteenth thermal flow control device”) will be described. The fourteenth thermal flow control device includes a thermal flow meter, a flow control valve, an actuator for adjusting the opening of the flow control valve, and a control unit. Further, the control unit controls the actuator based on a detection value acquired by the thermal flow meter to adjust the opening of the flow control valve, thereby allowing the sensor tube to pass through the introduction side branch hole. The flow rate of the fluid that flows into the interior of the sensor tube and flows out of the sensor tube through the outlet-side branch hole is made to approach a predetermined target value. As a result, the fourteenth thermal flow control device can bring the flow rate of the fluid that flows in from the first introduction hole and flows out of the first outlet hole through the groove of the bypass portion close to a predetermined target value. .

  However, the thermal type flow meter includes a base for the flow control device of the present invention including the base for the eighth flow control device and the base for the ninth flow control device, a sensor tube, and a pair wound around the sensor tube. The sensor wire is configured to acquire a detection value corresponding to the flow rate of the fluid based on a difference in electrical resistance value between the pair of sensor wires.

  Further, the sensor tube is fixed to the base for the flow rate control device so that the introduction side branch hole and the outlet side branch hole communicate with each other through the inside of the sensor tube, and the second outlet hole The flow rate control valve is fixed to the flow rate control device base so that the fifth introduction hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve.

  As described above, since the 14th thermal flow control device is assembled using the base for the flow control device of the present invention, as described above, the introduction-side branch hole and the discharge-side branch hole form the inside of the sensor tube. The sensor tube is fixed to the base for the flow rate control device of the present invention so as to communicate in an airtight manner, and the second outlet hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve. Can be easily configured by fixing to the base for the flow control device of the present invention. That is, the fourteenth thermal flow control device can be manufactured by a simplified assembly process.

<< 15th Embodiment >>
Hereinafter, a thermal flow control device according to a fifteenth embodiment of the present invention (hereinafter may be referred to as a “fifteenth thermal flow control device”) will be described. The fifteenth thermal flow control device has the same configuration as the fourteenth thermal flow control device described above, except for the following points.

  The thermal flow meter included in the fifteenth thermal flow control device includes the above-described ninth flow control device base, the sensor tube as the fourth member, and a pair of sensor wires wound around the sensor tube. Yes. Furthermore, the detection value corresponding to the flow rate of the fluid flowing into the sensor tube through the introduction side branch hole and flowing out of the sensor tube through the lead-out side branch hole is calculated as an electric resistance value of the pair of sensor wires. Configured to get based on differences.

  Also in this case, the control unit controls the actuator based on the detection value acquired by the thermal flow meter to adjust the opening of the flow control valve, thereby controlling the flow rate of the fluid. It is configured to approach a predetermined target value.

  However, in this case, the sensor tube is connected to the flow rate control device base by the branch connection structure so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube. It is fixed. Furthermore, the flow rate control valve is fixed to the flow rate control device base by the valve connection structure so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve. Yes.

  According to the above configuration, the branch connection is performed so that the introduction side branch hole and the discharge side branch hole communicate with each other through the inside of the sensor tube as the fourth member without requiring a special jig or the like. Depending on the construction, the sensor tube can be fixed to the flowmeter control device base of the present invention. Furthermore, according to the above configuration, the flow rate is reduced by the valve connection structure so that the second lead-out hole and the fifth introduction hole communicate with each other through the flow rate control valve without requiring a special jig or the like. The control valve can be fixed to the base for the flow control device of the present invention. That is, the fifteenth thermal flow control device having the above configuration can be manufactured by a further simplified assembly process.

<< 16th Embodiment >>
The differential pressure type flow control device according to the sixteenth embodiment of the present invention (hereinafter may be referred to as “the sixteenth differential pressure type flow control device”) will be described below. The sixteenth differential pressure type flow rate control device includes a differential pressure type flow meter, a flow rate control valve, an actuator for adjusting the opening degree of the flow rate control valve, and a control unit. Further, the control unit controls the actuator based on a detection value acquired by the differential pressure type flow meter to adjust the opening of the flow control valve, thereby adjusting the flow rate of the fluid to a predetermined target. Configured to approach the value.

  However, the thermal flow meter is provided with the base for the flow control device of the present invention, including the base for the eighth flow control device and the base for the ninth flow control device, the upstream pressure sensor, and the downstream pressure sensor. , A pressure detected by the upstream pressure sensor and the downstream pressure sensor for a detected value corresponding to the flow rate of the fluid flowing in from the first introduction hole and flowing out of the first outlet hole through the groove of the bypass portion Is configured to get based on the difference.

  Further, the upstream pressure sensor is fixed to the base for the flow rate control device so that the detection portion of the upstream pressure sensor is exposed in a space in airtight communication with the inlet side branch hole, and the outlet side branch hole The downstream pressure sensor is fixed to the flow rate control device base so that the detection portion of the downstream pressure sensor is exposed in a space that is in airtight communication with the flow control device. In addition, the flow rate control valve is fixed to the flow rate control device base so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve.

  As described above, the sixteenth differential pressure type flow rate control device is assembled using the base for the flow rate control device of the present invention. Therefore, as described above, the upstream side pressure sensor is connected to the space communicating with the introduction side branch hole in an airtight manner. The upstream pressure sensor is fixed to the base for the flow control device of the present invention so that the detection part is exposed, and the downstream pressure sensor is exposed so that the detection part of the downstream pressure sensor is exposed in a space in airtight communication with the outlet branching hole. Is fixed to the base for the flow control device of the present invention, and the flow control valve is fixed to the base for the flow control device of the present invention so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow control valve. By doing so, it can be configured easily. That is, the sixteenth differential pressure type flow control device can be manufactured by a simplified assembly process.

<< 17th Embodiment >>
Hereinafter, a differential pressure type flow control device according to a seventeenth embodiment of the present invention (hereinafter, may be referred to as a “17th differential pressure type flow control device”) will be described. The seventeenth differential pressure type flow control device has the same configuration as the sixteenth differential pressure type flow control device described above, except for the following points.

  The thermal flow meter included in the seventeenth thermal flow control device includes the ninth flow control device base, the branch connection structure and the valve connection structure described above, and the fourth flow control device base according to the fourth aspect. An upstream pressure sensor as a member and a downstream pressure sensor as the fourth member are provided. Furthermore, the upstream pressure sensor and the downstream pressure sensor detect a detection value corresponding to the flow rate of the fluid flowing in from the first introduction hole and flowing out of the first outlet hole through the groove of the bypass portion. It is comprised so that it may acquire based on the difference in pressure.

  Also in this case, the control unit controls the actuator based on the detection value acquired by the differential pressure type flow meter to adjust the opening of the flow control valve, thereby controlling the flow rate of the fluid. It is configured to approach a predetermined target value.

  However, in this case, the upstream pressure sensor is fixed to the flowmeter base by the branch connection structure so that the detection portion of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole. The downstream pressure sensor is fixed to the flowmeter base by the branch connection structure so that the detection portion of the downstream pressure sensor is exposed in a space in airtight communication with the outlet branch hole. . Furthermore, the flow rate control valve is fixed to the flow rate control device base by the valve connection structure so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve. Yes.

  According to the above configuration, the structure for branch connection is provided so that the detection part of the upstream pressure sensor as the fourth member is exposed in a space that is airtightly communicated with the introduction side branch hole without requiring a special jig or the like. Thus, the upstream pressure sensor can be fixed to the base for the flow control device of the present invention. Similarly, according to the above configuration, the branching is performed so that the detection portion of the downstream pressure sensor as the fourth member is exposed in a space that is airtightly communicated with the outlet branching hole without requiring a special jig or the like. The downstream pressure sensor can be fixed to the base for the flow control device of the present invention by the connection structure.

  Furthermore, according to the above configuration, the flow rate is reduced by the valve connection structure so that the second lead-out hole and the fifth introduction hole communicate with each other through the flow rate control valve without requiring a special jig or the like. The control valve can be fixed to the base for the flow control device of the present invention. That is, the thermal flow control device of the present invention having the above-described configuration can be manufactured by a further simplified assembly process.

  By the way, as a member constituting the bypass unit, the base for the flow meter, the base for the flow control device, the flow meter, the flow control device, etc., for example, the material having a very low impurity level content and the corrosion resistance to the fluid used are used. Special materials such as high materials may be required. Specific examples of such materials include, for example, extremely low carbon steel such as SUS316L (conforming to SEMI standard F-20) and Ni—Cr—Mo alloy such as HASTELLOY (registered trademark) C-22. Can do.

  However, the special materials as described above may be limited to a specific form (for example, a sheet form), for example, a bulk material such as a rod shape and a block shape is difficult to obtain. . As a result, it may be difficult to configure the bypass unit or the like according to the prior art using the special material as described above.

  However, as described above, the bypass unit of the present invention can be manufactured by laminating the first member which is a thin plate member. Therefore, even if only a sheet-like member can be obtained as a special material as described above, the present invention bypasses the special material by manufacturing the first member from the sheet-like member. Units can be configured.

  That is, according to the bypass unit of the present invention, even when the available forms of the constituent members are limited, the possibility of narrowing the choice of materials is low. The same applies to a flow meter base, a flow control device base, a flow meter, and a flow control device including the bypass unit of the present invention.

  It is possible to achieve the same as the above by powder metallurgy using, for example, a 3D printer, but the dimensional accuracy of a molded product manufactured by powder metallurgy is rough and a precise bypass unit is formed. It is difficult.

  Examples corresponding to some embodiments of the present invention will be described in detail below.

  Hereinafter, a bypass unit according to Embodiment 1 of the present invention (hereinafter, may be referred to as “Embodiment 1 bypass unit”) will be described.

<Constitution>
As shown in FIG. 1A, the first embodiment bypass unit 101 includes a bypass part 110 that is a plate-like member and a pair of plate-like members that are respectively stacked on the two main surfaces of the bypass part 110. A pair of external connection parts 120.

  The bypass unit 110 in the first embodiment bypass unit 101 is configured by a laminated body of five first members 111. However, the bypass part 110 does not necessarily need to be configured by a laminated body of a plurality of first members 111. That is, the bypass unit 110 may be configured by a single first member 111.

  As shown in FIG. 2, the first member 111 is a first introduction hole 111 a that is a through hole having a substantially square shape with a predetermined size, and a first hole that is a through hole having a substantially square shape with a predetermined size. It is a thin plate-like member in which five outlets 111b and five grooves 111c communicating the first inlet hole 111a and the first outlet hole 111b are formed. However, the size, shape, and number of the first introduction holes 111a, the first outlet holes 111b, and the grooves 111c are not limited to those illustrated in FIG.

  In the laminated body of the first members 111 constituting the bypass portion 110, as shown in FIG. 1A, the first introduction holes 111a of the adjacent first members 111 communicate with each other in an airtight manner, and the adjacent first The first member 111 is laminated so that the first outlet holes 111b of the member 111 communicate with each other in an airtight manner.

  Further, in the first embodiment bypass unit 101, the surface (bottom surface and side surface) constituting the groove 111c formed in the first member 111 and the external connection portion 120 or other first member facing and adjacent to the groove 111c. The boundary of the bypass flow path is defined by the portion of the main surface of the member 111 that hermetically closes the opening surface of the groove 111c.

  On the other hand, in Example 1 bypass unit 101, of the pair of external connection portions 120, the external connection portion 120 on the upper side in the drawing is configured by a laminated body of two thin plate-like members, and is directed to the drawing. The lower external connection portion 120 is composed of a single thin plate member. However, the size, shape, and number of members that constitute each of the pair of external connection portions 120 are not limited to those illustrated in FIG.

  Further, of the pair of external connection portions 120, the second introduction hole 121 a and the second lead-out hole 121 b that are circular holes of a predetermined size are formed in the external connection portion 120 on the upper side in the drawing. Has been. On the other hand, the second introduction hole 121a and the second lead-out hole 121b are not formed in the external connection portion 120 on the lower side as viewed in the drawing. However, the second introduction hole 121a and the second lead-out hole 121b may be formed in any of the pair of external connection parts 120, and both may be formed in the external connection part 120 on the same side, or Both may be formed in the external connection part 120 on the different side. Further, the size, shape, and number of the second introduction holes 121a and the second lead-out holes 121b are not limited to those illustrated in FIG.

  In addition, in the bypass unit 101 of the first embodiment, the first introduction hole 111a formed in the first member 111 and the second introduction hole 121a formed in the external connection portion 120 communicate with each other in an airtight manner, and the first member 111 The first lead-out hole 111b formed in the second connection hole 121b and the second lead-out hole 121b formed in the external connection portion 120 are in airtight communication.

  1B is a perspective view seen from the upper surface (top surface) side of the bypass unit 101 of the first embodiment, and FIG. 1C is seen from the lower surface (bottom surface) side of the bypass unit 101 of the first embodiment. It is a perspective view. The bypass unit 101 of Example 1 has an introduction hole (second introduction hole 121a) and a lead-out hole (second lead-out hole 121b) on its top surface, and a bypass channel (groove 111c) in its interior. This is a bypass unit formed.

  The first embodiment bypass unit 101 shown in FIG. 1 is not an essential component of the bypass unit according to the present invention, but further includes an inlet pipe connection structure and an outlet pipe connection structure.

  Specifically, four through holes 131a are formed in the external connection part 120 shown in FIG. 1 and the first member 111 shown in FIG. 2 so as to surround the first introduction hole 111a and the second introduction hole 121a. ing. Further, a step is formed in the opening of the second introduction hole 121a due to the difference in size of the second introduction hole 121a formed in the two members constituting the upper external connection part 120 as viewed in the drawing. . Due to the through holes 131a and the steps, the introduction pipe (not shown) for introducing fluid from the outside and the second introduction hole 121a are fixed to the bypass unit 101 in an airtight manner so as to communicate with the second introduction hole 121a. A structure for connecting an introductory pipe, which is a structure, is configured.

  Similarly, in the external connection portion 120 shown in FIG. 1 and the first member 111 shown in FIG. 2, four through holes 131b are formed so as to surround the first lead-out hole 111b and the second lead-out hole 121b. . Further, a step is formed in the opening portion of the second lead-out hole 121b due to the difference in size of the second lead-out hole 121b formed in the two members constituting the upper external connection portion 120 as viewed in the drawing. . In order to fix the lead-out pipe to the bypass unit 101 of the first embodiment so that the lead-out pipe (not shown) for leading the fluid to the outside and the second lead-out hole 121b communicate with each other by the through holes 131b and the steps. A structure for connecting lead-out piping, which is a structure of

  In order to fix the introduction pipe or the lead-out pipe to the bypass unit 101 using the introduction pipe connection structure or the lead-out pipe connection structure, first, the introduction pipe is carried out with the packing fitted to the step. Example 1 Adhering to the bypass unit 101. Next, a bolt is inserted through the through hole provided in the through hole 131a and the introduction pipe (the flange). Alternatively, a bolt is inserted into the through hole provided in the through hole 131b and the outlet pipe (the flange thereof). Finally, tighten the bolt with a nut. Thereby, the introduction pipe or the lead-out pipe can be fixed to the first embodiment bypass unit 101 in a state where the packing is crushed and the airtightness is maintained.

  However, the structure of the structure for connecting the inlet pipe and the structure for connecting the outlet pipe are not limited to the examples shown in FIGS.

<Production method>
The materials of various components of the first bypass unit 101 having the above-described configuration are not particularly limited, and the environment in which the first bypass unit 101 is used (for example, temperature, humidity, fluid properties, etc.). It is possible to appropriately select from materials that can withstand. Typically, the 1st member 111 and the external connection part 120 are formed with stainless steel.

  In addition, a specific method for forming the first introduction hole 111a and the first lead-out hole 111b, the second introduction hole 121a and the second lead-out hole 121b, and the through holes 131a and 131b is not particularly limited. And it can select suitably from various methods, such as cutting. Further, a specific method for forming the groove 111c is not particularly limited, but the groove 111c having a suitable width, length, and depth is typically formed by so-called “half-etching”. it can.

  In addition, the joining method of the laminate formed by laminating the first member 111 and the external connection portion 120 is also not particularly limited, and the environment in which the bypass unit 101 of the first embodiment is used (for example, temperature, humidity, and fluid) It is possible to appropriately select from among joining methods that can withstand the properties and the like and that can join the first member 111 and the external connection portion 120 in an airtight manner. Specific examples include brazing bonding and diffusion bonding. For example, diffusion bonding is preferable as a bonding technique that can withstand various use environments and achieve airtight bonding.

<Effect>
As described above, in the first embodiment bypass unit 101, the bypass flow path is configured by the groove 111 c formed in the first member 111. Therefore, as described above, the bypass flow is caused by a plurality of capillaries (capillary tubes) bundled in parallel with each other or a laminate of a predetermined number of thin plates (etching plates) in which a large number of pores having the same shape and arrangement are formed. Compared with the conventional bypass that constitutes the path, the bypass channel can be formed with high accuracy and ease.

  Furthermore, in the bypass unit 101 of the first embodiment, the surface (bottom surface and side surface) constituting the groove 111c formed in the first member 111 and the external connection portion 120 or other first member facing and adjacent to the groove 111c. A bypass channel whose boundary is demarcated by a portion of the main surface of 111 that hermetically closes the opening surface of the groove 111c, and a first channel as an introduction channel for introducing fluid from the outside into the bypass channel The introduction hole 111a and the second introduction hole 121a and the first lead-out hole 111b and the second lead-out hole 121b as lead-out paths for leading the fluid out from the bypass flow path are integrally formed. .

  Therefore, according to the bypass unit 101 of the first embodiment, the fluid is introduced to the outside from the individual bypass flow paths included in the introduction path and the bypass section provided for introducing the fluid from the outside to the individual bypass flow paths included in the bypass unit 110. The main flow of fluid in, for example, a flow meter and a flow control device without requiring a member (for example, a joint block) and a member for achieving airtightness (for example, packing) that constitute a lead-out path for lead-out A bypass unit 110 can be interposed in the road. That is, according to the first embodiment bypass unit 101, the assembly process of the flow meter and / or the flow control device can be simplified.

  In addition, as described above, the first embodiment bypass unit 101 includes the structure for connecting the inlet pipe and the structure for connecting the outlet pipe. Therefore, the introduction pipe and the second introduction hole 121a are fixed in an airtight manner by the introduction pipe connection structure without requiring a special jig or the like, and the lead-out pipe and the second lead-out are established by the lead-out pipe connection structure. The hole 121b can be fixed in airtight communication. That is, the step of interposing the bypass unit 101 in the main flow path of the fluid in the flow meter and / or the flow control device with the introduction pipe connection structure and the lead-out pipe connection structure (assembly of the flow meter and / or flow control device) Step) can be further simplified.

  Hereinafter, a bypass unit according to a second embodiment of the present invention (hereinafter, may be referred to as “second embodiment bypass unit”) will be described.

<Constitution>
As shown in FIG. 3, in the second embodiment, the first member 111 is formed by laminating a second member 112 that is one thin plate-like member and a third member 113 that is one thin plate-like member. The configuration is basically the same as that of the bypass unit 101 according to the first embodiment except that the stacked body is configured as described above. Therefore, the following description will be made focusing on differences between the second embodiment bypass unit 102 and the first embodiment bypass unit 101. In addition, components common to the bypass unit 101 of the first embodiment are denoted by the same reference numerals as those of the bypass unit 101 of the first embodiment.

  As shown in FIG. 3A, the second member 112 has a third introduction hole 112a that is a through hole having a substantially rectangular shape with a predetermined size, and a substantially square shape with a predetermined size. A third lead-out hole 112b which is a through hole and a slit 112c which is a through hole having a predetermined width and a predetermined length are formed.

  As shown in FIG. 3B, the third member 113 has a fourth introduction hole 113a which is a through hole having a substantially rectangular shape with a predetermined size and a substantially square shape with a predetermined size. A fourth lead-out hole 113b which is a through hole is formed.

  As shown in FIG. 3C, in the second example bypass unit 102, the first member 111 is configured as a stacked body of the second member 112 and the third member 113. As a result, as shown in FIG. 3D, the third introduction hole 112a of the second member 112 and the fourth introduction hole 113a of the third member 113 communicate with each other in an airtight manner, and the first introduction in the first member 111 is performed. A hole 111a is formed, and the third lead-out hole 112b of the second member 112 and the fourth lead-out hole 113b of the third member 113 are in airtight communication to form the first lead-out hole 111b in the first member 111. Yes.

  In the second member 112, the third introduction hole 112a, the third outlet hole 112b, and the slit 112c do not communicate with each other and are formed independently of each other. Therefore, the bypass unit 102 according to the second embodiment is configured to communicate with each other via a fourth introduction hole 113a and a fourth lead-out hole 113b formed in the third member 113 adjacent to the second member 112. ing.

  Specifically, the introduction end which is the end closer to the third introduction hole 112a among the both ends of the slit 112c and the third introduction hole 112a communicate with each other in an airtight manner via the fourth introduction hole 113a. The leading end that is closer to the third lead-out hole 112b and the third lead-out hole 112b out of both ends of the slit 112c are configured to communicate with each other through the fourth lead-out hole 113b. Has been. As a result, the third introduction hole 112a and the third lead-out hole 112b communicate with each other via the slit 112c, so that the fluid can be guided to the bypass flow path constituted by the slit 112c.

  The third introduction hole 112a, the third introduction hole 112b, and the slit 112c are connected to each other via the fourth introduction hole 113a and the fourth introduction hole 113b formed in the third member 113 adjacent to the second member 112. The specific method for making it communicate is not specifically limited.

  For example, in the second embodiment bypass unit 102, in a parallel projection view onto a plane parallel to the main surface of the bypass portion 110, at least a part of the third introduction hole 112a, the introduction end of the slit 112c, and the fourth introduction hole 113a. Are arranged such that at least a part of the third outlet hole 112b and the outlet end of the slit 112c overlap the fourth outlet hole 113b.

  Specifically, the fourth introduction hole 113a overlaps with the third introduction hole 112a and also overlaps with the introduction end of the slit 112c in the parallel projection onto the plane parallel to the main surface of the bypass part 110. Compared to the third introduction hole 112a, it is formed wider on the introduction end side of the slit 112c. Similarly, the fourth lead-out hole 113b is overlapped with the third lead-out hole 112b and the lead-out end of the slit 112c in the parallel projection onto the plane parallel to the main surface of the bypass part 110. Compared with the lead-out hole 112b, it is formed wider on the lead-out end side of the slit 112c.

  Further, the opening surfaces of the slits 112c formed in the second member 112 other than the introduction end portion and the extraction end portion are airtight by the portion where the fourth introduction hole 113a and the fourth extraction hole 113b of the third member 113 are not formed. The groove 111c (corresponding structure) in the first member 111 is formed by being closed.

  Therefore, if the laminated body of the second member 112 and the third member 113 is used in place of the first member 111 and configured as shown in FIG. 1A, it is the same as the bypass unit 101 of the first embodiment. It can be seen that the bypass unit 102 according to the second embodiment having the structure and the operational effects can be manufactured. However, for the purpose of helping understanding of the configuration of the second embodiment bypass unit 102, a schematic diagram for explaining the configuration of the second embodiment bypass unit 102 is shown in FIG.

  As shown to (a) of FIG. 4, in Example 2 bypass unit 102, the bypass part 110 is comprised by laminating | stacking 3 laminated bodies of the 2nd member 112 and the 3rd member 113. As shown in FIG. In addition, among the pair of external connection portions 120, the upper external connection portion 120 as viewed in the drawing is configured by a laminate of three thin plate-like members, and the lower external connection portion 120 as viewed in the drawing is It is comprised by the sheet-like member of 1 sheet.

  Since the other configuration and manufacturing method of the second embodiment bypass unit 102 are the same as those of the first embodiment bypass unit 101, description thereof is omitted here.

<Function and effect>
As described above, the depth of the groove formed by stacking the second member 112 and the third member 113 is uniquely defined by the thickness of the second member 112 in which the slit 112c is formed. That is, according to the second embodiment bypass unit 102, it is possible to form the groove with higher processing accuracy compared to the case where the groove is directly formed in the first member.

  Hereinafter, a bypass unit according to a third embodiment of the present invention (hereinafter, may be referred to as “third embodiment bypass unit”) will be described.

<Constitution>
In both the first embodiment bypass unit 101 and the second embodiment bypass unit 102 described above, the groove 111c (or slit 112c) is linear in the parallel projection onto the plane parallel to the main surface of the bypass portion 110. Is formed. However, as described above, the shape of the groove 111c formed in the first member 111 (or the slit 112c formed in the second member 112) impairs the function as a laminar flow element and / or differential pressure generating means. Unless otherwise specified, there is no particular limitation.

  As shown in FIG. 5, the third embodiment of the bypass unit 103 is basically the same except that the groove 111 c is formed in a spiral shape in a parallel projection onto a plane parallel to the main surface of the bypass portion 110. The first embodiment has the same configuration as the bypass unit 101. Therefore, the following description will be given focusing on the differences between the third embodiment bypass unit 103 and the first embodiment bypass unit 101. Further, components having the same functions as those of the first embodiment bypass unit 101 are denoted by the same reference numerals as those of the first embodiment bypass unit 101.

  The first member 111 in the bypass unit 103 according to the third embodiment is a first introduction hole 111a which is a through hole having a circular shape with a predetermined size, and three through holes having an arc shape with a predetermined size. It is a thin plate-like member in which a plurality of grooves 111c that communicate the first lead-out hole 111b and the first lead-in hole 111a and the first lead-out hole 111b are formed. However, the size, shape, and number of the first introduction hole 111a, the first lead-out hole 111b, and the groove 111c are not limited to those illustrated in FIG.

  Example 3 As shown in FIG. 6A, the bypass unit 103 includes a bypass part 110 that is a plate-like member and a pair of plate-like members that are respectively stacked on the two main surfaces of the bypass part 110. A pair of external connection parts 120. In the bypass unit 103 according to the third embodiment, each of the pair of external connection portions 120 is configured by a single thin plate member.

  The bypass unit 110 in the bypass unit 103 according to the third embodiment is configured by a laminated body of six first members 111. In the laminated body of the first members 111 constituting the bypass portion 110, the first introduction holes 111a of the adjacent first members 111 communicate with each other in an airtight manner, and the first outlet holes 111b of the adjacent first members 111 are in an airtight state. The 1st member 111 is laminated so that it may communicate with.

  Further, also in the third embodiment bypass unit 103, the surface (bottom surface and side surface) constituting the groove 111c formed in the first member 111, and the external connection portion 120 or other first member facing and adjacent to the groove 111c. The boundary of the bypass flow path is defined by the portion of the main surface of the member 111 that hermetically closes the opening surface of the groove 111c.

  On the other hand, in the third embodiment bypass unit 103, of the pair of external connection portions 120, the external connection portion 120 on the left (lower) side as viewed in the drawing is a through hole having a circular shape of a predetermined size. A second introduction hole 121a is formed, and a second lead-out hole 121b, which is three through holes having a predetermined arcuate shape, is formed in the external connection portion 120 on the right (upper) side as viewed in the drawing. ing.

  In addition, also in the third embodiment bypass unit 103, the first introduction hole 111a formed in the first member 111 and the second introduction hole 121a formed in the external connection portion 120 communicate with each other in an airtight manner, and the first member 111 The first lead-out hole 111b formed in the second connection hole 121b and the second lead-out hole 121b formed in the external connection portion 120 are in airtight communication.

  6B is a perspective view of the third embodiment bypass unit 103 as viewed from the left side, and FIG. 6C is a perspective view of the third embodiment of the bypass unit 103 as viewed from the right side. Example 3 The bypass unit 103 has an introduction hole (second introduction hole 121a) on the left side, a lead-out hole (second lead-out hole 121b) on the right side, and a bypass channel (groove 111c) inside. This is a bypass unit formed integrally.

  In addition, although the Example 3 bypass unit 103 shown in FIG. 6 is not an essential component of the bypass unit according to the present invention, the bypass pipe connection structure and the lead-out pipe connection structure are further provided.

  Specifically, four through holes 131a are formed in the external connection portion 120 shown in FIG. 6 and the first member 111 shown in FIG. 5 so as to surround the first introduction hole 111a and the second introduction hole 121a. ing. In the third embodiment bypass unit 103, the first introduction hole 111a and the second introduction hole 121a, and the first lead-out hole 111b and the second lead-out hole 121b are formed concentrically (coaxially). The four through holes 131a also surround the first outlet hole 111b and the second outlet hole 121b.

  A lead-out pipe (not shown) for introducing fluid from the outside and the second introduction hole 121a are hermetically communicated and led out to the outside by bolts and nuts inserted through the four through holes 131a. The introduction pipe and the lead-out pipe can be fixed to the third embodiment bypass unit 103 so that the pipe (not shown) and the second lead-out hole 121b communicate with each other in an airtight manner. That is, in the third embodiment bypass unit 103, the second introduction hole 121a and the second lead-out hole 121b are formed in each of the pair of external connection portions 120. Therefore, the third embodiment bypass unit includes the introduction pipe and the lead-out pipe. These can be fixed by the four through-holes 131 a so as to sandwich 103. In other words, the four through holes 131a serve as both an introduction pipe connection structure and a lead-out pipe connection structure.

<Production method>
The materials of the various components of the third embodiment bypass unit 103 having the above-described configuration, the manufacturing method thereof, and the like are the same as those of the first embodiment bypass unit 101, and thus the description thereof is omitted here.

<Function and effect>
As described above, the third embodiment bypass unit 103 is basically implemented except that the groove 111c is formed in a spiral shape in a parallel projection onto a plane parallel to the main surface of the bypass portion 110. Example 1 The configuration is the same as that of the bypass unit 101. Therefore, the effect achieved by the third embodiment bypass unit 103 is also basically the same as the effect achieved by the first embodiment bypass unit 101.

  That is, in the bypass unit 103 according to the third embodiment, the bypass flow path can be formed with high accuracy and easily as compared with the conventional bypass. Also, the assembly process of the flow meter and / or the flow control device can be simplified by the third embodiment bypass unit 103. Furthermore, since the third embodiment bypass unit 103 also has a structure for connecting the inlet pipe and a structure for connecting the outlet pipe, the third embodiment bypass unit 103 is interposed in the main flow path of the fluid in the flowmeter and / or the flow control device. A process (an assembly process of a flow meter and / or a flow control device) can be further simplified.

  In the third embodiment bypass unit illustrated in FIGS. 5 and 6, the direction of fluid flow may be reversed. That is, even when the fluid is introduced from the second lead-in hole 121b and the fluid is led out from the second lead-in hole 121a, the same effect as that achieved by the first embodiment bypass unit 101 can be obtained.

  Hereinafter, a bypass unit according to a fourth embodiment of the present invention (hereinafter may be referred to as “fourth embodiment bypass unit”) will be described.

<Constitution>
As shown in FIG. 7, in the fourth example bypass unit 104, the first member 111 is formed by laminating the second member 112 that is one thin plate member and the third member 113 that is one thin plate member. The third embodiment has the same configuration as that of the bypass unit 103 according to the third embodiment except that it is configured as a stacked body. Therefore, the following description will be given focusing on the differences between the fourth embodiment bypass unit 104 and the third embodiment bypass unit 103. In addition, the same reference numerals as those in the third embodiment bypass unit 103 are assigned to components common to the third embodiment bypass unit 103.

  As shown in FIG. 7A, the second member 112 has a third introduction hole 112a, which is a through hole having a circular shape with a predetermined size, and an arc-shaped shape with a predetermined size. A third lead-out hole 112b that is one through hole and a slit 112c that is a through hole having a predetermined width and a predetermined length are formed.

  As shown in FIG. 7B, the third member 113 has a fourth introduction hole 113a which is a through hole having a circular shape with a predetermined size and a through hole having an arc shape with a predetermined size. A fourth outlet hole 113b which is a hole is formed.

  Similarly to the bypass unit 102 of the second embodiment, the first member 111 is configured as a laminated body of the second member 112 and the third member 113 in the bypass unit 104 of the fourth embodiment. As a result, the third introduction hole 112a of the second member 112 and the fourth introduction hole 113a of the third member 113 are in airtight communication to form the first introduction hole 111a in the first member 111, and the second member The third lead-out hole 112b of 112 and the fourth lead-out hole 113b of the third member 113 communicate with each other in an airtight manner to form a first lead-out hole 111b in the first member 111 (not shown).

  In the second member 112, the third introduction hole 112a, the third outlet hole 112b, and the slit 112c do not communicate with each other and are formed independently of each other. Therefore, the bypass unit 102 according to the second embodiment is configured to communicate with each other via a fourth introduction hole 113a and a fourth lead-out hole 113b formed in the third member 113 adjacent to the second member 112. ing.

  Specifically, the introduction end which is the end closer to the third introduction hole 112a among the both ends of the slit 112c and the third introduction hole 112a communicate with each other in an airtight manner via the fourth introduction hole 113a. The leading end that is closer to the third lead-out hole 112b and the third lead-out hole 112b out of both ends of the slit 112c are configured to communicate with each other through the fourth lead-out hole 113b. Has been. As a result, the third introduction hole 112a and the third lead-out hole 112b communicate with each other via the slit 112c, so that the fluid can be guided to the bypass flow path constituted by the slit 112c.

  The third introduction hole 112a, the third introduction hole 112b, and the slit 112c are connected to each other via the fourth introduction hole 113a and the fourth introduction hole 113b formed in the third member 113 adjacent to the second member 112. The specific method for making it communicate is not specifically limited.

  For example, in the fourth embodiment bypass unit 104, in the parallel projection onto the plane parallel to the main surface of the bypass part 110, at least a part of the third introduction hole 112a, the introduction end of the slit 112c, and the fourth introduction hole 113a. Are arranged such that at least a part of the third outlet hole 112b and the outlet end of the slit 112c overlap the fourth outlet hole 113b.

  Specifically, the fourth introduction hole 113a overlaps with the third introduction hole 112a and also overlaps with the introduction end of the slit 112c in the parallel projection onto the plane parallel to the main surface of the bypass part 110. Compared with the third introduction hole 112a, the slit 112c is formed wider on the introduction end side (outside of the spiral). Similarly, the fourth lead-out hole 113b is overlapped with the third lead-out hole 112b and the lead-out end of the slit 112c in the parallel projection onto the plane parallel to the main surface of the bypass part 110. Compared to the lead-out hole 112b, the slit 112c is formed wider on the lead-out end side (the center side of the spiral).

  Further, the opening surfaces of the slits 112c formed in the second member 112 other than the introduction end portion and the extraction end portion are airtight by the portion where the fourth introduction hole 113a and the fourth extraction hole 113b of the third member 113 are not formed. The groove 111c (corresponding structure) in the first member 111 is formed by being closed.

  Therefore, if the laminated body of the second member 112 and the third member 113 is used instead of the first member 111 and configured as shown in FIG. 6A, the same as the bypass unit 103 of the third embodiment. It can be seen that the bypass unit 104 according to the fourth embodiment having the structure and the operational effects can be manufactured. However, for the purpose of helping understanding of the configuration of the fourth embodiment bypass unit 104, a schematic diagram for explaining the configuration of the fourth embodiment bypass unit 104 is shown in FIG.

  As shown to (a) of FIG. 8, in Example 4 bypass unit 104, the bypass part 110 is comprised by laminating | stacking 3 sets of laminated bodies of the 2nd member 112 and the 3rd member 113. As shown in FIG. Further, of the pair of external connection portions 120, the second introduction hole 121a which is a through hole having a circular shape with a predetermined size is formed in the external connection portion 120 on the left (lower) side as viewed in the drawing. As shown in the drawing, the right (upper) side external connection part 120 is formed with second lead-out holes 121b, which are three through holes having a predetermined arcuate shape.

  Since the other configuration and manufacturing method of the fourth embodiment bypass unit 104 are the same as those of the third embodiment bypass unit 103, description thereof is omitted here.

<Function and effect>
As described above, the depth of the groove formed by stacking the second member 112 and the third member 113 is uniquely defined by the thickness of the second member 112 in which the slit 112c is formed. That is, according to the fourth embodiment bypass unit 104, it is possible to form the groove with higher processing accuracy than in the case where the groove is directly formed in the first member.

  The bypass unit according to various embodiments of the present invention described above includes a bypass portion in which a bypass flow path is formed, an introduction path for introducing fluid from the outside to the bypass flow path, and a bypass flow. The bypass unit is integrally formed with a lead-out path for leading the fluid from the path to the outside. Therefore, since it is not necessary to connect the introduction path and the lead-out path as separate members in an airtight manner as in the case of the conventional bypass, for example, the assembly process of the flow meter and / or the flow rate control device can be simplified.

  However, in order to airtightly connect, for example, a sensor tube and / or a pressure sensor to the bypass unit, for example, as shown in FIG. 9, another member such as a joint having a branch is required. FIG. 9 is a schematic diagram illustrating a state in which, for example, a joint having a branch for airtightly connecting a sensor tube and / or a pressure sensor is connected to the fourth embodiment bypass unit 104. The fourth embodiment bypass unit 104 includes the second introduction hole 121a and the second lead-out hole 121b, but does not include, for example, an opening and a flow path for airtightly connecting a sensor tube and / or a pressure sensor.

  Therefore, the introduction-side joint 210a having an introduction-side branch flow channel (not shown) and having the introduction-side branch flow channel opening 220a is connected to the branch-flow channel and the second introduction hole 121a. It connects to the introduction side (left side as viewed in the drawing) of the fourth embodiment bypass unit 104 so as to communicate in an airtight manner. Similarly, a derivation-side joint 210b having a derivation-side branch channel (not shown) formed therein and having an opening 220b of the derivation-side branch channel is connected to the branch channel and the second outlet hole 121b. Is connected to the lead-out side (right side as viewed in the drawing) of the bypass unit 104 of the fourth embodiment so as to communicate in an airtight manner. Thereby, for example, a sensor tube and / or a pressure sensor can be connected to the fourth embodiment bypass unit 104 in an airtight manner.

  Here, a schematic (a) plan view, (b) side view, and (c) front view of a differential pressure type flow meter constituted by the bypass unit 104 of Example 4 to which a joint having a branch shown in FIG. 9 is connected. The figure is shown in FIG. Example 4 A case 400 is disposed on an upper portion of a base constituted by the bypass unit 104, the introduction side joint 210a, and the lead-out side joint 210b. As shown in FIG. 9, the bypass unit 104 according to the fourth embodiment includes a spiral bypass channel, so that the bypass unit is compact and suitable for downsizing the flowmeter.

  Further, FIG. 11 shows a schematic cross-sectional view of the differential pressure type flow meter by the cross-section AA shown in FIG. A black area in FIG. 11 represents a cross-sectional area in which a portion of the first member 111 in which neither a through hole nor a groove is formed is stacked. Example 4 The bypass unit 104 is disposed between the introduction side joint 210a and the lead-out side joint 210b, and the openings 220a and 220b of the branch flow paths are respectively provided above the lead-in side joint 210a and the lead-out side joint 210b. The upstream pressure sensor 230a and the downstream pressure sensor 230b are connected to each other through the. Further, in the bypass unit 104 according to the fourth embodiment, a bypass portion 110, a second introduction hole 121a, and a lead-out path including a first lead-out hole 111b and a second lead-out hole 121b, which are indicated by hatching, are integrally formed. ing. According to the bypass unit 104 of the fourth embodiment, such a configuration can simplify the assembly process of the differential pressure flow meter.

  However, from the viewpoint of further simplifying the assembly process of, for example, a flow meter and / or a flow control device, the above branch flow path and opening are also formed integrally with the bypass unit according to the present invention. It is desirable. That is, a flow meter base that is a base for assembling a flow meter and a flow control device base that is a base for assembling a flow control device are also formed integrally with the bypass unit according to the present invention. It is desirable. Embodiments as various bases will be described in detail below.

  Hereinafter, a flow meter base according to a fifth embodiment of the present invention (hereinafter may be referred to as a “fifth embodiment flow meter base”) will be described.

<Constitution>
Example 5 As shown in FIG. 12A, the flowmeter base 102BM has a circular shape with a predetermined size and is a through-hole that is in airtight communication with the first introduction hole 111a. A lead-out side branch hole 122b, which is a through-hole having a hole 122a and a circular shape of a predetermined size and in airtight communication with the first lead-out hole 111b, is formed in the external connection portion 120 on the lower side as viewed in the drawing. Except for this point, the configuration is basically the same as that of the bypass unit 102 of the second embodiment.

  Therefore, the following description will focus on the differences between the fifth embodiment flow meter base 102BM and the second embodiment bypass unit 102. In addition, the same reference numerals as those of the second embodiment bypass unit 102 are attached to the same components as those of the second embodiment bypass unit 102.

  As shown in FIG. 12A, the introduction side branch hole 122a communicates with the first introduction hole 111a (configured by the third introduction hole 112a and the fourth introduction hole 113a). Accordingly, in the flowmeter base 102BM of the fifth embodiment, the first introduction hole 111a branches the fluid introduced from the second introduction hole 121a into the bypass portion 110 (the bypass flow path thereof) and the introduction side branch hole 122a. A branch channel is formed. Similarly, the outlet side branch hole 122b communicates with the first outlet hole 111b (configured by the third outlet hole 112b and the fourth outlet hole 113b). Therefore, in the flowmeter base 102BM of the fifth embodiment, the first outlet hole 111b is a branch flow that joins the fluid derived from the bypass portion 110 (the bypass flow path thereof) and the fluid flowing in from the outlet side branch hole 122b. Forming a road.

  12B is a perspective view of the flow meter base 102BM according to the fifth embodiment as viewed from the upper surface (top surface) side, and FIG. 12C is a lower surface (bottom surface) of the flow meter base 102BM according to the fifth embodiment. It is the perspective view seen from the side. Example 5 The flow meter base 102BM has an introduction hole (second introduction hole 121a) and a lead-out hole (second lead-out hole 121b) on its top surface, and an introduction side branch hole 122a and a lead-out side branch hole on its bottom surface. 122b is a flow meter base in which a bypass channel (groove 111c) is integrally formed.

  Note that the flowmeter base 102BM of Example 5 shown in FIG. 12 is not an essential component of the flowmeter base according to the present invention, but in addition to the introduction pipe connection structure and the lead pipe connection structure described above. In order to connect a fourth member (for example, a sensor tube and a pressure sensor), which is a separate member having an internal space, so that the introduction side branch hole 122a and / or the discharge side branch hole 122b and the internal space communicate in an airtight manner. The structure for branch connection which is the structure of is further provided.

  Specifically, the external connection part 120 and the first member 111 shown in FIG. 12 have four through holes 131a so as to surround the first introduction hole 111a, the second introduction hole 121a, and the introduction side branch hole 122a. Is formed. Further, a step is formed in the opening of the second introduction hole 121a due to the difference in size of the second introduction hole 121a formed in the two members constituting the upper external connection part 120 as viewed in the drawing. . Furthermore, a step is formed at the opening of the introduction side branch hole 122a due to the difference in size of the introduction side branch hole 122a formed in the two members constituting the lower external connection part 120 as viewed in the drawing. Yes.

  Due to these through holes 131a and the step (formed at the opening of the second introduction hole 121a), an introduction pipe (not shown) for introducing fluid from the outside and the second introduction hole 121a communicate with each other in an airtight manner. A structure for connecting the introduction pipe, which is a structure for fixing the introduction pipe to the base 102BM for the flow meter in the fifth embodiment, is configured. Further, the through hole 131a and the step (formed at the opening of the introduction side branch hole 122a) make the sensor tube and / or the pressure sensor (none shown) and the introduction side branch hole 122a airtight, for example. A branch connection structure, which is a structure for fixing the sensor tube and / or the pressure sensor to the flow meter base 102BM of the fifth embodiment so as to communicate with each other, is configured.

  In other words, in the flow meter base 102BM of the fifth embodiment, the second introduction hole 121a and the introduction side branch hole 122a are formed in each of the pair of external connection portions 120, so that separate members having an introduction pipe and an internal space are provided. The fourth member (for example, a sensor tube and a pressure sensor), which is the fifth embodiment, can be fixed by the four through holes 131a so as to sandwich the flow meter base 102BM. In other words, the four through holes 131a serve as both an introduction pipe connection structure and a branch connection structure.

  In order to fix the introduction pipe and the fourth member to the flow meter base 102BM of Example 5 using the introduction pipe connection structure (branch connection structure), first, the second introduction hole 121a was formed at the opening. The introduction pipe is brought into close contact with the flow meter base 102BM in a state where the packing is fitted to the step, and the packing is fitted to the step formed in the opening of the introduction side branch hole 122a. The four members are brought into close contact with the base 102BM for the flow meter of the fifth embodiment. Next, the bolt is inserted into the through hole provided in the through hole 131a, the introduction pipe (the flange), and the fourth member (the flange), and finally the bolt is fastened with the nut. As a result, the introduction pipe and the fourth member can be fixed to the flow meter base 102BM in the state where the packing is crushed and the airtightness is maintained.

  Similarly, four through holes 131b are formed in the external connection portion 120 and the first member 111 shown in FIG. 12 so as to surround the first outlet hole 111b, the second outlet hole 121b, and the outlet side branch hole 122b. ing. Further, a step is formed in the opening portion of the second lead-out hole 121b due to the difference in size of the second lead-out hole 121b formed in the two members constituting the upper external connection portion 120 as viewed in the drawing. . Furthermore, a step is formed in the opening of the outlet side branch hole 122b due to the difference in size of the outlet side branch hole 122b formed in the two members constituting the lower external connection part 120 as viewed in the drawing. Yes.

  Due to these through holes 131b and the step (formed at the opening of the second outlet hole 121b), the outlet pipe (not shown) for leading the fluid to the outside and the second outlet hole 121b communicate with each other in an airtight manner. The lead-out pipe connection structure, which is a structure for fixing the lead-out pipe to the flow meter base 102BM of the fifth embodiment, is configured. Further, the sensor tube and / or the pressure sensor (none of which are not shown) and the outlet side branch hole 122b are hermetically sealed by the through hole 131b and the step (formed at the opening of the outlet side branch hole 122b). A branch connection structure, which is a structure for fixing the sensor tube and / or the pressure sensor to the flow meter base 102BM of the fifth embodiment so as to communicate with each other, is configured.

  In other words, in the flow meter base 102BM according to the fifth embodiment, the second lead-out hole 121b and the lead-out side branch hole 122b are formed in each of the pair of external connection portions 120, so that separate members having a lead-out pipe and an internal space are provided. The fourth member (for example, a sensor tube and a pressure sensor), which is the fifth embodiment, can be fixed by the four through holes 131b so that the flow meter base 102BM is sandwiched therebetween. In other words, the four through holes 131b serve as both the lead-out piping connection structure and the branch connection structure.

  In order to fix the lead-out pipe and the fourth member to the flow meter base 102BM of Example 5 using the lead-out pipe connection structure (branch connection structure), first, the lead pipe was formed in the opening of the second lead-out hole 121b. The introduction pipe is brought into close contact with the flowmeter base 102BM in a state where the packing is fitted to the step, and the packing is fitted to the step formed in the opening of the outlet side branch hole 122b. The four members are brought into close contact with the base 102BM for the flow meter of the fifth embodiment. Next, a bolt is inserted into the through hole provided in the through hole 131b, the outlet pipe (the flange), and the fourth member (the flange), and finally the bolt is fastened with a nut. As a result, the outlet pipe and the fourth member can be fixed to the base 102BM for the flow meter in the fifth embodiment in a state where the packing is crushed and the airtightness is maintained.

  However, the structures of the inlet pipe connection structure, the outlet pipe connection structure, and the branch connection structure are not limited to those illustrated in FIG.

<Function and effect>
According to this, for example, by fixing the sensor tube to the base 102BM for Example 5 so that the introduction side branch hole 122a and the outlet side branch hole 122b communicate in an airtight manner through the inside of the sensor tube, A thermal flow meter can be easily configured. Alternatively, the upstream pressure sensor is fixed to the flow meter base 102BM so that the detection portion of the upstream pressure sensor is exposed in a space in airtight communication with the introduction side branch hole 122a, and the outlet side branch hole 122b is airtight. The differential pressure type flow meter can be easily configured by fixing the downstream pressure sensor to the flow meter base 102BM of the fifth embodiment so that the detection portion of the downstream pressure sensor is exposed in the space communicating with the.

  Furthermore, in the case where the thermal flow meter is configured using the fifth embodiment flow meter base 102BM and the case where the differential pressure type flow meter is configured using the fifth embodiment flow meter base 102BM, the above configuration is used. According to the above, the fourth member (for example, the sensor tube and the pressure sensor), which is a separate member having an internal space, is connected to the introduction-side branch hole 122a and the branch connection structure without using a special jig or the like. / Or it can fix to base 102BM for Example 5 so that the outlet side branch hole 122b and internal space may communicate airtightly. That is, the assembly process of the thermal flow meter and / or the differential pressure flow meter can be further simplified.

  In Example 5 flow meter base 102BM, the first member 111 is configured as a laminate of the second member 112 having the slit 112c and the third member 113 having no slit as described above. Needless to say, the flow meter base according to the present invention may include the bypass portion 110 constituted by the first member 111 in which the groove 111c is directly formed.

  Hereinafter, a base for a flow meter according to a sixth embodiment of the present invention (hereinafter, may be referred to as a “base for a sixth embodiment”) will be described.

<Constitution>
Example 6 As shown in FIG. 13A, the flowmeter base 104BM has an introduction side branch hole 122a and a lead side branch hole 122b formed in the pair of external connection parts 120, respectively. 122a basically has the same configuration as that of the bypass unit 104 of the fourth embodiment except that the first introduction hole 111a and the outlet side branch hole 122b are configured to communicate with the first outlet hole 111b, respectively. . Further, the flowmeter base 104BM of the sixth embodiment basically has the same configuration as that of the flowmeter base 102BM of the fifth embodiment, except that a spiral bypass flow path is provided.

  FIG. 13B is a perspective view of the flow meter base 104BM according to the sixth embodiment as viewed from the left surface (lower surface) side, and FIG. 13C is a right surface (upper surface) side of the flow meter base 104BM according to the sixth embodiment. It is the perspective view seen from. Example 6 The flow meter base 104BM has an introduction hole (second introduction hole 121a) and an introduction side branch hole 122a on the left side, and a lead hole (second lead hole 121b) and a lead side branch hole 122b on the right side. However, it is a flow meter base in which a bypass channel (groove 111c) is integrally formed.

  In addition, although the base 104BM for the flowmeter of Example 6 shown in FIG. 13 is not an essential component of the base for the flowmeter according to the present invention, in addition to the structure for connecting the inlet pipe and the structure for connecting the outlet pipe described above. Then, a fourth member (for example, a sensor tube and a pressure sensor), which is a separate member having an internal space, is connected so that the introduction side branch hole 122a and / or the discharge side branch hole 122b communicate with the internal space in an airtight manner. And a branch connection structure, which is a structure for this purpose.

<Function and effect>
Since the introduction-side branch hole 122a and the outlet-side branch hole 122b are formed as described above, the sixth embodiment of the flowmeter base 104BM also achieves the same effects as the fifth embodiment of the flowmeter base 102BM. can do.

  Specifically, for example, by fixing the sensor tube to the base 104BM for Example 6 so that the introduction side branch hole 122a and the outlet side branch hole 122b communicate in an airtight manner through the inside of the sensor tube, A thermal flow meter can be easily configured. Alternatively, the upstream pressure sensor is fixed to the flow meter base 104BM so that the detection portion of the upstream pressure sensor is exposed in a space in airtight communication with the introduction side branch hole 122a, and the outlet side branch hole 122b is airtight. The differential pressure type flow meter can be easily configured by fixing the downstream pressure sensor to the flow meter base 104BM of the sixth embodiment so that the detection portion of the downstream pressure sensor is exposed in the space communicating with the.

  Furthermore, in the case where the thermal type flow meter is configured using the base 104BM for the sixth embodiment and the case where the differential pressure type flow meter is configured using the base 104BM for the sixth embodiment, the above configuration According to the above, the fourth member (for example, the sensor tube and the pressure sensor), which is a separate member having an internal space, is connected to the introduction-side branch hole 122a and the branch connection structure without using a special jig or the like. Alternatively, the outlet side branch hole 122b and the internal space can be fixed to the base 104BM for the flow meter in the sixth embodiment so as to communicate in an airtight manner. That is, the assembly process of the thermal flow meter and / or the differential pressure flow meter can be further simplified.

  In Example 6 flow meter base 104BM, as shown in FIG. 13, the first member 111 is configured as a laminate of the second member 112 having the slit 112c and the third member 113 having no slit. However, it goes without saying that the flowmeter base according to the present invention can include the bypass portion 110 constituted by the first member 111 in which the groove 111c is directly formed.

  Hereinafter, a base for a flow control device according to a seventh embodiment of the present invention (hereinafter, may be referred to as a “base for a flow control device according to a seventh embodiment”) will be described.

<Constitution>
Example 7 A flow control device base 101BC is a flow control device base including the above-described flow meter base according to the present invention. Therefore, description of matters common to the flowmeter base according to the present invention is omitted.

  As shown in FIGS. 14 and 15, in the seventh embodiment of the flow control device base 101 BC, of the pair of external connection portions 120, the upper external connection portion 120 facing the drawing has an arc shape with a predetermined size. A fifth introduction hole 123a which is a through hole having a shape is further formed, and a fifth lead-out hole which is a through hole having a circular shape of a predetermined size is formed in the external connection portion 120 on the lower side as viewed in the drawing. 123b is further formed.

  Further, as shown in FIG. 15C, which is a schematic cross-sectional view of the base 101BC for the seventh embodiment flow control device according to the cross-section AA shown in FIG. 15B, at least one first member 111 is provided. In addition, an independent flow path 150 is further formed as a flow path in which the fifth introduction hole 123a and the fifth outlet hole 123b are hermetically communicated and not communicated with the groove 111c. The black area in FIG. 15C is a cross-sectional area in which a portion of the first member constituting the flow control device base 101BC of Example 7 where the through hole and the groove are not formed is laminated and formed into a lump shape. Represents. The hatched area represents the cross-sectional area of the portion where the groove 111c is formed.

  In FIG. 14, the first member 111 included in the base for the flow rate control device 101BC according to the seventh embodiment is collectively shown as the bypass unit 110. Further, in the external connection member 120a which is one thin plate member constituting the external connection portion 120, a through hole formed at a position corresponding to the first introduction hole 111a prevents foreign matters from entering the bypass flow path. The mesh 120b is disposed. Furthermore, a slit 120d is formed in the external connection member 120c, which is another thin plate member constituting the external connection portion 120. This is a flow path for providing the second introduction hole 122a at a desired position. Thus, the positions of the second introduction hole 121a and the second lead-out hole 121b formed in the external connection part 120 can be appropriately designed according to the application to which the seventh embodiment flow control device base 101BC is applied.

  15 is not an essential component of the base for the flow control device according to the present invention, but the structure for connecting the inlet pipe, the structure for connecting the outlet pipe, and the branch A connection structure (through hole 131a and through hole 131b) is provided. Since these configurations and operational effects have already been described in detail, description thereof will be omitted here.

  In addition, the flow control device base 101BC according to the seventh embodiment is not an essential component of the flow control device base according to the present invention, but the second lead-out hole 121b and the fifth introduction hole 123a are provided via the flow control valve. In addition, a valve connection structure (through hole 131c), which is a structure for fixing the flow control valve to the flow control device base 101BC of the seventh embodiment, is further provided so as to communicate in an airtight manner. The specific structure of the valve connection structure is the same as that of the introduction pipe connection structure, the lead-out pipe connection structure, and the branch connection structure.

<Effect>
As described above, the independent flow path 150 that connects the fifth introduction hole 123a and the fifth lead-out hole 123b is formed in the base 101BC for the flow control device according to the seventh embodiment. A flow control device can be configured by interposing a flow control valve between the fifth introduction hole 123a and the second lead-out hole 121b, which are the inlets of the independent flow paths. Specifically, a thermal flow meter or a differential pressure type flow meter in which the above-described fourth member is connected to the inlet side branch hole 122a and the outlet side branch hole 122b, and a flow rate control valve are provided in the seventh embodiment. The base 101BC is properly connected. Then, by providing a control unit for controlling the flow rate of the fluid flowing through the bypass flow path by controlling the actuator that adjusts the opening degree of the flow rate control valve based on the detection value by the flow meter, the flow rate control device can be easily provided. Can be configured.

  Furthermore, according to the above configuration, the second lead-out hole 121b and the fifth introduction hole 123a are communicated with each other through the flow control valve by the valve connection structure without requiring a special jig or the like. In addition, the flow control valve can be fixed to the base 101BC for the flow control device according to the seventh embodiment. That is, according to Example 7 flow control device base 101BC, the assembly process of the flow control devices can be further simplified.

  Needless to say, the effect achieved by the above-described embodiment 7 flow control device base 101BC is the lamination of the first member 111, the second member 112 and the third member 113 in which grooves are directly formed. This is achieved when any of the first member 111 configured as a body, the first member 111 formed with a linear groove, and the first member 111 formed with a spiral groove is employed.

  Hereinafter, a thermal type flow meter according to Example 8 of the present invention (hereinafter, may be referred to as “Example 8 thermal type flow meter”) will be described.

<Constitution>
Example 8 A thermal flow meter includes a flow meter base according to the present invention, a sensor tube, and a pair of sensor wires wound around the sensor tube, and flows into the sensor tube through the introduction side branch hole 122a. It is a thermal type flowmeter which acquires the detection value corresponding to the flow volume of the fluid which flows out out of the inside of a sensor tube through the extraction side branch hole 122b based on the difference in the electrical resistance value of a pair of said sensor wire. The general configuration of the thermal type flow meter is well known to those skilled in the art, and a description thereof will be omitted here. In addition, since the configuration and operational effects of the flowmeter base according to the present invention have already been described, the description thereof is omitted here.

  Further, in the eighth embodiment thermal flow meter, the above-described branch connection structure is used in accordance with the present invention so that the inlet side branch hole 122a and the outlet side branch hole 122b communicate in an airtight manner through the inside of the sensor tube. A sensor tube is fixed to the base for the flow meter. However, the structure for branch connection is not an essential component in the thermal flow meter according to the present invention.

<Effect>
In the base for the flow meter according to the present invention, the bypass flow path can be formed with higher dimensional accuracy than the conventional bypass. Therefore, the thermal flow meter of Example 8 constituted by the flow meter base according to the present invention can achieve high detection accuracy. Further, the flow meter base according to the present invention includes a bypass portion 110 (groove 111c), a first introduction hole 111a, a first introduction hole 111b, a second introduction hole 121a, a second introduction hole 121b, and an introduction side branch. The hole 122a and the outlet side branch hole 122b are integrally formed. Accordingly, the thermal flow meter of Example 8 constituted by the flow meter base according to the present invention can be manufactured by a more simplified assembly process.

  Hereinafter, a differential pressure type flow meter according to Example 9 of the present invention (hereinafter, may be referred to as “Example 9 differential pressure type flow meter”) will be described.

<Constitution>
Ninth Embodiment A differential pressure type flow meter includes a flow meter base, an upstream pressure sensor, and a downstream pressure sensor according to the present invention, and flows into the first introduction hole 111a and passes through the groove 111c of the bypass portion 110. It is a differential pressure type flow meter that acquires a detection value corresponding to the flow rate of the fluid flowing out from the outlet hole 111b based on the difference in pressure detected by the upstream pressure sensor and the downstream pressure sensor. Since the general configuration of the differential pressure type flow meter is well known to those skilled in the art, the description thereof is omitted here. In addition, since the configuration and operational effects of the flowmeter base according to the present invention have already been described, the description thereof is omitted here.

  Furthermore, in the differential pressure type flow meter of the ninth embodiment, the flow meter according to the present invention is provided by the above-described branch connection structure so that the detection portion of the upstream pressure sensor is exposed in a space in airtight communication with the introduction side branch hole 122a. The upstream pressure sensor is fixed to the base, and the flow rate according to the present invention is provided by the branch connection structure described above so that the detection portion of the downstream pressure sensor is exposed in a space that is in airtight communication with the outlet branch hole 122b. A downstream pressure sensor is fixed to the measuring base. However, the structure for branch connection is not an essential component in the differential pressure type flow meter according to the present invention.

<Effect>
In the base for the flow meter according to the present invention, the bypass flow path can be formed with higher dimensional accuracy than the conventional bypass. Therefore, the ninth embodiment differential pressure type flow meter constituted by the flow meter base according to the present invention can achieve high detection accuracy. Further, the flow meter base according to the present invention includes a bypass portion 110 (groove 111c), a first introduction hole 111a, a first introduction hole 111b, a second introduction hole 121a, a second introduction hole 121b, and an introduction side branch. The hole 122a and the outlet side branch hole 122b are integrally formed. Therefore, the ninth embodiment differential pressure type flow meter constituted by the flow meter base according to the present invention can be manufactured by a more simplified assembly process.

  Hereinafter, a thermal flow control device according to a tenth embodiment of the present invention (hereinafter, may be referred to as “embodiment 10 thermal flow control device”) will be described.

<Constitution>
As shown in FIGS. 16 and 17, the thermal flow control device 101C of the tenth embodiment includes a thermal flow meter 301, a flow control valve 302, an actuator 303 for adjusting the opening degree of the flow control valve, and a control unit. (Not shown), and the control unit controls the actuator 303 based on the detection value acquired by the thermal flow meter 301 to adjust the opening degree of the flow control valve 302, thereby A thermal flow rate control device configured to bring the flow rate of the fluid flowing into the sensor tube 304 through the branch hole 122a and flowing out of the sensor tube 304 through the outlet-side branch hole 122b close to a predetermined target value. is there.

  However, the thermal flow meter 301 includes a flow control device base (Example 7 flow control device base 101BC) according to the present invention, a sensor tube 304, and a pair of sensor wires 305a and 305b wound around the sensor tube 304. And a detection value corresponding to the flow rate of the fluid is configured to be acquired based on a difference in electrical resistance value between the pair of sensor wires 305a and 305b. The general configuration of the thermal flow meter is well known to those skilled in the art and will not be further described here. In addition, since the configuration and operational effects of the base for the flow rate control device 101BC of Embodiment 7 have already been described, the description thereof is omitted here. The black areas in FIGS. 16A and 16B represent the flow rate control device base 101BC of the seventh embodiment. The black area in FIG. 17 represents a cross-sectional area in which a portion of the first member constituting the flow control device base 101BC of Example 7 where no through hole or groove is formed is laminated and formed into a lump shape. The hatched area represents the cross-sectional area of the portion where the groove 111c is formed.

  Further, the sensor tube 304 is fixed to the base for the flow rate control device 101BC of the seventh embodiment so that the introduction side branch hole 122a and the outlet side branch hole 122b communicate in an airtight manner through the inside of the sensor tube 304. The flow rate control valve 302 is fixed to the base 101BC for the flow rate control device of the seventh embodiment so that the lead-out hole 121b and the fifth introduction hole 123a communicate with each other in an airtight manner via the flow rate control valve 302.

  In Example 10 thermal flow rate control apparatus 101C, the above-described branch connection structure is used so that the inlet side branch hole 122a and the outlet side branch hole 122b communicate in an airtight manner through the inside of the sensor tube 304. Example 7 A sensor tube 304 is fixed to the flow control device base 101BC. However, the structure for branch connection is not an essential component in the thermal flow control device according to the present invention.

<Function and effect>
In the seventh embodiment of the flow control device base 101BC, the bypass flow path can be formed with higher dimensional accuracy than the conventional bypass. Therefore, the thermal flow control device 101C according to the tenth embodiment including the base 101BC for the flow control device according to the seventh embodiment can achieve high control accuracy. Further, in the embodiment 7 of the flow control device base 101BC, there are a bypass portion 110 (groove 111c), a first introduction hole 111a, a first introduction hole 111b, a second introduction hole 121a, a second introduction hole 121b, and an introduction side. The branch hole 122a, the outlet side branch hole 122b, the fifth introduction hole 123a, and the fifth outlet hole 123b are integrally formed. Therefore, the thermal flow control device 101C of the tenth embodiment configured by the base 7BC for the flow control device of the seventh embodiment can be manufactured by a more simplified assembly process.

  Hereinafter, a differential pressure type flow control device according to an eleventh embodiment of the present invention (hereinafter, may be referred to as “embodiment 11 differential pressure type flow control device”) will be described.

<Constitution>
Example 11 A differential pressure type flow control device includes a differential pressure type flow meter, a flow rate control valve, an actuator for adjusting the opening degree of the flow rate control valve, and a control unit, and the control unit is configured to control the differential pressure type flow rate. The difference is configured to bring the flow rate of the fluid closer to a predetermined target value by controlling the actuator based on a detection value acquired by a meter and adjusting the opening of the flow rate control valve. It is a pressure type flow control device.

  However, the differential pressure type flow meter includes a base for the flow rate control device of the present invention, an upstream pressure sensor, and a downstream pressure sensor, and flows in from the first introduction hole 111a and passes through the groove 111c of the bypass portion 110 to be first led out. The detection value corresponding to the flow rate of the fluid flowing out from the hole 111b is acquired based on the difference in pressure detected by the upstream pressure sensor and the downstream pressure sensor.

  Further, the upstream pressure sensor is fixed to the flow rate control device base so that the detection portion of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole 122a, and the outlet side branch hole 122b. The downstream pressure sensor is fixed to the flow rate control device base so that the detection portion of the downstream pressure sensor is exposed in a space that is in airtight communication with the flow control device. In addition, the flow control valve is fixed to the base for the flow control device so that the second lead-out hole 121b and the fifth introduction hole 123a communicate with each other in an airtight manner via the flow control valve.

  In the differential pressure type flow control device of the eleventh embodiment, the upstream pressure pressure is controlled by the above-described branch connection structure so that the detection part of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole 122a. A sensor is fixed to the base for the flow rate control device, and the downstream side pressure sensor detects the downstream side pressure sensor so that the detection portion of the downstream side pressure sensor is exposed in a space in airtight communication with the outlet side branch hole 122b. The pressure sensor is fixed to the base for the flow rate control device, and the second connection hole 121b and the fifth introduction hole 123a communicate with each other in an airtight manner through the flow rate control valve. A flow control valve is fixed to the base for the flow control device. However, the branch connection structure and the valve connection structure are not indispensable constituent elements in the thermal flow control device according to the present invention.

<Effect>
In the base for the flow control device according to the present invention, the bypass flow path can be formed with higher dimensional accuracy than the conventional bypass. Therefore, the 11th differential pressure type flow control device constituted by the base for flow control device according to the present invention can achieve high control accuracy. Furthermore, the flow control device base according to the present invention includes a bypass portion 110 (groove 111c), a first introduction hole 111a, a first introduction hole 111b, a second introduction hole 121a, a second introduction hole 121b, and an introduction side. The branch hole 122a, the outlet side branch hole 122b, the fifth introduction hole 123a, and the fifth outlet hole 123b are integrally formed. Therefore, the Example 11 differential pressure type flow control device constituted by the base for flow control device according to the present invention can be manufactured by a more simplified assembly process.

  In the above, for the purpose of explaining the present invention, several embodiments and modifications having specific configurations have been described with reference to the accompanying drawings. However, the scope of the present invention is not limited to these illustrative examples. It should be understood that the present invention should not be construed as being limited to the embodiments and the modifications, and that appropriate modifications can be made within the scope of the matters described in the claims and the specification.

  101, 102, 103, 104 ... Bypass unit, 102BM, 104BM ... Base for flowmeter, 101BC ... Base for flow control device, 101C ... Flow control device, 110 ... Bypass section, 111 ... First member, 111a ... First introduction 111b ... first outlet hole, 111c ... groove, 112 ... second member, 112a ... third inlet hole, 112b ... third outlet hole, 112c ... slit, 113 ... third member, 113a ... fourth inlet hole, 113b ... 4th lead-out hole, 120 ... external connection part, 120a, 120c ... external connection member, 120b ... mesh, 120d ... slit, 121a ... second introduction hole, 121b ... second lead-out hole, 122a ... introduction side branch hole, 122b... Outlet side branch hole, 123a... Fifth introduction hole, 123b... Fifth exit hole, 131a, 131b, 131c. Flow path, 210a ... inlet side joint, 210b ... outlet side joint, 220a, 220b ... opening, 230a ... upstream pressure sensor, 230b ... downstream pressure sensor, 301 ... thermal flow meter, 302 ... flow control valve, 303 ... actuators, 304 ... sensor tubes, 305a, 305b ... sensor wires, and 400 ... cases.

Claims (18)

A bypass unit comprising a bypass part that is a plate-like member and a pair of external connection parts that are a pair of plate-like members respectively laminated on two main surfaces of the bypass part,
The bypass portion includes a first introduction hole that is at least one through hole having a predetermined size and a predetermined shape, a first lead hole that is at least one through hole having a predetermined size and a predetermined shape, and One first member, which is a thin plate member in which at least one groove communicating the first introduction hole and the first lead-out hole is formed, or the first member of the adjacent first member is provided. Two or more first members are stacked such that the first introduction holes communicate in an airtight manner and the first outlet holes of the adjacent first members communicate in an airtight manner,
A second introduction hole which is at least one through hole having a predetermined size and a predetermined shape is formed in any one of the pair of external connection portions, and any one of the pair of external connection portions is formed. Is formed with a second outlet hole which is at least one through hole having a predetermined size and a predetermined shape,
The first introduction hole formed in the first member and the second introduction hole formed in the external connection portion communicate with each other in an airtight manner, and the first lead-out hole formed in the first member and the external The second outlet hole formed in the connecting portion is configured to communicate in an airtight manner,
Bypass unit. The bypass unit according to claim 1,
The first member is configured as a laminate in which a second member that is one thin plate-like member and a third member that is one thin plate-like member are laminated,
The second member includes a third introduction hole that is at least one through hole having a predetermined size and a predetermined shape, and a third outlet hole that is at least one through hole having a predetermined size and a predetermined shape. And a slit which is at least one through hole having a predetermined width and a predetermined length is formed,
The third member includes a fourth introduction hole which is at least one through hole having a predetermined size and a predetermined shape, and a fourth lead hole which is at least one through hole having a predetermined size and a predetermined shape. Is formed,
The third introduction hole of the second member and the fourth introduction hole of the third member are in airtight communication to form the first introduction hole in the first member, and the second member The third lead-out hole and the fourth lead-out hole of the third member communicate in an airtight manner to form the first lead-out hole in the first member;
The introduction end portion, which is the end portion closer to the third introduction hole among both ends of the slit, and the third introduction hole are configured to communicate in an airtight manner through the fourth introduction hole, The lead-out end portion, which is the end portion closer to the third lead-out hole among both ends of the slit, and the third lead-out hole are configured to communicate airtightly through the fourth lead-out hole,
The opening surface of the slit formed in the second member other than the introduction end portion and the lead-out end portion is airtight by a portion of the third member where the fourth introduction hole and the fourth lead-out hole are not formed. Clogged to form the groove in the first member;
Bypass unit. The bypass unit according to claim 2,
In a parallel projection onto a plane parallel to the main surface of the bypass portion,
The fourth introduction hole is formed so as to overlap at least a part of the third introduction hole and the introduction end;
The fourth outlet hole is formed so as to overlap at least a part of the third outlet hole and the outlet end part.
Bypass unit. The bypass unit according to any one of claims 1 to 3,
In the parallel projection onto the plane parallel to the main surface of the bypass portion, the groove is formed in a straight line,
Bypass unit. The bypass unit according to any one of claims 1 to 3,
In the parallel projection onto the plane parallel to the main surface of the bypass portion, the groove is formed in a spiral shape.
Bypass unit. The bypass unit according to any one of claims 1 to 5,
An introduction pipe connection structure which is a structure for fixing the introduction pipe to the bypass unit so that the introduction pipe for introducing fluid from the outside and the second introduction hole communicate in an airtight manner;
A structure for connecting a lead-out pipe, which is a structure for fixing the lead-out pipe to the bypass unit so that the lead-out pipe for leading the fluid to the outside communicates with the second lead-out hole in an airtight manner;
Further comprising
Bypass unit. A base for a flow meter comprising the bypass unit according to any one of claims 1 to 6,
Either one of the pair of external connection portions is further formed with an introduction-side branch hole that is at least one through-hole having a predetermined size and a predetermined shape and in airtight communication with the first introduction hole. And
Either one of the pair of external connection portions is further formed with a lead-out side branch hole which is at least one through hole having a predetermined size and a predetermined shape and in airtight communication with the first lead-out hole. ing,
Base for flowmeter. The flowmeter base according to claim 7,
A structure for fixing a fourth member, which is a separate member having an internal space, to the base for the flowmeter so that the introduction side branch hole and / or the lead-out side branch hole and the internal space communicate in an airtight manner. Further comprising a certain branch connection structure,
Base for flow meter. A base for a flow control device comprising the base for a flow meter according to claim 7 or claim 8,
Either one of the pair of external connection portions is further formed with a fifth introduction hole, which is at least one through hole having a predetermined size and a predetermined shape, and one of the pair of external connection portions. Is further formed with a fifth outlet hole which is at least one through hole having a predetermined size and a predetermined shape,
The at least one first member is further formed with an independent flow path that is a flow path that hermetically communicates the fifth introduction hole and the fifth lead hole and does not communicate with the groove.
Base for flow control device. A base for a flow control device according to claim 9,
A valve connection structure which is a structure for fixing the flow control valve to the flow control device base so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow control valve; Prepare
Base for flow control device. The flowmeter base according to claim 7 or claim 8, a sensor tube, and a pair of sensor wires wound around the sensor tube, and flows into the sensor tube through the introduction-side branch hole and is led out. A thermal flow meter that acquires a detection value corresponding to a flow rate of fluid flowing out from the inside of the sensor tube through a side branch hole based on a difference in electrical resistance value of the pair of sensor wires,
The sensor tube is fixed to the flowmeter base so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube;
Thermal flow meter. A flowmeter base according to claim 8, a sensor tube as the fourth member, and a pair of sensor wires wound around the sensor tube, and flows into the sensor tube through the introduction side branch hole. A thermal flow meter that obtains a detection value corresponding to a flow rate of fluid flowing out from the inside of the sensor tube through the outlet-side branch hole based on a difference in electrical resistance value between the pair of sensor wires,
The sensor tube is fixed to the flowmeter base by the branch connection structure so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube.
Thermal flow meter. 9. The flowmeter base according to claim 7 or 8, an upstream pressure sensor, and a downstream pressure sensor, wherein the first lead-out hole flows from the first introduction hole and passes through the groove of the bypass portion. A differential pressure type flow meter for obtaining a detection value corresponding to a flow rate of the fluid flowing out from the upstream pressure sensor and a downstream pressure sensor based on a difference in pressure detected by the upstream pressure sensor and the downstream pressure sensor,
The upstream pressure sensor is fixed to the flowmeter base so that the detection portion of the upstream pressure sensor is exposed in a space in airtight communication with the introduction side branch hole;
The downstream pressure sensor is fixed to the flowmeter base so that the detection portion of the downstream pressure sensor is exposed in a space that is airtightly communicated with the outlet branch hole;
Differential pressure type flow meter. The flowmeter base according to claim 8, an upstream pressure sensor as the fourth member, and a downstream pressure sensor as the fourth member, and flows into the groove of the bypass portion from the first introduction hole. A differential pressure type flow meter that obtains a detection value corresponding to the flow rate of the fluid flowing out from the first outlet hole through the difference between the pressures detected by the upstream pressure sensor and the downstream pressure sensor,
The upstream pressure sensor is fixed to the flow meter base by the branch connection structure so that the detection portion of the upstream pressure sensor is exposed in a space that is airtightly communicated with the introduction side branch hole,
The downstream pressure sensor is fixed to the flowmeter base by the branch connection structure so that the detection portion of the downstream pressure sensor is exposed in a space in airtight communication with the lead-out branch hole.
Differential pressure type flow meter. The flow rate control device base according to claim 9 or 10, a sensor tube, and a pair of sensor wires wound around the sensor tube, and flows into the sensor tube through the introduction side branch hole, and A thermal flow meter for acquiring a detection value corresponding to a flow rate of fluid flowing out from the inside of the sensor tube through the outlet-side branch hole based on a difference in electrical resistance value of the pair of sensor wires, a flow control valve, An actuator for adjusting the opening of the flow control valve, and a control unit,
The control unit controls the actuator based on the detection value acquired by the thermal flow meter to adjust the opening of the flow control valve, thereby setting the flow rate of the fluid to a predetermined target value. Configured to be close to the
A thermal flow control device,
The sensor tube is fixed to the base for the flow rate control device so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube;
The flow rate control valve is fixed to the flow rate control device base such that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve;
Thermal flow control device. A flow control device base according to claim 10, a sensor tube as the fourth member, and a pair of sensor wires wound around the sensor tube, and flows into the sensor tube through the introduction side branch hole. A thermal flow meter for acquiring a detection value corresponding to a flow rate of the fluid flowing out from the inside of the sensor tube through the outlet-side branch hole based on a difference in electrical resistance value between the pair of sensor wires, a flow control valve, An actuator for adjusting the opening of the flow control valve, and a control unit,
The control unit controls the actuator based on the detection value acquired by the thermal flow meter to adjust the opening of the flow control valve, thereby setting the flow rate of the fluid to a predetermined target value. Configured to be close to the
A thermal flow control device,
The sensor tube is fixed to the flow rate control device base by the branch connection structure so that the introduction side branch hole and the outlet side branch hole communicate in an airtight manner through the inside of the sensor tube;
The flow rate control valve is fixed to the flow rate control device base by the valve connection structure so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve.
Thermal flow control device. A flow control device base according to claim 9, an upstream pressure sensor, and a downstream pressure sensor, wherein the first lead-out flows from the first introduction hole and passes through the groove of the bypass portion. A differential pressure type flow meter for acquiring a detection value corresponding to a flow rate of the fluid flowing out from the hole based on a difference in pressure detected by the upstream pressure sensor and the downstream pressure sensor, a flow control valve, and the flow control valve An actuator for adjusting the opening degree of the controller, and a control unit,
The control unit controls the actuator based on the detection value acquired by the differential pressure type flow meter to adjust the opening of the flow control valve, thereby setting the flow rate of the fluid to a predetermined target value. Configured to be close to the
A differential pressure flow control device,
The upstream pressure sensor is fixed to the base for the flow rate control device so that the detection part of the upstream pressure sensor is exposed in a space that is in airtight communication with the introduction side branch hole;
The downstream pressure sensor is fixed to the base for the flow rate control device so that the detection portion of the downstream pressure sensor is exposed in a space in airtight communication with the outlet branch hole;
The flow rate control valve is fixed to the flow rate control device base such that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve;
Differential pressure type flow control device. The base for a flow control device according to claim 10, an upstream pressure sensor as the fourth member, and a downstream pressure sensor as the fourth member, and flows in from the first introduction hole and enters the bypass portion. A differential pressure type flow meter for acquiring a detection value corresponding to a flow rate of the fluid flowing out of the first outlet hole through the groove based on a difference in pressure detected by the upstream pressure sensor and the downstream pressure sensor; A control valve, an actuator for adjusting the opening of the flow control valve, and a control unit,
The control unit controls the actuator based on the detection value acquired by the differential pressure type flow meter to adjust the opening of the flow control valve, thereby setting the flow rate of the fluid to a predetermined target value. Configured to be close to the
A differential pressure flow control device,
The upstream pressure sensor is fixed to the flow meter base by the branch connection structure so that the detection portion of the upstream pressure sensor is exposed in a space that is airtightly communicated with the introduction side branch hole,
The downstream pressure sensor is fixed to the flow meter base by the branch connection structure so that the detection portion of the downstream pressure sensor is exposed in a space in airtight communication with the lead-out branch hole,
The flow rate control valve is fixed to the flow rate control device base by the valve connection structure so that the second lead-out hole and the fifth introduction hole communicate in an airtight manner via the flow rate control valve.
Differential pressure type flow control device.

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