JPS61178700A - Window foil for electron-beam irradiation device - Google Patents
Window foil for electron-beam irradiation deviceInfo
- Publication number
- JPS61178700A JPS61178700A JP60019082A JP1908285A JPS61178700A JP S61178700 A JPS61178700 A JP S61178700A JP 60019082 A JP60019082 A JP 60019082A JP 1908285 A JP1908285 A JP 1908285A JP S61178700 A JPS61178700 A JP S61178700A
- Authority
- JP
- Japan
- Prior art keywords
- foil
- window
- irradiation
- window foil
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、電子線照射装置の照射窓に用いられて、真
空側と照射雰囲気側とを分離する窓箔に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a window foil used in an irradiation window of an electron beam irradiation device to separate a vacuum side and an irradiation atmosphere side.
第２図は、電子線照射装置（走査形電子線照射装置）の
加速装置部の一例を示す概略図である。FIG. 2 is a schematic diagram showing an example of an accelerator section of an electron beam irradiation device (scanning type electron beam irradiation device).
ケーブル１には直流電源（図示省略）が接続されており
、加速管部２で発生されて加速された電子線ＥＢは、こ
の例では走査部３において走査され、真空側ＶＳから照
射窓４を通して照射雰囲気側ＡＳに引き出されて被照射
物５に照射される。A DC power supply (not shown) is connected to the cable 1, and the electron beam EB generated and accelerated in the acceleration tube section 2 is scanned in the scanning section 3 in this example, and is emitted from the vacuum side VS through the irradiation window 4. The light is drawn out to the irradiation atmosphere side AS and is irradiated onto the object 5 to be irradiated.
第３図は、照射窓を部０分的に示す断面図である。FIG. 3 is a sectional view partially showing the irradiation window.
照射窓４は、真空側ＶＳと照射雰囲気側（例えば大気側
）ＡＳとを分離するための窓箔４３と、窓箔４３等を冷
却するための多数の水冷パイプ４２等から成り、当該水
冷パイプ４２は、窓箔４３が大気圧によって真空側ｖＳ
へ押されるのを支えるために桟４１によって補強されて
いる。The irradiation window 4 consists of a window foil 43 for separating the vacuum side VS and the irradiation atmosphere side (for example, the atmosphere side) AS, and a large number of water-cooled pipes 42 for cooling the window foil 43 and the like. 42, the window foil 43 is moved to the vacuum side vS by atmospheric pressure.
It is reinforced by crosspieces 41 to support it from being pushed.
上述した窓箔４３は、電子線ＥＢがそこを通過する時に
エネルギーを吸収して発熱する。その場合、電子線ＥＢ
のエネルギーが低い方が窓箔４３の材質のいかんにかか
わらず、そこで吸収されるエネルギーが大（即ち、トラ
ップ率が大）となってその発熱も大となる性質がある。The window foil 43 described above absorbs energy and generates heat when the electron beam EB passes therethrough. In that case, electron beam EB
Regardless of the material of the window foil 43, the lower the energy, the more energy is absorbed there (that is, the trapping rate is large), and the heat generated is also large.
従って、窓箔４３としては、低エネルギーの電子線ＥＢ
の場合には、熱伝導の良い材料、例えば純アルミニウム
箔が利用される。しかしながら、照射雰囲気が大気中の
場合には電子線の照射によってオゾンが発生し、純アル
ミニウム箔はこれによって酸化されて寿命が短くなる。Therefore, as the window foil 43, the low energy electron beam EB
In this case, a material with good thermal conductivity, such as pure aluminum foil, is used. However, when the irradiation atmosphere is in the air, ozone is generated by the electron beam irradiation, and the pure aluminum foil is oxidized by this, shortening its life.
これを防止するためには、窒素ガス等の不活性ガスによ
って照射雰囲気を置換する必要があり、非常に面倒であ
る。In order to prevent this, it is necessary to replace the irradiation atmosphere with an inert gas such as nitrogen gas, which is very troublesome.
一方、高エネルギーの電子線ＥＢの場合には、窓箔４３
の発熱は低下するので耐酸性（酸化性ガスに耐えること
）の観点から材料を選定することができる。例えば、耐
酸性の純チタン箔を窓箔４３に用いることができるが、
これを低エネルギーにおいて利用すると、純チタン箔は
熱伝導が悪くて温度上昇が大きくなり、従ってビームの
密度を上げることができないという問題が生じる。On the other hand, in the case of high-energy electron beam EB, the window foil 43
Since the heat generation of is reduced, materials can be selected from the viewpoint of acid resistance (resistance to oxidizing gas). For example, acid-resistant pure titanium foil can be used for the window foil 43;
If this is used at low energy, a problem arises in that pure titanium foil has poor thermal conductivity, resulting in a large temperature rise, and therefore, it is not possible to increase the beam density.
従ってこの発明は、低エネルギーの場合においてもビー
ム密度を大きく取ることができ、しかも空気中での照射
が可能である窓箔を提供することを目的とする。Therefore, it is an object of the present invention to provide a window foil that can provide a high beam density even when using low energy and can be irradiated in air.
この発明の窓箔は、良熱伝導材から成る箔の照射雰囲気
側の表面を耐酸性の膜で覆っている。In the window foil of the present invention, the surface of the foil made of a good heat conductive material on the irradiation atmosphere side is covered with an acid-resistant film.
良熱伝導材から成る箔によって温度上昇が軽減される。 The temperature rise is reduced by the foil made of a good thermally conductive material.
従って、低エネルギーの場合においてもビーム密度を大
きく取ることができる。一方、耐酸性の膜によって上記
箔が酸化されるのが防止される。従って、空気中での照
射が可能である。Therefore, even in the case of low energy, the beam density can be increased. On the other hand, the acid-resistant film prevents the foil from being oxidized. Therefore, irradiation in air is possible.
第１図は、この発明の窓箔を部分的に示す断面図である
。この発明の窓箔４０は、良熱伝導材から成る箔４０１
、例えば純アルミニウム箔の照射雰囲気側ＡＳの表面を
、耐酸性の膜４０２、例えばチタンとか窒化チタン（Ｔ
ｔＮ）等の膜で覆って形成されている。この場合、箔４
０１の真空側■Ｓの表面は、前述した水冷パイプ４２と
の熱伝導を確保する観点から、膜４０２で覆わない方が
好ましい。FIG. 1 is a sectional view partially showing the window foil of the present invention. The window foil 40 of the present invention includes a foil 401 made of a good heat conductive material.
For example, the surface of the irradiation atmosphere side AS of pure aluminum foil is coated with an acid-resistant film 402, such as titanium or titanium nitride (T
It is formed by covering it with a film such as tN). In this case, foil 4
From the viewpoint of ensuring heat conduction with the water cooling pipe 42 described above, it is preferable that the surface of the vacuum side (1) S of 01 not be covered with the film 402.
良熱伝導材から成る箔４０１の表面を耐酸性の膜４０２
で覆う手段としては、例えば、純アルミニウム箔の表面
にチタンを真空蒸着させたり、純アルミニウム箔の表面
にチタンを真空蒸着させると共に窒素イオンを照射した
りする。The surface of the foil 401 made of a good heat conductive material is coated with an acid-resistant film 402.
Examples of the means for covering the surface of the aluminum foil include vacuum-depositing titanium on the surface of pure aluminum foil, or vacuum-depositing titanium on the surface of pure aluminum foil and irradiating nitrogen ions.
以上のような窓箔４０においては、良熱伝導材から成る
箔４０１によって温度上昇が軽減されるので、低エネル
ギーの電子線ＥＢの場合でもビーム密度を大きく取るこ
とができる０例えば、箔４０１が純アルミニウム箔の場
合は、純アルミニウムの窓箔と同程度にビーム密度を取
ることができる。しかも、箔４０１の照射雰囲気側ＡＳ
の表面は耐酸性の膜４０２で覆われているので、これに
よって箔４０１が照射雰囲気中に発生するオゾンによっ
て酸化されることもなく、従って照射雰囲気を窒素ガス
等で置換しなくても空気中での照射が可能である。In the window foil 40 as described above, the temperature rise is reduced by the foil 401 made of a good heat conductive material, so even in the case of a low-energy electron beam EB, a high beam density can be achieved. In the case of pure aluminum foil, it is possible to obtain a beam density comparable to that of pure aluminum window foil. Moreover, the irradiation atmosphere side AS of the foil 401
Since the surface of the foil 401 is covered with an acid-resistant film 402, the foil 401 will not be oxidized by ozone generated in the irradiation atmosphere. irradiation is possible.
もちろん、上述のような窓箔４０は、高エネルギーの電
子線の場合にも、低エネルギーの場合と同様に利用でき
ることはいうまでもない。Of course, it goes without saying that the window foil 40 as described above can be used in the case of high-energy electron beams as well as in the case of low-energy electron beams.
以上のようにこの発明によれば、低エネルギー、高エネ
ルギーいずれの場合においても、ビーム密度を大きく取
ることができ、しかも空気中での照射が可能となる。As described above, according to the present invention, the beam density can be increased in both low energy and high energy cases, and irradiation can be performed in air.
第１図は、この発明の窓箔を部分的に示す断面図である
。第２図は、電子線照射装置（走査形電子線照射装置）
の加速装置部の一例を示す概略図である。第３図は、照
射窓を部分的に示す断面図である。
４・・・照射窓、４０・・・この発明の窓箔、４０１・
・・良熱伝導材から成る箔、４０２・・・耐酸性の膜、
ＥＢ・・・電子線、ＶＳ・・・真空側、Ａｓ・・照射雰
囲気側FIG. 1 is a sectional view partially showing the window foil of the present invention. Figure 2 shows an electron beam irradiation device (scanning type electron beam irradiation device)
It is a schematic diagram showing an example of the accelerator section of. FIG. 3 is a sectional view partially showing the irradiation window. 4... Irradiation window, 40... Window foil of this invention, 401.
...Foil made of a good heat conductive material, 402...Acid-resistant film,
EB...Electron beam, VS...Vacuum side, As...Irradiation atmosphere side
Claims (1)
酸性の膜で覆ったことを特徴とする電子線照射装置用窓
箔。(1) A window foil for an electron beam irradiation device, characterized in that the surface of the foil made of a good heat conductive material on the irradiation atmosphere side is covered with an acid-resistant film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60019082A JPS61178700A (en) | 1985-02-01 | 1985-02-01 | Window foil for electron-beam irradiation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60019082A JPS61178700A (en) | 1985-02-01 | 1985-02-01 | Window foil for electron-beam irradiation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61178700A true JPS61178700A (en) | 1986-08-11 |
Family
ID=11989522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60019082A Pending JPS61178700A (en) | 1985-02-01 | 1985-02-01 | Window foil for electron-beam irradiation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61178700A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014503805A (en) * | 2010-12-02 | 2014-02-13 | テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニム | Electronic exit window foil |
-
1985
- 1985-02-01 JP JP60019082A patent/JPS61178700A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014503805A (en) * | 2010-12-02 | 2014-02-13 | テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニム | Electronic exit window foil |
| US9384934B2 (en) | 2010-12-02 | 2016-07-05 | Tetra Laval Holdings & Finance S.A. | Electron exit window foil |
| US9852874B2 (en) | 2010-12-02 | 2017-12-26 | Tetra Laval Holdings & Finance S.A. | Electron exit window foil |
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