JPS61179749U - - Google Patents
Info
- Publication number
- JPS61179749U JPS61179749U JP6440085U JP6440085U JPS61179749U JP S61179749 U JPS61179749 U JP S61179749U JP 6440085 U JP6440085 U JP 6440085U JP 6440085 U JP6440085 U JP 6440085U JP S61179749 U JPS61179749 U JP S61179749U
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- view
- wafer cartridge
- transfer means
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6440085U JPH0648843Y2 (ja) | 1985-04-30 | 1985-04-30 | 半導体処理用移送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6440085U JPH0648843Y2 (ja) | 1985-04-30 | 1985-04-30 | 半導体処理用移送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61179749U true JPS61179749U (tr) | 1986-11-10 |
| JPH0648843Y2 JPH0648843Y2 (ja) | 1994-12-12 |
Family
ID=30595449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6440085U Expired - Lifetime JPH0648843Y2 (ja) | 1985-04-30 | 1985-04-30 | 半導体処理用移送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648843Y2 (tr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63278225A (ja) * | 1987-05-08 | 1988-11-15 | Teru Sagami Kk | 熱処理用ボ−ト |
-
1985
- 1985-04-30 JP JP6440085U patent/JPH0648843Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63278225A (ja) * | 1987-05-08 | 1988-11-15 | Teru Sagami Kk | 熱処理用ボ−ト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648843Y2 (ja) | 1994-12-12 |