JPS6118334B2 - - Google Patents
Info
- Publication number
- JPS6118334B2 JPS6118334B2 JP52113374A JP11337477A JPS6118334B2 JP S6118334 B2 JPS6118334 B2 JP S6118334B2 JP 52113374 A JP52113374 A JP 52113374A JP 11337477 A JP11337477 A JP 11337477A JP S6118334 B2 JPS6118334 B2 JP S6118334B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- dicing
- support plate
- semiconductor
- porous support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11337477A JPS5447580A (en) | 1977-09-22 | 1977-09-22 | Dislodging device of plate form objects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11337477A JPS5447580A (en) | 1977-09-22 | 1977-09-22 | Dislodging device of plate form objects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5447580A JPS5447580A (en) | 1979-04-14 |
| JPS6118334B2 true JPS6118334B2 (cg-RX-API-DMAC7.html) | 1986-05-12 |
Family
ID=14610658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11337477A Granted JPS5447580A (en) | 1977-09-22 | 1977-09-22 | Dislodging device of plate form objects |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5447580A (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004131215A (ja) * | 2002-10-09 | 2004-04-30 | Ushio Inc | 帯状ワークの搬送装置 |
| JP2006032661A (ja) * | 2004-07-16 | 2006-02-02 | Disco Abrasive Syst Ltd | 切削装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5435652Y2 (cg-RX-API-DMAC7.html) * | 1971-02-20 | 1979-10-29 |
-
1977
- 1977-09-22 JP JP11337477A patent/JPS5447580A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5447580A (en) | 1979-04-14 |
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