JPS61179735U - - Google Patents

Info

Publication number
JPS61179735U
JPS61179735U JP6345785U JP6345785U JPS61179735U JP S61179735 U JPS61179735 U JP S61179735U JP 6345785 U JP6345785 U JP 6345785U JP 6345785 U JP6345785 U JP 6345785U JP S61179735 U JPS61179735 U JP S61179735U
Authority
JP
Japan
Prior art keywords
gas passage
reaction
tube
heat treatment
reaction gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6345785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6345785U priority Critical patent/JPS61179735U/ja
Publication of JPS61179735U publication Critical patent/JPS61179735U/ja
Pending legal-status Critical Current

Links

JP6345785U 1985-04-27 1985-04-27 Pending JPS61179735U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6345785U JPS61179735U (cg-RX-API-DMAC7.html) 1985-04-27 1985-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6345785U JPS61179735U (cg-RX-API-DMAC7.html) 1985-04-27 1985-04-27

Publications (1)

Publication Number Publication Date
JPS61179735U true JPS61179735U (cg-RX-API-DMAC7.html) 1986-11-10

Family

ID=30593620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6345785U Pending JPS61179735U (cg-RX-API-DMAC7.html) 1985-04-27 1985-04-27

Country Status (1)

Country Link
JP (1) JPS61179735U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03285328A (ja) * 1990-03-31 1991-12-16 Tokyo Electron Sagami Ltd 縦型熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03285328A (ja) * 1990-03-31 1991-12-16 Tokyo Electron Sagami Ltd 縦型熱処理装置

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