JPS61184921U - - Google Patents

Info

Publication number
JPS61184921U
JPS61184921U JP6860685U JP6860685U JPS61184921U JP S61184921 U JPS61184921 U JP S61184921U JP 6860685 U JP6860685 U JP 6860685U JP 6860685 U JP6860685 U JP 6860685U JP S61184921 U JPS61184921 U JP S61184921U
Authority
JP
Japan
Prior art keywords
laminar flow
recess
flow element
lid
differential pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6860685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222647Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6860685U priority Critical patent/JPH0222647Y2/ja
Publication of JPS61184921U publication Critical patent/JPS61184921U/ja
Application granted granted Critical
Publication of JPH0222647Y2 publication Critical patent/JPH0222647Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP6860685U 1985-05-09 1985-05-09 Expired JPH0222647Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6860685U JPH0222647Y2 (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6860685U JPH0222647Y2 (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Publications (2)

Publication Number Publication Date
JPS61184921U true JPS61184921U (enrdf_load_stackoverflow) 1986-11-18
JPH0222647Y2 JPH0222647Y2 (enrdf_load_stackoverflow) 1990-06-19

Family

ID=30603503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6860685U Expired JPH0222647Y2 (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Country Status (1)

Country Link
JP (1) JPH0222647Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454220A (en) * 1987-08-26 1989-03-01 Hitachi Ltd Small laminar flowmeter
JP2017191090A (ja) * 2016-04-07 2017-10-19 日立金属株式会社 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3597527B2 (ja) * 2003-05-19 2004-12-08 シーケーディ株式会社 熱式流量計
WO2011040409A1 (ja) * 2009-10-01 2011-04-07 株式会社堀場エステック 流量測定機構及びマスフローコントローラ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454220A (en) * 1987-08-26 1989-03-01 Hitachi Ltd Small laminar flowmeter
JP2017191090A (ja) * 2016-04-07 2017-10-19 日立金属株式会社 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置

Also Published As

Publication number Publication date
JPH0222647Y2 (enrdf_load_stackoverflow) 1990-06-19

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